{"id":"https://openalex.org/W4223416174","doi":"https://doi.org/10.1155/2022/1713039","title":"Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber","display_name":"Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber","publication_year":2022,"publication_date":"2022-04-11","ids":{"openalex":"https://openalex.org/W4223416174","doi":"https://doi.org/10.1155/2022/1713039"},"language":"en","primary_location":{"id":"doi:10.1155/2022/1713039","is_oa":true,"landing_page_url":"http://doi.org/10.1155/2022/1713039","pdf_url":"https://downloads.hindawi.com/journals/js/2022/1713039.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://downloads.hindawi.com/journals/js/2022/1713039.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053379037","display_name":"Zhenqiang Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I10660446","display_name":"Kunming University of Science and Technology","ror":"https://ror.org/00xyeez13","country_code":"CN","type":"education","lineage":["https://openalex.org/I10660446"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenqiang Liu","raw_affiliation_strings":["School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China"],"affiliations":[{"raw_affiliation_string":"School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China","institution_ids":["https://openalex.org/I10660446"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063175462","display_name":"Jinhui Lei","orcid":"https://orcid.org/0000-0002-8623-2106"},"institutions":[{"id":"https://openalex.org/I10660446","display_name":"Kunming University of Science and Technology","ror":"https://ror.org/00xyeez13","country_code":"CN","type":"education","lineage":["https://openalex.org/I10660446"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jinhui Lei","raw_affiliation_strings":["School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China"],"affiliations":[{"raw_affiliation_string":"School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China","institution_ids":["https://openalex.org/I10660446"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112259411","display_name":"Yan Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I10660446","display_name":"Kunming University of Science and Technology","ror":"https://ror.org/00xyeez13","country_code":"CN","type":"education","lineage":["https://openalex.org/I10660446"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Chen","raw_affiliation_strings":["School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China"],"affiliations":[{"raw_affiliation_string":"School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China","institution_ids":["https://openalex.org/I10660446"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100415184","display_name":"Yang Xia","orcid":"https://orcid.org/0000-0003-4551-303X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yang Xia","raw_affiliation_strings":["Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China"],"affiliations":[{"raw_affiliation_string":"Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045490635","display_name":"Jiaheng Feng","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jiaheng Feng","raw_affiliation_strings":["Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China"],"affiliations":[{"raw_affiliation_string":"Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030098726","display_name":"Shuaiqiang Ming","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shuaiqiang Ming","raw_affiliation_strings":["Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China"],"affiliations":[{"raw_affiliation_string":"Kemin Electronic Equipment Technology co., LTD, Jiaxing, Zhejiang 314000, China","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031653029","display_name":"Wa Mao","orcid":null},"institutions":[{"id":"https://openalex.org/I10660446","display_name":"Kunming University of Science and Technology","ror":"https://ror.org/00xyeez13","country_code":"CN","type":"education","lineage":["https://openalex.org/I10660446"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wa Mao","raw_affiliation_strings":["School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China"],"affiliations":[{"raw_affiliation_string":"School of Information Engineering and Automation, Kunming University of Science and Technology, Kunming, Yunnan 650500, China","institution_ids":["https://openalex.org/I10660446"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5063175462"],"corresponding_institution_ids":["https://openalex.org/I10660446"],"apc_list":{"value":2100,"currency":"USD","value_usd":2100},"apc_paid":{"value":2100,"currency":"USD","value_usd":2100},"fwci":0.0915,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.37527234,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"2022","issue":null,"first_page":"1","last_page":"11"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9778000116348267,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10409","display_name":"Fuel Cells and Related Materials","score":0.9740999937057495,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pid-controller","display_name":"PID