{"id":"https://openalex.org/W4295540102","doi":"https://doi.org/10.1177/01423312221119586","title":"Design and analysis of high-sensitivity multilayered structure surface acoustic wave sensor for dichloromethane gas detection","display_name":"Design and analysis of high-sensitivity multilayered structure surface acoustic wave sensor for dichloromethane gas detection","publication_year":2022,"publication_date":"2022-09-12","ids":{"openalex":"https://openalex.org/W4295540102","doi":"https://doi.org/10.1177/01423312221119586"},"language":"en","primary_location":{"id":"doi:10.1177/01423312221119586","is_oa":false,"landing_page_url":"https://doi.org/10.1177/01423312221119586","pdf_url":null,"source":{"id":"https://openalex.org/S24148485","display_name":"Transactions of the Institute of Measurement and Control","issn_l":"0142-3312","issn":["0142-3312","1477-0369"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Transactions of the Institute of Measurement and Control","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5078983131","display_name":"Zhenjie Qin","orcid":"https://orcid.org/0000-0003-0708-6815"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenjie Qin","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":"https://orcid.org/0000-0003-0708-6815","affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101513901","display_name":"Hongliang Wang","orcid":"https://orcid.org/0000-0001-7864-3303"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hongliang Wang","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061189125","display_name":"Hanqiang Zhang","orcid":"https://orcid.org/0000-0003-2749-1420"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hanqiang Zhang","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032837517","display_name":"Qi Ding","orcid":"https://orcid.org/0000-0002-7038-6928"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qi Ding","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102012294","display_name":"Xiao Huang","orcid":"https://orcid.org/0000-0003-0909-5037"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiao Huang","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101815059","display_name":"Jiajun Zhu","orcid":"https://orcid.org/0009-0009-5822-0341"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiajun Zhu","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101595351","display_name":"Rui Ren","orcid":"https://orcid.org/0009-0003-0947-9185"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rui Ren","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053935720","display_name":"Xiaolei Sun","orcid":"https://orcid.org/0000-0001-5640-5240"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaolei Sun","raw_affiliation_strings":["School of Instrument and Electronics, North University of China, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument and Electronics, North University of China, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5101513901"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.0793,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.34826068,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":97},"biblio":{"volume":"45","issue":"4","first_page":"674","last_page":"685"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dichloromethane","display_name":"Dichloromethane","score":0.8409345746040344},{"id":"https://openalex.org/keywords/surface-acoustic-wave","display_name":"Surface acoustic wave","score":0.7936023473739624},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7563760280609131},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6720759272575378},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.621096134185791},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.5271884202957153},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5232183933258057},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5034200549125671},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4868749678134918},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.4752368927001953},{"id":"https://openalex.org/keywords/surface-acoustic-wave-sensor","display_name":"Surface acoustic wave sensor","score":0.4738747775554657},{"id":"https://openalex.org/keywords/transient","display_name":"Transient (computer programming)","score":0.4266638159751892},{"id":"https://openalex.org/keywords/sensor-array","display_name":"Sensor array","score":0.4123344123363495},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.31741654872894287},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3134862780570984},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.18858343362808228},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15295368432998657},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12630179524421692},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1014656126499176}],"concepts":[{"id":"https://openalex.org/C2780400988","wikidata":"https://www.wikidata.org/wiki/Q421748","display_name":"Dichloromethane","level":3,"score":0.8409345746040344},{"id":"https://openalex.org/C162954803","wikidata":"https://www.wikidata.org/wiki/Q424074","display_name":"Surface acoustic