{"id":"https://openalex.org/W1984679277","doi":"https://doi.org/10.1163/016918610x505567","title":"Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line","display_name":"Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W1984679277","doi":"https://doi.org/10.1163/016918610x505567","mag":"1984679277"},"language":"en","primary_location":{"id":"doi:10.1163/016918610x505567","is_oa":false,"landing_page_url":"https://doi.org/10.1163/016918610x505567","pdf_url":null,"source":{"id":"https://openalex.org/S192584203","display_name":"Advanced Robotics","issn_l":"0169-1864","issn":["0169-1864","1568-5535"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547"],"host_organization_lineage_names":["Taylor & Francis"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Robotics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087233037","display_name":"Daiji Noda","orcid":null},"institutions":[{"id":"https://openalex.org/I180941496","display_name":"University of Hyogo","ror":"https://ror.org/0151bmh98","country_code":"JP","type":"education","lineage":["https://openalex.org/I180941496"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Daiji Noda","raw_affiliation_strings":["a    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan;, Email: noda@lasti.u-hyogo.ac.jp","a Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan;, Email: noda@lasti.u-hyogo.ac.jp"],"affiliations":[{"raw_affiliation_string":"a    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan;, Email: noda@lasti.u-hyogo.ac.jp","institution_ids":["https://openalex.org/I180941496"]},{"raw_affiliation_string":"a Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan;, Email: noda@lasti.u-hyogo.ac.jp","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103457337","display_name":"Tadashi Hattori","orcid":null},"institutions":[{"id":"https://openalex.org/I180941496","display_name":"University of Hyogo","ror":"https://ror.org/0151bmh98","country_code":"JP","type":"education","lineage":["https://openalex.org/I180941496"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tadashi Hattori","raw_affiliation_strings":["b    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan","b Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan"],"affiliations":[{"raw_affiliation_string":"b    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan","institution_ids":["https://openalex.org/I180941496"]},{"raw_affiliation_string":"b Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5087233037"],"corresponding_institution_ids":["https://openalex.org/I180941496"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.06703671,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"24","issue":"10","first_page":"1461","last_page":"1470"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microcoil","display_name":"Microcoil","score":0.9362001419067383},{"id":"https://openalex.org/keywords/liga","display_name":"LIGA","score":0.8603804707527161},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7580420970916748},{"id":"https://openalex.org/keywords/electroforming","display_name":"Electroforming","score":0.7547210454940796},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.700630784034729},{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.6201919317245483},{"id":"https://openalex.org/keywords/aspect-ratio","display_name":"Aspect ratio (aeronautics)","score":0.6180528402328491},{"id":"https://openalex.org/keywords/miniaturization","display_name":"Miniaturization","score":0.6145135164260864},{"id":"https://openalex.org/keywords/electromagnetic-coil","display_name":"Electromagnetic coil","score":0.5876491665840149},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.5760765075683594},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.5462164878845215},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5158206820487976},{"id":"https://openalex.org/keywords/mandrel","display_name":"Mandrel","score":0.5045000314712524},{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.47740450501441956},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.42737501859664917},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.40032529830932617},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3320256471633911},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.23749908804893494},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.22668030858039856},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18262189626693726}],"concepts":[{"id":"https://openalex.org/C2779219148","wikidata":"https://www.wikidata.org/wiki/Q25312773","display_name":"Microcoil","level":3,"score":0.9362001419067383},{"id":"https://openalex.org/C145695476","wikidata":"https://www.wikidata.org/wiki/Q1638483","display_name":"LIGA","level":4,"score":0.8603804707527161},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7580420970916748},{"id":"https://openalex.org/C137808972","wikidata":"https://www.wikidata.org/wiki/Q5358014","display_name":"Electroforming","level":3,"score":0.7547210454940796},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.700630784034729},{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.6201919317245483},{"id":"https://openalex.org/C82558694","wikidata":"https://www.wikidata.org/wiki/Q1545619","display_name":"Aspect