{"id":"https://openalex.org/W1986838720","doi":"https://doi.org/10.1147/rd.443.0323","title":"The \u201cMillipede\u201d\u2014More than thousand tips for future AFM storage","display_name":"The \u201cMillipede\u201d\u2014More than thousand tips for future AFM storage","publication_year":2000,"publication_date":"2000-05-01","ids":{"openalex":"https://openalex.org/W1986838720","doi":"https://doi.org/10.1147/rd.443.0323","mag":"1986838720"},"language":"en","primary_location":{"id":"doi:10.1147/rd.443.0323","is_oa":false,"landing_page_url":"https://doi.org/10.1147/rd.443.0323","pdf_url":null,"source":{"id":"https://openalex.org/S4210219925","display_name":"IBM Journal of Research and Development","issn_l":"0018-8646","issn":["0018-8646","2151-8556"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320652","host_organization_name":"IBM","host_organization_lineage":["https://openalex.org/P4310320652"],"host_organization_lineage_names":["IBM"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IBM Journal of Research and Development","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021674946","display_name":"P. Vettiger","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["CH","US"],"is_corresponding":true,"raw_author_name":"P. Vettiger","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034920866","display_name":"M. Despont","orcid":"https://orcid.org/0000-0002-2334-1778"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"M. Despont","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082365196","display_name":"Ute Drechsler","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"U. Drechsler","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112083891","display_name":"U. D\u00fcrig","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"U. Durig","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048750761","display_name":"W. H\u00e4berle","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"W. Haberle","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108086797","display_name":"M. I. Lutwyche","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"M. I. Lutwyche","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108085061","display_name":"H. Rothuizen","orcid":"https://orcid.org/0009-0001-4206-9669"},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"H. E. Rothuizen","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060718954","display_name":"R. Stutz","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"R. Stutz","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089862521","display_name":"Rudolf Widmer\u2010Schnidrig","orcid":"https://orcid.org/0000-0001-9698-2739"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"R. Widmer","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071169826","display_name":"G. Binnig","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"G. K. Binnig","raw_affiliation_strings":["IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, S&#x00E4;umerstrasse 4, 8803 R&#x00FC;schlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]},{"raw_affiliation_string":"IBM Research, Zurich Research Laboratory, R\u00fcschlikon, Switzerland#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5021674946"],"corresponding_institution_ids":["https://openalex.org/I1341412227","https://openalex.org/I4210126328"],"apc_list":null,"apc_paid":null,"fwci":28.4668,"has_fulltext":false,"cited_by_count":564,"citation_normalized_percentile":{"value":0.99872427,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":95,"max":100},"biblio":{"volume":"44","issue":"3","first_page":"323","last_page":"340"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/millipede","display_name":"Millipede","score":0.7058683633804321},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7016937136650085},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.6516487002372742},{"id":"https://openalex.org/keywords/computer-data-storage","display_name":"Computer data storage","score":0.561651349067688},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5403223037719727},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5032135844230652},{"id":"https://openalex.org/keywords/multiplexing","display_name":"Multiplexing","score":0.48726144433021545},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4710994362831116},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.37782758474349976},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2940833270549774},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2576178312301636},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12596169114112854},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.08862578868865967}],"concepts":[{"id":"https://openalex.org/C2775837333","wikidata":"https://www.wikidata.org/wiki/Q167367","display_name":"Millipede","level":2,"score":0.7058683633804321},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7016937136650085},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.6516487002372742},{"id":"https://openalex.org/C194739806","wikidata":"https://www.wikidata.org/wiki/Q66221","display_name":"Computer data