{"id":"https://openalex.org/W2982844315","doi":"https://doi.org/10.1177/0959651819874563","title":"Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage","display_name":"Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage","publication_year":2019,"publication_date":"2019-09-16","ids":{"openalex":"https://openalex.org/W2982844315","doi":"https://doi.org/10.1177/0959651819874563","mag":"2982844315"},"language":"en","primary_location":{"id":"doi:10.1177/0959651819874563","is_oa":false,"landing_page_url":"https://doi.org/10.1177/0959651819874563","pdf_url":null,"source":{"id":"https://openalex.org/S4210196624","display_name":"Proceedings of the Institution of Mechanical Engineers Part I Journal of Systems and Control Engineering","issn_l":"0959-6518","issn":["0959-6518","2041-3041"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5035228822","display_name":"Weicai Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weicai Huang","raw_affiliation_strings":["Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056082865","display_name":"Kaiming Yang","orcid":"https://orcid.org/0009-0000-7734-0095"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Kaiming Yang","raw_affiliation_strings":["Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112890006","display_name":"Yu Zhu","orcid":"https://orcid.org/0009-0006-6480-8924"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Zhu","raw_affiliation_strings":["Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100353929","display_name":"Xin Li","orcid":"https://orcid.org/0000-0002-6992-8849"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Li","raw_affiliation_strings":["Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004890244","display_name":"Haihua Mu","orcid":"https://orcid.org/0000-0002-6501-6447"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haihua Mu","raw_affiliation_strings":["Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, P.R. China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5028247989","display_name":"Min Li","orcid":"https://orcid.org/0000-0002-6929-5156"},"institutions":[{"id":"https://openalex.org/I3124059619","display_name":"China University of Geosciences","ror":"https://ror.org/04gcegc37","country_code":"CN","type":"education","lineage":["https://openalex.org/I3124059619"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Li","raw_affiliation_strings":["School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan, P.R. China","institution_ids":["https://openalex.org/I3124059619"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5056082865"],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":0.5042,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.66750893,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"234","issue":"6","first_page":"748","last_page":"758"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9919000267982483,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.5868052244186401},{"id":"https://openalex.org/keywords/flexibility","display_name":"Flexibility (engineering)","score":0.5471046566963196},{"id":"https://openalex.org/keywords/basis","display_name":"Basis (linear algebra)","score":0.540963888168335},{"id":"https://openalex.org/keywords/parametric-statistics","display_name":"Parametric statistics","score":0.508642315864563},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.4973166286945343},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.49145591259002686},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4823321998119354},{"id":"https://openalex.org/keywords/convex-optimization","display_name":"Convex optimization","score":0.43750640749931335},{"id":"https://openalex.org/keywords/estimation-theory","display_name":"Estimation theory","score":0.42597246170043945},{"id":"https://openalex.org/keywords/regular-polygon","display_name":"Regular polygon","score":0.4189611077308655},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.4164496660232544},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3192540407180786},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.27047649025917053},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2382502555847168},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.23146459460258484},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.19358021020889282},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.08009892702102661}],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.5868052244186401},{"id":"https://openalex.org/C2780598303","wikidata":"https://www.wikidata.org/wiki/Q65921492","display_name":"Flexibility (engineering)","level":2,"score":0.5471046566963196},{"id":"https://openalex.org/C12426560","wikidata":"https://www.wikidata.org/wiki/Q189569","display_name":"Basis (linear algebra)","level":2,"score":0.540963888168335},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.508642315864563},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4973166286945343},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.49145591259002686},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4823321998119354},{"id":"https://openalex.org/C157972887","wikidata":"https://www.wikidata.org/wiki/Q463359","display_name":"Convex