ratio (aeronautics)","level":2,"score":0.6180528402328491},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.6145135164260864},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.5876491665840149},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5760765075683594},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5462164878845215},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5158206820487976},{"id":"https://openalex.org/C2777918083","wikidata":"https://www.wikidata.org/wiki/Q136706","display_name":"Mandrel","level":2,"score":0.5045000314712524},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.47740450501441956},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.42737501859664917},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40032529830932617},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3320256471633911},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.23749908804893494},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.22668030858039856},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18262189626693726},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1163/016918610x505567","is_oa":false,"landing_page_url":"https://doi.org/10.1163/016918610x505567","pdf_url":null,"source":{"id":"https://openalex.org/S192584203","display_name":"Advanced Robotics","issn_l":"0169-1864","issn":["0169-1864","1568-5535"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547"],"host_organization_lineage_names":["Taylor & Francis"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Robotics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6600000262260437,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1973436198","https://openalex.org/W1977955262","https://openalex.org/W2001575447","https://openalex.org/W2019063534","https://openalex.org/W2019476411","https://openalex.org/W2020024008","https://openalex.org/W2021703204","https://openalex.org/W2030908201","https://openalex.org/W2034560657","https://openalex.org/W2040569498","https://openalex.org/W2054066198","https://openalex.org/W4249437249"],"related_works":["https://openalex.org/W2016589938","https://openalex.org/W1976329917","https://openalex.org/W2745264154","https://openalex.org/W2049218615","https://openalex.org/W2028389832","https://openalex.org/W2084450428","https://openalex.org/W2141761895","https://openalex.org/W1999056268","https://openalex.org/W326308832","https://openalex.org/W3128679173"],"abstract_inverted_index":{"Actuators":[0],"are":[1],"some":[2],"of":[3,16,34,104,111,151,166,189,195],"the":[4,45,56,93,120,155,163],"most":[5],"important":[6],"elements":[7],"in":[8,133,143,193],"machines":[9],"and":[10,20,30,65,81,107,181],"robotics.":[11],"The":[12],"need":[13],"for":[14,48,68,88],"micro-fabrication":[15],"microactuators,":[17],"smart":[18],"sensors":[19],"microcoils":[21,177],"is":[22,52,173],"increasing.":[23],"Actuators,":[24],"which":[25],"have":[26,37,73,97,141,160],"a":[27,35,75,102,125,145,179],"large":[28],"volume":[29],"weight":[31],"as":[32],"part":[33],"product,":[36],"been":[38],"required":[39,47],"to":[40,62,135],"reduce":[41],"their":[42,196],"size.":[43,198],"However,":[44],"processing":[46],"three-dimensional":[49],"micro-sized":[50],"structures":[51,87],"very":[53],"difficult.":[54],"Here,":[55],"LIGA":[57,94],"process":[58],"could":[59,186],"be":[60,187],"used":[61],"fabricate":[63],"nano-":[64],"micro-scale":[66],"parts":[67],"many":[69],"applications.":[70],"Therefore,":[71],"we":[72,140],"fabricated":[74,98],"spiral":[76],"microcoil":[77,146],"with":[78,101,147,178],"narrow":[79,180],"pitch":[80],"high":[82,182,191],"aspect":[83,109,149,183],"ratio":[84,110,150,184],"coil":[85,99,137],"line":[86],"an":[89,108,115,148],"electromagnetic":[90,167],"microactuator":[91],"using":[92,119,154,169],"process.":[95,158],"We":[96,159],"lines":[100],"width":[103],"10":[105],"\u03bcm":[106],"over":[112,152],"5":[113],"on":[114],"acrylic":[116],"pipe":[117],"surface":[118],"X-ray":[121],"lithography":[122],"technique.":[123],"Then,":[124],"void-free":[126],"copper":[127],"film":[128],"was":[129],"formed":[130],"by":[131],"electroforming":[132],"order":[134],"obtain":[136],"lines.":[138],"Finally,":[139],"succeeded":[142],"obtaining":[144],"2":[153],"isotropic":[156],"etching":[157],"also":[161],"estimated":[162],"suction":[164],"force":[165],"actuators":[168],"these":[170,176],"microcoils.":[171],"It":[172],"expected":[174],"that":[175],"structure":[185],"capable":[188],"delivering":[190],"performance":[192],"spite":[194],"miniature":[197]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}