controller","score":0.9528546929359436},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.8019288778305054},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5334703326225281},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4943535327911377},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.49024730920791626},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.41445648670196533},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3781861364841461},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3258764147758484},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2993263602256775},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.26180392503738403},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2436489462852478},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17475122213363647},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.16184332966804504}],"concepts":[{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.9528546929359436},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.8019288778305054},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5334703326225281},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4943535327911377},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.49024730920791626},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.41445648670196533},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3781861364841461},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3258764147758484},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2993263602256775},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.26180392503738403},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2436489462852478},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17475122213363647},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.16184332966804504},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1155/2022/1713039","is_oa":true,"landing_page_url":"http://doi.org/10.1155/2022/1713039","pdf_url":"https://downloads.hindawi.com/journals/js/2022/1713039.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:bc7f4323642946b0a666a1f80e5bc9e4","is_oa":true,"landing_page_url":"https://doaj.org/article/bc7f4323642946b0a666a1f80e5bc9e4","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Sensors, Vol 2022 (2022)","raw_type":"article"},{"id":"pmh:oai:hindawi.com:10.1155/2022/1713039","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2022/1713039","pdf_url":null,"source":{"id":"https://openalex.org/S4306400340","display_name":"Hindawi Journal of Chemistry (Hindawi)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210126990","host_organization_name":"Hindawi (United Kingdom)","host_organization_lineage":["https://openalex.org/I4210126990"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Research Article"}],"best_oa_location":{"id":"doi:10.1155/2022/1713039","is_oa":true,"landing_page_url":"http://doi.org/10.1155/2022/1713039","pdf_url":"https://downloads.hindawi.com/journals/js/2022/1713039.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4223416174.pdf","grobid_xml":"https://content.openalex.org/works/W4223416174.grobid-xml"},"referenced_works_count":29,"referenced_works":["https://openalex.org/W2600420995","https://openalex.org/W2769310142","https://openalex.org/W2772014311","https://openalex.org/W2790864459","https://openalex.org/W2792944414","https://openalex.org/W2794083067","https://openalex.org/W2795240811","https://openalex.org/W2801985588","https://openalex.org/W2803056187","https://openalex.org/W2901080335","https://openalex.org/W2918098583","https://openalex.org/W2944524940","https://openalex.org/W2962749641","https://openalex.org/W2963178424","https://openalex.org/W2975765372","https://openalex.org/W2981152246","https://openalex.org/W2989645390","https://openalex.org/W2990691896","https://openalex.org/W3002126496","https://openalex.org/W3011808483","https://openalex.org/W3014090388","https://openalex.org/W3036865856","https://openalex.org/W3037844000","https://openalex.org/W3047512380","https://openalex.org/W3081574905","https://openalex.org/W3083738601","https://openalex.org/W3099069016","https://openalex.org/W3141752238","https://openalex.org/W3174154542"],"related_works":["https://openalex.org/W2002388147","https://openalex.org/W2167345368","https://openalex.org/W4223416174","https://openalex.org/W2361172335","https://openalex.org/W2776108294","https://openalex.org/W2110030150","https://openalex.org/W2122192178","https://openalex.org/W2384549355","https://openalex.org/W3188498978","https://openalex.org/W1969113741"],"abstract_inverted_index":{"The":[0,84,142,177,195,217],"study":[1,218],"aims":[2],"to":[3,23],"expand":[4],"the":[5,8,16,20,24,31,37,41,47,51,56,62,67,71,91,100,104,107,115,119,122,130,133,139,146,158,161,173,184,188,192,199,204,224,230,234,240],"application":[6,18,38],"of":[7,19,40,50,66,94,106,132,160,187,191,198,233],"proportion":[9],"integral":[10],"derivative":[11],"(PID)":[12],"algorithm":[13,22,43,53,69,238],"and":[14,36,77,97,114,121,149,168,213,229],"improve":[15],"practical":[17,171],"PID":[21,42,52,68,205,225,235],"atomic":[25],"layer":[26],"deposition":[27],"(ALD)":[28],"process.":[29,242],"First,":[30],"ALD":[32,57,72,241],"process":[33,58],"is":[34,44,75,125,152,165,169],"analyzed,":[35],"method":[39],"determined.":[45],"Second,":[46],"research":[48,82],"conditions":[49],"based":[54],"on":[55,183],"are":[59],"designed.":[60],"Finally,":[61],"temperature":[63,88,102,105,124,131,148,151,159,175,185,196,206,226,236],"control":[64,207,227,237],"operation":[65],"in":[70,239],"reaction":[73,92,189],"chamber":[74,110,120,135,147,164,190],"modeled":[76],"experimentally":[78],"studied":[79],"under":[80,172],"different":[81],"conditions.":[83,176],"results":[85],"show":[86,202],"that":[87,157,203],"significantly":[89],"impacts":[90],"chambers":[93,201],"stainless":[95,108,162],"steel":[96,109,163],"aluminum.":[98],"When":[99],"heating":[101,123,140,150],"increases,":[103],"will":[111],"also":[112],"change,":[113],"maximum":[116,143],"difference":[117,144],"between":[118,145],"about":[126,153],"33\u00b0C.":[127],"In":[128],"contrast,":[129],"aluminum":[134],"varies":[136],"little":[137,181],"with":[138],"temperature.":[141],"350\u00b0C,":[154],"which":[155],"shows":[156],"better":[166],"controlled":[167],"more":[170],"same":[174],"pressure":[178],"change":[179,186],"has":[180,214],"effect":[182],"two":[193,200],"materials.":[194],"curves":[197],"system":[208,228],"can":[209],"be":[210],"used":[211],"normally":[212],"strong":[215],"practicability.":[216],"provides":[219],"technical":[220],"support":[221],"for":[222],"improving":[223],"rational":[231],"use":[232]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}