storage","level":2,"score":0.561651349067688},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5403223037719727},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5032135844230652},{"id":"https://openalex.org/C19275194","wikidata":"https://www.wikidata.org/wiki/Q222903","display_name":"Multiplexing","level":2,"score":0.48726144433021545},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4710994362831116},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.37782758474349976},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2940833270549774},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2576178312301636},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12596169114112854},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08862578868865967},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1147/rd.443.0323","is_oa":false,"landing_page_url":"https://doi.org/10.1147/rd.443.0323","pdf_url":null,"source":{"id":"https://openalex.org/S4210219925","display_name":"IBM Journal of Research and Development","issn_l":"0018-8646","issn":["0018-8646","2151-8556"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320652","host_organization_name":"IBM","host_organization_lineage":["https://openalex.org/P4310320652"],"host_organization_lineage_names":["IBM"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IBM Journal of Research and Development","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1790303514","https://openalex.org/W1862889379","https://openalex.org/W1966149766","https://openalex.org/W1995935156","https://openalex.org/W2006515893","https://openalex.org/W2013320877","https://openalex.org/W2032824319","https://openalex.org/W2040113820","https://openalex.org/W2041026247","https://openalex.org/W2056415244","https://openalex.org/W2060075686","https://openalex.org/W2064372125","https://openalex.org/W2076193926","https://openalex.org/W2093660919","https://openalex.org/W2112691755","https://openalex.org/W2130781109","https://openalex.org/W2130931616","https://openalex.org/W2157058007","https://openalex.org/W2340971798","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2568042205","https://openalex.org/W3183701255","https://openalex.org/W4292668600","https://openalex.org/W2187578405","https://openalex.org/W4313730985","https://openalex.org/W2294908466","https://openalex.org/W4299634022","https://openalex.org/W2023967460","https://openalex.org/W2093825258","https://openalex.org/W4382141430"],"abstract_inverted_index":{"We":[0],"report":[1],"on":[2,125],"a":[3,17,40,71,75,83,126],"new":[4,41,58,231],"atomic":[5,220],"force":[6],"microscope":[7],"(AFM)-based":[8],"data":[9,28,50,84,94,194],"storage":[10,34,85,147,156,195],"concept":[11],"called":[12],"the":[13,131,154,162,179],"\u201cMillipede\u201d":[14],"that":[15,107],"has":[16,36,186],"potentially":[18],"ultrahigh":[19,33],"density,":[20],"terabit":[21],"capacity,":[22],"small":[23],"form":[24],"factor,":[25],"and":[26,47,133,201,211,219,222,233],"high":[27],"rate.":[29],"Its":[30],"potential":[31,187],"for":[32,158,188],"density":[35,86],"been":[37,68,109,176],"demonstrated":[38],"by":[39,70,98,111],"thermomechanical":[42],"local-probe":[43],"technique":[44],"to":[45,130,193],"store":[46],"read":[48],"back":[49],"in":[51,74,82,196,208,225],"very":[52,116],"thin":[53,76],"polymer":[54],"films.":[55],"With":[56],"this":[57],"technique,":[59],"30\u201340-nm-sized":[60],"bit":[61],"indentations":[62],"of":[63,87,101,121,137,161,169],"similar":[64],"pitch":[65],"size":[66],"have":[67,108,175],"made":[69],"single":[72,127],"cantilever/tip":[73],"(50-nm)":[77],"polymethylmethacrylate":[78],"(PMMA)":[79],"layer,":[80],"resulting":[81],"400\u2013500":[88],"Gb/in.":[89,171],"<sup":[90,172],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[91,173],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[92,174],"High":[93],"rates":[95],"are":[96],"achieved":[97,177],"parallel":[99,159],"operation":[100,160],"large":[102,117],"two-dimensional":[103],"(2D)":[104],"AFM":[105,142],"arrays":[106],"batch-fabricated":[110],"silicon":[112],"surface-micromachining":[113],"techniques.":[114],"The":[115],"scale":[118],"integration":[119],"(VLSI)":[120],"micro/nanomechanical":[122],"devices":[123],"(cantilevers/tips)":[124],"chip":[128],"leads":[129],"largest":[132],"densest":[134],"2D":[135],"array":[136,164,183],"32":[138,140,180,182],"\u00d7":[139,181],"(1024)":[141],"cantilevers":[143],"with":[144,178],"integrated":[145],"write/read":[146,155],"functionality":[148],"ever":[149],"built.":[150],"Time-multiplexed":[151],"electronics":[152],"control":[153],"cycles":[157],"Millipede":[163,227],"chip.":[165],"Initial":[166],"areal":[167],"densities":[168],"100\u2013200":[170],"chip,":[184],"which":[185,226],"further":[189],"improvements.":[190],"In":[191],"addition":[192],"polymers":[197],"or":[198],"other":[199],"media,":[200],"not":[202],"excluding":[203],"magnetics,":[204],"we":[205],"envision":[206],"areas":[207],"nanoscale":[209],"science":[210],"technology":[212],"such":[213],"as":[214],"lithography,":[215],"high-speed/large-scale":[216],"imaging,":[217],"molecular":[218],"manipulation,":[221],"many":[223],"others":[224],"may":[228],"open":[229],"up":[230],"perspectives":[232],"opportunities.":[234]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":10},{"year":2022,"cited_by_count":7},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":8},{"year":2019,"cited_by_count":11},{"year":2018,"cited_by_count":10},{"year":2017,"cited_by_count":14},{"year":2016,"cited_by_count":13},{"year":2015,"cited_by_count":11},{"year":2014,"cited_by_count":9},{"year":2013,"cited_by_count":16},{"year":2012,"cited_by_count":21}],"updated_date":"2026-03-13T16:22:10.518609","created_date":"2025-10-10T00:00:00"}