{"id":"https://openalex.org/W1973986385","doi":"https://doi.org/10.1155/2009/637874","title":"Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection","display_name":"Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W1973986385","doi":"https://doi.org/10.1155/2009/637874","mag":"1973986385"},"language":"en","primary_location":{"id":"doi:10.1155/2009/637874","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2009/637874","pdf_url":"https://downloads.hindawi.com/journals/js/2009/637874.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://downloads.hindawi.com/journals/js/2009/637874.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100342841","display_name":"Xinxin Li","orcid":"https://orcid.org/0000-0001-6760-0957"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xinxin Li","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049586364","display_name":"Haitao Yu","orcid":"https://orcid.org/0000-0003-3764-9201"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haitao Yu","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032300388","display_name":"Xiaohua Gan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaohua Gan","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041763732","display_name":"Xiaoyuan Xia","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoyuan Xia","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054834061","display_name":"Pengcheng Xu","orcid":"https://orcid.org/0000-0001-8651-208X"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pengcheng Xu","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039844068","display_name":"Jungang Li","orcid":"https://orcid.org/0009-0008-9594-2178"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jungang Li","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100343952","display_name":"Min Liu","orcid":"https://orcid.org/0009-0003-4865-1849"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Liu","raw_affiliation_strings":["State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210107198"]},{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100373512","display_name":"Yongxiang Li","orcid":"https://orcid.org/0000-0001-8057-030X"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210163874","display_name":"Shanghai Institute of Ceramics","ror":"https://ror.org/05etnz140","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210163874"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yongxiang Li","raw_affiliation_strings":["State Key Lab of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050","State Key Lab of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road , Shanghai, 200050, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Lab of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050","institution_ids":["https://openalex.org/I4210163874"]},{"raw_affiliation_string":"State Key Lab of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road , Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210163874","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5100342841"],"corresponding_institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I4210147322"],"apc_list":{"value":2100,"currency":"USD","value_usd":2100},"apc_paid":{"value":2100,"currency":"USD","value_usd":2100},"fwci":2.0792,"has_fulltext":true,"cited_by_count":43,"citation_normalized_percentile":{"value":0.86054797,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"2009","issue":"1","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.8657087087631226},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"Nanoelectromechanical systems","score":0.738290011882782},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7103909254074097},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.699898362159729},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.6359981298446655},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6063757538795471},{"id":"https://openalex.org/keywords/monolayer","display_name":"Monolayer","score":0.4776512384414673},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4432029128074646},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.42366713285446167},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35804659128189087},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.25004392862319946},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.21509301662445068},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20271262526512146}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.8657087087631226},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.738290011882782},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7103909254074097},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.699898362159729},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6359981298446655},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6063757538795471},{"id":"https://openalex.org/C7070889","wikidata":"https://www.wikidata.org/wiki/Q902488","display_name":"Monolayer","level":2,"score":0.4776512384414673},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4432029128074646},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.42366713285446167},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35804659128189087},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.25004392862319946},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.21509301662445068},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20271262526512146},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1155/2009/637874","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2009/637874","pdf_url":"https://downloads.hindawi.com/journals/js/2009/637874.