optimization","level":3,"score":0.43750640749931335},{"id":"https://openalex.org/C167928553","wikidata":"https://www.wikidata.org/wiki/Q1376021","display_name":"Estimation theory","level":2,"score":0.42597246170043945},{"id":"https://openalex.org/C112680207","wikidata":"https://www.wikidata.org/wiki/Q714886","display_name":"Regular polygon","level":2,"score":0.4189611077308655},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.4164496660232544},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3192540407180786},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.27047649025917053},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2382502555847168},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.23146459460258484},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.19358021020889282},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.08009892702102661},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1177/0959651819874563","is_oa":false,"landing_page_url":"https://doi.org/10.1177/0959651819874563","pdf_url":null,"source":{"id":"https://openalex.org/S4210196624","display_name":"Proceedings of the Institution of Mechanical Engineers Part I Journal of Systems and Control Engineering","issn_l":"0959-6518","issn":["0959-6518","2041-3041"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G375873838","display_name":null,"funder_award_id":"2017ZX02102004","funder_id":"https://openalex.org/F4320335960","funder_display_name":"National Major Science and Technology Projects of China"},{"id":"https://openalex.org/G4008959054","display_name":null,"funder_award_id":"51805496","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335960","display_name":"National Major Science and Technology Projects of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1662965174","https://openalex.org/W1974984002","https://openalex.org/W2000910171","https://openalex.org/W2004328597","https://openalex.org/W2004985815","https://openalex.org/W2041242313","https://openalex.org/W2066043610","https://openalex.org/W2096825228","https://openalex.org/W2098860323","https://openalex.org/W2099590879","https://openalex.org/W2101478407","https://openalex.org/W2111770009","https://openalex.org/W2116154037","https://openalex.org/W2135195563","https://openalex.org/W2156064246","https://openalex.org/W2160873233","https://openalex.org/W2346330105","https://openalex.org/W2482067891","https://openalex.org/W2521402535","https://openalex.org/W2540877599","https://openalex.org/W2564942720","https://openalex.org/W2566133870","https://openalex.org/W2727657836","https://openalex.org/W2811101845","https://openalex.org/W2910787596"],"related_works":["https://openalex.org/W2286391053","https://openalex.org/W2982600058","https://openalex.org/W1963486701","https://openalex.org/W2312483540","https://openalex.org/W4249477090","https://openalex.org/W191745111","https://openalex.org/W1522083559","https://openalex.org/W2007570603","https://openalex.org/W2808224918","https://openalex.org/W3153752017"],"abstract_inverted_index":{"Rational":[0],"basis":[1,22],"functions":[2,23],"are":[3],"introduced":[4],"into":[5],"iterative":[6],"learning":[7],"control":[8],"to":[9],"enhance":[10],"the":[11,18,32,38,61,64,69,76,86,91,97,101,108,115,127,147],"flexibility":[12],"towards":[13],"nonrepeating":[14],"tasks.":[15],"At":[16],"present,":[17],"application":[19],"of":[20,34,120,126],"rational":[21,47],"either":[24],"suffers":[25],"from":[26],"nonconvex":[27],"optimization":[28,56],"problem":[29],"or":[30],"requires":[31],"predefinition":[33],"poles,":[35],"which":[36,54,67],"restricts":[37],"achievable":[39],"performance.":[40],"In":[41,100],"this":[42],"article,":[43],"a":[44],"new":[45],"data-driven":[46],"feedforward":[48],"tuning":[49,88],"approach":[50,129],"is":[51,57,72,83,94,105,112,122,130,144],"developed,":[52],"in":[53,85,118],"convex":[55],"realized":[58],"without":[59],"predefining":[60],"poles.":[62],"Specifically,":[63],"optimal":[65,92,110],"parameter":[66,87,93,111],"eliminates":[68],"reference-induced":[70],"error":[71],"directly":[73],"solved":[74],"using":[75,96,146],"least":[77],"square":[78],"method.":[79],"No":[80],"parametric":[81],"model":[82],"involved":[84],"process":[89],"and":[90,114],"estimated":[95,109],"measured":[98],"data.":[99],"noisy":[102],"condition,":[103],"it":[104],"proved":[106],"that":[107,141],"unbiased":[113],"estimation":[116],"accuracy":[117],"terms":[119],"variance":[121],"analysed.":[123],"The":[124,137],"performance":[125,143],"proposed":[128,148],"tested":[131],"on":[132],"an":[133],"ultraprecision":[134],"wafer":[135],"stage.":[136],"experimental":[138],"results":[139],"confirm":[140],"high":[142],"achieved":[145],"approach.":[149]},"counts_by_year":[{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}