{"id":"https://openalex.org/W2572038886","doi":"https://doi.org/10.1155/2017/6954875","title":"Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing","display_name":"Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing","publication_year":2017,"publication_date":"2017-01-01","ids":{"openalex":"https://openalex.org/W2572038886","doi":"https://doi.org/10.1155/2017/6954875","mag":"2572038886"},"language":"en","primary_location":{"id":"doi:10.1155/2017/6954875","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2017/6954875","pdf_url":"http://downloads.hindawi.com/journals/js/2017/6954875.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"http://downloads.hindawi.com/journals/js/2017/6954875.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102030227","display_name":"Awlad Hossain","orcid":null},"institutions":[{"id":"https://openalex.org/I159107703","display_name":"Eastern Washington University","ror":"https://ror.org/002g57a93","country_code":"US","type":"education","lineage":["https://openalex.org/I159107703"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Awlad Hossain","raw_affiliation_strings":["Department of Engineering and Design, Eastern Washington University, Cheney, WA 99004, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering and Design, Eastern Washington University, Cheney, WA 99004, USA","institution_ids":["https://openalex.org/I159107703"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071221983","display_name":"Ahsan Mian","orcid":"https://orcid.org/0000-0002-2033-6738"},"institutions":[{"id":"https://openalex.org/I19648265","display_name":"Wright State University","ror":"https://ror.org/04qk6pt94","country_code":"US","type":"education","lineage":["https://openalex.org/I19648265"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Ahsan Mian","raw_affiliation_strings":["Department of Mechanical and Materials Engineering, Wright State University, Dayton, OH 45435, USA"],"raw_orcid":"https://orcid.org/0000-0002-2033-6738","affiliations":[{"raw_affiliation_string":"Department of Mechanical and Materials Engineering, Wright State University, Dayton, OH 45435, USA","institution_ids":["https://openalex.org/I19648265"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5071221983"],"corresponding_institution_ids":["https://openalex.org/I19648265"],"apc_list":{"value":2375,"currency":"USD","value_usd":2375},"apc_paid":{"value":2375,"currency":"USD","value_usd":2375},"fwci":0.3361,"has_fulltext":true,"cited_by_count":7,"citation_normalized_percentile":{"value":0.5914126,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"2017","issue":null,"first_page":"1","last_page":"11"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.9067631959915161},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7426015138626099},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6947904825210571},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6867634654045105},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6243534684181213},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.543945848941803},{"id":"https://openalex.org/keywords/van-der-pauw-method","display_name":"Van der Pauw method","score":0.5190190076828003},{"id":"https://openalex.org/keywords/terminal","display_name":"Terminal (telecommunication)","score":0.46638917922973633},{"id":"https://openalex.org/keywords/wheatstone-bridge","display_name":"Wheatstone bridge","score":0.44706183671951294},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.3882172703742981},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3600747287273407},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.35365599393844604},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3490675687789917},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3335299491882324},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3299506604671478},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31996268033981323},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.283920019865036},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25980475544929504},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.2489246428012848},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.21748360991477966},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20521032810211182},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15059784054756165},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12586259841918945}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.9067631959915161},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7426015138626099},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6947904825210571},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6867634654045105},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6243534684181213},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.543945848941803},{"id":"https://openalex.org/C85443114","wikidata":"https://www.wikidata.org/wiki/Q1521268","display_name":"Van der Pauw method","level":4,"score":0.5190190076828003},{"id":"https://openalex.org/C2779664074","wikidata":"https://www.wikidata.org/wiki/Q3518405","display_name":"Terminal (telecommunication)","level":2,"score":0.46638917922973633},{"id":"https://openalex.org/C104713690","wikidata":"https://www.wikidata.org/wiki/Q245133","display_name":"Wheatstone