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:118666aaa4664849b69ccca6993e3592","is_oa":true,"landing_page_url":"https://doaj.org/article/118666aaa4664849b69ccca6993e3592","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Sensors, Vol 2009 (2009)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1155/2009/637874","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2009/637874","pdf_url":"https://downloads.hindawi.com/journals/js/2009/637874.pdf","source":{"id":"https://openalex.org/S96783963","display_name":"Journal of Sensors","issn_l":"1687-725X","issn":["1687-725X","1687-7268"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869"],"host_organization_lineage_names":["Hindawi Publishing Corporation"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Responsible consumption and production","id":"https://metadata.un.org/sdg/12","score":0.4099999964237213}],"awards":[{"id":"https://openalex.org/G1366444846","display_name":null,"funder_award_id":"2006CB300405","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2393263936","display_name":null,"funder_award_id":"60725414","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G2748074386","display_name":null,"funder_award_id":"2006AA04Z365","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G3510871570","display_name":null,"funder_award_id":"2006AA04Z365","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4679818987","display_name":null,"funder_award_id":"2006CB300405","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G6525602605","display_name":null,"funder_award_id":"60721004","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G6653754873","display_name":null,"funder_award_id":"60721004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6761517015","display_name":null,"funder_award_id":"60725414","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1973986385.pdf","grobid_xml":"https://content.openalex.org/works/W1973986385.grobid-xml"},"referenced_works_count":33,"referenced_works":["https://openalex.org/W1963875682","https://openalex.org/W1968514543","https://openalex.org/W1971523884","https://openalex.org/W1977356477","https://openalex.org/W1977793705","https://openalex.org/W1983910981","https://openalex.org/W1993285959","https://openalex.org/W1994151002","https://openalex.org/W1999822381","https://openalex.org/W2012434694","https://openalex.org/W2016059623","https://openalex.org/W2022838503","https://openalex.org/W2028791663","https://openalex.org/W2030144335","https://openalex.org/W2030552522","https://openalex.org/W2031007088","https://openalex.org/W2036682406","https://openalex.org/W2044428681","https://openalex.org/W2051001465","https://openalex.org/W2053641296","https://openalex.org/W2061543408","https://openalex.org/W2062539714","https://openalex.org/W2070174313","https://openalex.org/W2074163112","https://openalex.org/W2077125422","https://openalex.org/W2077743049","https://openalex.org/W2081492450","https://openalex.org/W2085393286","https://openalex.org/W2091723149","https://openalex.org/W2101782801","https://openalex.org/W2134689820","https://openalex.org/W2138308932","https://openalex.org/W2172149037"],"related_works":["https://openalex.org/W4285099144","https://openalex.org/W2294335124","https://openalex.org/W4317346967","https://openalex.org/W1527636689","https://openalex.org/W1514561573","https://openalex.org/W2048171849","https://openalex.org/W1902246597","https://openalex.org/W2114051864","https://openalex.org/W2612655727","https://openalex.org/W2891496159"],"abstract_inverted_index":{"The":[0,110],"paper":[1],"reviews":[2],"the":[3,20,23,48,59,64,78,94,97,127],"recent":[4],"researches":[5],"implemented":[6],"in":[7],"Chinese":[8],"Academy":[9],"of":[10,41,47,56,96,123],"Sciences,":[11],"with":[12,34,81],"achievements":[13],"on":[14,45,77],"integrated":[15,33],"resonant":[16,21],"microcantilever":[17],"sensors.":[18],"In":[19],"cantilevers,":[22],"self\u2010sensing":[24],"elements":[25,29],"and":[26,51,75,89,99,104,115,135],"resonance":[27,49],"exciting":[28],"are":[30,73,108],"both":[31],"top\u2010down":[32],"silicon":[35],"micromachining":[36],"techniques.":[37],"Quite":[38],"a":[39,82,130],"lot":[40],"effort":[42],"is":[43],"focused":[44],"optimization":[46],"mode":[50],"sensing":[52,71],"structure":[53],"for":[54,133],"improvement":[55],"sensitivity.":[57],"On":[58],"other":[60],"hand,":[61],"to":[62,68,119],"enable":[63],"micro\u2010cantilevers":[65],"specifically":[66],"sensitive":[67],"bio/chemical":[69],"molecules,":[70],"materials":[72],"developed":[74],"modified":[76],"cantilever":[79],"surface":[80,90,106],"self\u2010assembled":[83],"monolayer":[84],"(SAM)":[85],"based":[86],"bottom\u2010up":[87],"construction":[88],"functionalization.":[91],"To":[92],"improve":[93],"selectivity":[95],"sensors":[98,129],"depress":[100],"environmental":[101],"noise,":[102],"multiple":[103],"localized":[105],"modifications":[107],"developed.":[109],"achieved":[111],"volume":[112],"production":[113],"capability":[114],"satisfactory":[116],"detecting":[117],"resolution":[118],"trace\u2010level":[120],"biological":[121],"antigen":[122],"alpha\u2010fetoprotein":[124],"(AFP)":[125],"give":[126],"micro\u2010cantilever":[128],"great":[131],"promise":[132],"rapid":[134],"high\u2010resoluble":[136],"detection.":[137]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":3},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":7}],"updated_date":"2026-06-13T07:54:00.901334","created_date":"2025-10-10T00:00:00"}