{"id":"https://openalex.org/W1977360223","doi":"https://doi.org/10.1360/04yf0115","title":"Full-IC manufacturability check based on dense silicon imaging","display_name":"Full-IC manufacturability check based on dense silicon imaging","publication_year":2005,"publication_date":"2005-01-01","ids":{"openalex":"https://openalex.org/W1977360223","doi":"https://doi.org/10.1360/04yf0115","mag":"1977360223"},"language":"en","primary_location":{"id":"doi:10.1360/04yf0115","is_oa":false,"landing_page_url":"http://doi.org/10.1360/04yf0115","pdf_url":null,"source":{"id":"https://openalex.org/S4210224633","display_name":"Science in China Series F Information Sciences","issn_l":"1009-2757","issn":["1009-2757","1862-2836"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science in China Series F","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101586250","display_name":"Xiaolang Yan","orcid":"https://orcid.org/0000-0003-2284-3036"},"institutions":[{"id":"https://openalex.org/I4210092088","display_name":"Zhejiang Province Institute of Architectural Design and Research","ror":"https://ror.org/00f89ms08","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210092088"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiaolang YAN","raw_affiliation_strings":["Institute of VLSI Design Zhejiang University Hangzhou China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of VLSI Design Zhejiang University Hangzhou China","institution_ids":["https://openalex.org/I4210092088","https://openalex.org/I76130692"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5101586250"],"corresponding_institution_ids":["https://openalex.org/I4210092088","https://openalex.org/I76130692"],"apc_list":null,"apc_paid":null,"fwci":0.936,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.76260062,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"48","issue":"4","first_page":"533","last_page":"533"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/design-for-manufacturability","display_name":"Design for manufacturability","score":0.9346649646759033},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4545520842075348},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3396175503730774},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.19788745045661926},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1977190375328064},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.08457207679748535}],"concepts":[{"id":"https://openalex.org/C62064638","wikidata":"https://www.wikidata.org/wiki/Q553878","display_name":"Design for manufacturability","level":2,"score":0.9346649646759033},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4545520842075348},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3396175503730774},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19788745045661926},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1977190375328064},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.08457207679748535}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1360/04yf0115","is_oa":false,"landing_page_url":"http://doi.org/10.1360/04yf0115","pdf_url":null,"source":{"id":"https://openalex.org/S4210224633","display_name":"Science in China Series F Information Sciences","issn_l":"1009-2757","issn":["1009-2757","1862-2836"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science in China Series F","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.4300000071525574}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W195108029","https://openalex.org/W1966095106","https://openalex.org/W1968264447","https://openalex.org/W1998859420","https://openalex.org/W2021570649","https://openalex.org/W2046800778","https://openalex.org/W2059147047","https://openalex.org/W2061209338","https://openalex.org/W2061965479","https://openalex.org/W2064053211","https://openalex.org/W2070606736","https://openalex.org/W2083765410","https://openalex.org/W2089627874","https://openalex.org/W2090690379","https://openalex.org/W2094050913","https://openalex.org/W2095241995","https://openalex.org/W2135517221","https://openalex.org/W2167822235"],"related_works":["https://openalex.org/W2094969048","https://openalex.org/W994558755","https://openalex.org/W3035935536","https://openalex.org/W2010746423","https://openalex.org/W2372119205","https://openalex.org/W2117710422","https://openalex.org/W1987106725","https://openalex.org/W1787300689","https://openalex.org/W4283270028","https://openalex.org/W1891369868"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}