bridge","level":4,"score":0.44706183671951294},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.3882172703742981},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3600747287273407},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.35365599393844604},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3490675687789917},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3335299491882324},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3299506604671478},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31996268033981323},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.283920019865036},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25980475544929504},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2489246428012848},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.21748360991477966},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20521032810211182},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15059784054756165},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12586259841918945},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C134112204","wikidata":"https://www.wikidata.org/wiki/Q10656","display_name":"Hall effect","level":3,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1155/2017/6954875","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2017/6954875","pdf_url":"http://downloads.hindawi.com/journals/js/2017/6954875.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},{"id":"pmh:oai:corescholar.libraries.wright.edu:mme-1328","is_oa":true,"landing_page_url":"https://corescholar.libraries.wright.edu/mme/329","pdf_url":null,"source":null,"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Mechanical and Materials Engineering Faculty Publications","raw_type":null},{"id":"pmh:oai:works.bepress.com:ahsan-mian-1097","is_oa":true,"landing_page_url":"https://works.bepress.com/ahsan-mian/34","pdf_url":null,"source":{"id":"https://openalex.org/S4306400146","display_name":"CORE Scholar (Wright State University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I19648265","host_organization_name":"Wright State University","host_organization_lineage":["https://openalex.org/I19648265"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Ahsan Mian","raw_type":"text"}],"best_oa_location":{"id":"doi:10.1155/2017/6954875","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2017/6954875","pdf_url":"http://downloads.hindawi.com/journals/js/2017/6954875.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2572038886.pdf","grobid_xml":"https://content.openalex.org/works/W2572038886.grobid-xml"},"referenced_works_count":5,"referenced_works":["https://openalex.org/W1991587683","https://openalex.org/W2031960932","https://openalex.org/W2060123237","https://openalex.org/W2092119359","https://openalex.org/W2113032718"],"related_works":["https://openalex.org/W2323653612","https://openalex.org/W3119258731","https://openalex.org/W1998975346","https://openalex.org/W2110357888","https://openalex.org/W2122551138","https://openalex.org/W2081793799","https://openalex.org/W2007149924","https://openalex.org/W3156683774","https://openalex.org/W2982406086","https://openalex.org/W2378386980"],"abstract_inverted_index":{"The":[0,17,39],"sensitivity":[1,40,81],"of":[2,41,56,78,98,163],"four-terminal":[3],"piezoresistive":[4,57,186],"sensors":[5],"commonly":[6],"referred":[7],"to":[8,22,29,68,159],"as":[9,95],"van":[10],"der":[11],"Pauw":[12],"(VDP)":[13],"structure":[14],"is":[15,20,177],"investigated.":[16],"VDP":[18,43,79,120],"sensor":[19,44,61,70,191],"considered":[21],"be":[23,46],"fabricated":[24],"on":[25,82,166],"(100)":[26],"silicon":[27],"due":[28],"its":[30],"potential":[31],"application":[32],"in":[33,84,185],"MEMS":[34],"(microelectromechanical":[35],"systems)":[36],"pressure":[37],"sensors.":[38],"the":[42,51,54,60,69,76,96,128,134,150,161,167,190],"may":[45],"affected":[47],"by":[48,104],"misalignment":[49,99],"during":[50],"etching/diffusion":[52],"process,":[53],"nonuniformity":[55,184],"coefficients":[58],"through":[59],"thickness,":[62],"and":[63,87,122,182],"pad":[64,85,143,180],"size":[65,181],"with":[66,133],"respect":[67],"size.":[71],"For":[72],"this":[73],"particular":[74],"analysis,":[75],"effect":[77,97],"stress":[80],"variations":[83],"sizes":[86],"through-the-thickness":[88,183],"<mml:math":[89],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[90],"id=\"M1\"><mml:mrow><mml:mi>\u03c0</mml:mi></mml:mrow></mml:math>-coefficient":[91],"variation":[92],"are":[93,114,131,153,157],"studied":[94],"has":[100],"already":[101],"been":[102],"investigated":[103],"researchers.":[105],"Two":[106],"three-dimensional":[107],"(3D)":[108],"finite":[109],"element":[110],"analysis":[111],"(FEA)":[112],"models":[113,130,152],"first":[115],"developed":[116],"for":[117,139,170],"both":[118],"traditional":[119],"resistance":[121],"equivalent":[123,172],"four-wire":[124,173],"bridge":[125,174],"measurements.":[126],"Then,":[127],"FEA":[129,151],"validated":[132],"closed":[135],"form":[136],"analytical":[137],"solutions":[138],"point":[140],"contacts":[141],"(\u201czero\u201d":[142],"size)":[144],"under":[145],"different":[146,164],"biaxial":[147],"loads.":[148],"Once":[149],"validated,":[154],"additional":[155],"simulations":[156],"conducted":[158],"understand":[160],"influence":[162],"parameters":[165],"voltage":[168],"measurements":[169],"an":[171],"configuration.":[175],"It":[176],"observed":[178],"that":[179],"constants":[187],"adversely":[188],"affect":[189],"sensitivity.":[192]},"counts_by_year":[{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-07-23T08:03:31.855105","created_date":"2025-10-10T00:00:00"}