wave","level":2,"score":0.7936023473739624},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7563760280609131},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6720759272575378},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.621096134185791},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5271884202957153},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5232183933258057},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5034200549125671},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4868749678134918},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.4752368927001953},{"id":"https://openalex.org/C201645281","wikidata":"https://www.wikidata.org/wiki/Q4155214","display_name":"Surface acoustic wave sensor","level":3,"score":0.4738747775554657},{"id":"https://openalex.org/C2780799671","wikidata":"https://www.wikidata.org/wiki/Q17087362","display_name":"Transient (computer programming)","level":2,"score":0.4266638159751892},{"id":"https://openalex.org/C66251956","wikidata":"https://www.wikidata.org/wiki/Q7451086","display_name":"Sensor array","level":2,"score":0.4123344123363495},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.31741654872894287},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3134862780570984},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.18858343362808228},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15295368432998657},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12630179524421692},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1014656126499176},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C2780471494","wikidata":"https://www.wikidata.org/wiki/Q146505","display_name":"Solvent","level":2,"score":0.0},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1177/01423312221119586","is_oa":false,"landing_page_url":"https://doi.org/10.1177/01423312221119586","pdf_url":null,"source":{"id":"https://openalex.org/S24148485","display_name":"Transactions of the Institute of Measurement and Control","issn_l":"0142-3312","issn":["0142-3312","1477-0369"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Transactions of the Institute of Measurement and Control","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1504479044","https://openalex.org/W1965548258","https://openalex.org/W1973667828","https://openalex.org/W1993042215","https://openalex.org/W2030530735","https://openalex.org/W2047057214","https://openalex.org/W2065548880","https://openalex.org/W2077671756","https://openalex.org/W2101026422","https://openalex.org/W2319280910","https://openalex.org/W2766648997","https://openalex.org/W2792786304","https://openalex.org/W2804414073","https://openalex.org/W2911258427","https://openalex.org/W2921832736","https://openalex.org/W2981299482","https://openalex.org/W2983482806","https://openalex.org/W2987066473","https://openalex.org/W2993786010","https://openalex.org/W2994035225","https://openalex.org/W3097058715","https://openalex.org/W3105527009","https://openalex.org/W3135847567","https://openalex.org/W3184591775","https://openalex.org/W4291288447","https://openalex.org/W4388020118"],"related_works":["https://openalex.org/W2139871202","https://openalex.org/W2116648140","https://openalex.org/W1973660317","https://openalex.org/W2014686233","https://openalex.org/W40754421","https://openalex.org/W2144343703","https://openalex.org/W2010529948","https://openalex.org/W2798936240","https://openalex.org/W4295540102","https://openalex.org/W1986988822"],"abstract_inverted_index":{"Micro-":[0],"and":[1,20,23,72,94,165],"nano-sensors":[2],"are":[3],"key":[4],"devices":[5],"used":[6],"in":[7,125],"various":[8],"fields":[9],"from":[10],"medical":[11],"to":[12,37],"environmental":[13],"science.":[14],"With":[15],"the":[16,24,38,59,89,95,111,117,123,135,138,150,176],"progress":[17],"of":[18,26,40,61,70,85,103,110,116,128,137,162,178],"micro-":[19],"nano-fabrication":[21],"technology":[22],"use":[25],"newly":[27],"designed":[28],"materials,":[29],"sensor":[30,49,90,118,124,142],"design":[31,177],"has":[32],"been":[33],"significantly":[34],"improved,":[35],"leading":[36],"development":[39],"high-performance":[41],"gas":[42,48,64,67,141],"sensors.":[43,168,181],"A":[44],"novel":[45],"multilayer":[46,73,166],"structure":[47,97],"based":[50],"on":[51,88],"surface":[52],"acoustic":[53],"wave":[54],"(SAW)":[55],"is":[56,119,143,155],"proposed":[57],"for":[58,175],"detection":[60],"volatile":[62],"harmful":[63],"dichloromethane.":[65],"The":[66,83,100,114,131],"sensing":[68],"characteristics":[69,102],"single-layer":[71,164],"SAW":[74,104,140,167,180],"sensors":[75],"were":[76,105],"studied":[77],"by":[78,107,121],"using":[79],"finite":[80],"element":[81],"method.":[82],"influence":[84],"geometric":[86],"parameters":[87],"performance":[91],"was":[92,98],"analyzed":[93],"optimal":[96,151],"determined.":[99],"propagation":[101],"obtained":[106],"transient":[108],"simulation":[109],"whole":[112],"structure.":[113],"sensitivity":[115,136],"evaluated":[120],"placing":[122],"different":[126],"concentrations":[127],"dichloromethane":[129],"gas.":[130],"results":[132],"show":[133],"that":[134,161],"PIB/AlN/Diamond/Si":[139],"as":[144,146],"high":[145],"66.9":[147],"ppm/Hz":[148],"under":[149],"geometry":[152],"structure,":[153],"which":[154],"nearly":[156],"30":[157],"times":[158],"higher":[159],"than":[160],"other":[163],"This":[169],"work":[170],"provides":[171],"a":[172],"good":[173],"solution":[174],"high-sensitivity":[179]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}