{"id":"https://openalex.org/W4409168397","doi":"https://doi.org/10.1145/3728468","title":"Bridging Hotspot Detection and Mask Optimization via Domain-Crossing Masked Layout Modeling","display_name":"Bridging Hotspot Detection and Mask Optimization via Domain-Crossing Masked Layout Modeling","publication_year":2025,"publication_date":"2025-04-04","ids":{"openalex":"https://openalex.org/W4409168397","doi":"https://doi.org/10.1145/3728468"},"language":"en","primary_location":{"id":"doi:10.1145/3728468","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3728468","pdf_url":null,"source":{"id":"https://openalex.org/S105046310","display_name":"ACM Transactions on Design Automation of Electronic Systems","issn_l":"1084-4309","issn":["1084-4309","1557-7309"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319798","host_organization_name":"Association for Computing Machinery","host_organization_lineage":["https://openalex.org/P4310319798"],"host_organization_lineage_names":["Association for Computing Machinery"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACM Transactions on Design Automation of Electronic Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.1145/3728468","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027132950","display_name":"Binwu Zhu","orcid":"https://orcid.org/0000-0001-8625-1502"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Binwu Zhu","raw_affiliation_strings":["Southeast University, Nanjing, China","School of Integrated Circuit, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0001-8625-1502","affiliations":[{"raw_affiliation_string":"Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Integrated Circuit, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112542413","display_name":"Su Zheng","orcid":"https://orcid.org/0000-0003-1159-1611"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Su Zheng","raw_affiliation_strings":["The Chinese University of Hong Kong, Hong Kong, Hong Kong","Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0003-1159-1611","affiliations":[{"raw_affiliation_string":"The Chinese University of Hong Kong, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071995111","display_name":"Yuzhe Ma","orcid":"https://orcid.org/0000-0002-3612-4182"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]},{"id":"https://openalex.org/I37987034","display_name":"Guangzhou University","ror":"https://ror.org/05ar8rn06","country_code":"CN","type":"education","lineage":["https://openalex.org/I37987034"]},{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]},{"id":"https://openalex.org/I90610280","display_name":"South China University of Technology","ror":"https://ror.org/0530pts50","country_code":"CN","type":"education","lineage":["https://openalex.org/I90610280"]}],"countries":["CN","HK"],"is_corresponding":false,"raw_author_name":"Yuzhe Ma","raw_affiliation_strings":["Hong Kong University of Science and Technology (Guangzhou), Guangzhou China","Hong Kong University of Science and Technology (Guangzhou),  Guangzhou China"],"raw_orcid":"https://orcid.org/0000-0002-3612-4182","affiliations":[{"raw_affiliation_string":"Hong Kong University of Science and Technology (Guangzhou), Guangzhou China","institution_ids":["https://openalex.org/I90610280","https://openalex.org/I37987034","https://openalex.org/I889458895"]},{"raw_affiliation_string":"Hong Kong University of Science and Technology (Guangzhou),  Guangzhou China","institution_ids":["https://openalex.org/I200769079","https://openalex.org/I889458895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["The Chinese University of Hong Kong, Hong Kong Hong Kong","CSE, The Chinese University of Hong Kong, Hong Kong Hong Kong"],"raw_orcid":"https://orcid.org/0000-0001-6406-4810","affiliations":[{"raw_affiliation_string":"The Chinese University of Hong Kong, Hong Kong Hong Kong","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"CSE, The Chinese University of Hong Kong, Hong Kong Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053378706","display_name":"Martin D. F. Wong","orcid":"https://orcid.org/0000-0001-8274-9688"},"institutions":[{"id":"https://openalex.org/I141568987","display_name":"Hong Kong Baptist University","ror":"https://ror.org/0145fw131","country_code":"HK","type":"education","lineage":["https://openalex.org/I141568987"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Martin Wong","raw_affiliation_strings":["Hong Kong Baptist University, Hong Kong Hong Kong","Hong Kong Baptist University,  Hong Kong Hong Kong"],"raw_orcid":"https://orcid.org/0000-0001-8274-9688","affiliations":[{"raw_affiliation_string":"Hong Kong Baptist University, Hong Kong Hong Kong","institution_ids":["https://openalex.org/I141568987"]},{"raw_affiliation_string":"Hong Kong Baptist University,  Hong Kong Hong Kong","institution_ids":["https://openalex.org/I141568987"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5027132950"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":0.5782,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.65897778,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"30","issue":"4","first_page":"1","last_page":"20"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.8542776107788086},{"id":"https://openalex.org/keywords/hotspot","display_name":"Hotspot (geology)","score":0.7762386798858643},{"id":"https://openalex.org/keywords/bridging","display_name":"Bridging (networking)","score":0.636069655418396},{"id":"https://openalex.org/keywords/computer-security","display_name":"Computer security","score":0.1879749596118927},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.08745357394218445}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.8542776107788086},{"id":"https://openalex.org/C146481406","wikidata":"https://www.wikidata.org/wiki/Q105131","display_name":"Hotspot (geology)","level":2,"score":0.7762386798858643},{"id":"https://openalex.org/C174348530","wikidata":"https://www.wikidata.org/wiki/Q188635","display_name":"Bridging (networking)","level":2,"score":0.636069655418396},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.1879749596118927},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.08745357394218445},{"id":"https://openalex.org/C8058405","wikidata":"https://www.wikidata.org/wiki/Q46255","display_name":"Geophysics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1145/3728468","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3728468","pdf_url":null,"source":{"id":"https://openalex.org/S105046310","display_name":"ACM Transactions on Design Automation of Electronic Systems","issn_l":"1084-4309","issn":["1084-4309","1557-7309"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319798","host_organization_name":"Association for Computing Machinery","host_organization_lineage":["https://openalex.org/P4310319798"],"host_organization_lineage_names":["Association for Computing Machinery"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACM Transactions on Design Automation of Electronic Systems","raw_type":"journal-article"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-163619","is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-163619","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"}],"best_oa_location":{"id":"doi:10.1145/3728468","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3728468","pdf_url":null,"source":{"id":"https://openalex.org/S105046310","display_name":"ACM Transactions on Design Automation of Electronic Systems","issn_l":"1084-4309","issn":["1084-4309","1557-7309"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319798","host_organization_name":"Association for Computing Machinery","host_organization_lineage":["https://openalex.org/P4310319798"],"host_organization_lineage_names":["Association for Computing Machinery"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACM Transactions on Design Automation of Electronic Systems","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.5,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":43,"referenced_works":["https://openalex.org/W569478347","https://openalex.org/W1963685841","https://openalex.org/W2008176598","https://openalex.org/W2038835846","https://openalex.org/W2057596653","https://openalex.org/W2068961782","https://openalex.org/W2092982423","https://openalex.org/W2113125366","https://openalex.org/W2149602086","https://openalex.org/W2560023338","https://openalex.org/W2565639579","https://openalex.org/W2625434482","https://openalex.org/W2804151869","https://openalex.org/W2945250736","https://openalex.org/W2970971581","https://openalex.org/W2971516606","https://openalex.org/W3048563620","https://openalex.org/W3048899112","https://openalex.org/W3094502228","https://openalex.org/W3096831136","https://openalex.org/W3111269108","https://openalex.org/W3138516171","https://openalex.org/W3177525997","https://openalex.org/W3186713366","https://openalex.org/W3198572068","https://openalex.org/W4200227931","https://openalex.org/W4200483799","https://openalex.org/W4206557440","https://openalex.org/W4232775057","https://openalex.org/W4234309643","https://openalex.org/W4245551996","https://openalex.org/W4249166508","https://openalex.org/W4249963095","https://openalex.org/W4250102534","https://openalex.org/W4293024179","https://openalex.org/W4312804044","https://openalex.org/W4313156423","https://openalex.org/W4319300504","https://openalex.org/W4319993468","https://openalex.org/W4386242015","https://openalex.org/W4386763932","https://openalex.org/W4387490569","https://openalex.org/W4394601697"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4408719353","https://openalex.org/W4388870064","https://openalex.org/W2210139803","https://openalex.org/W4235186151","https://openalex.org/W2054685365","https://openalex.org/W2056057048","https://openalex.org/W2667588871"],"abstract_inverted_index":{"With":[0],"the":[1,6,76,102,109,124,131,137,154,170,177],"rapid":[2],"development":[3],"of":[4,8,57,64,104],"semiconductors,":[5],"size":[7,17],"transistors":[9],"is":[10],"continuously":[11],"scaling":[12],"down.":[13],"The":[14],"shrinking":[15],"circuit":[16],"poses":[18],"great":[19],"challenges":[20],"to":[21,75,101],"optical":[22],"proximity":[23],"correction":[24],"(OPC)":[25],"and":[26,34,60,91,113,135,146,187],"hotspot":[27],"detection":[28],"(HSD).":[29],"Recent":[30],"advancements":[31],"in":[32],"OPC":[33,61,90,112,147,186],"HSD":[35,59,92,145,188],"commonly":[36],"employ":[37],"deep":[38,96],"neural":[39],"networks,":[40],"achieving":[41],"impressive":[42],"performance":[43,103,183],"within":[44],"a":[45,94,118,161],"limited":[46,149],"runtime.":[47],"Based":[48],"on":[49,123,144,184],"these":[50,69],"achievements,":[51],"we":[52,86,115,159],"observe":[53],"that":[54,88,176],"deep-learning-based":[55],"models":[56],"both":[58,105,185],"require":[62],"knowledge":[63],"layout":[65,119,132,155,163,166],"structure":[66],"information.":[67],"Furthermore,":[68],"two":[70],"tasks":[71],"are":[72],"closely":[73],"related":[74],"lithography":[77],"process":[78],"during":[79],"chip":[80],"manufacturing.":[81],"Observing":[82],"such":[83],"strong":[84],"relationships,":[85],"propose":[87],"integrating":[89],"into":[93],"unified":[95],"learning":[97],"model":[98,121,139,157,180],"will":[99],"contribute":[100],"tasks.":[106,189],"To":[107,151],"bridge":[108],"relationship":[110],"between":[111],"HSD,":[114],"first":[116],"pre-train":[117,153],"understanding":[120,156],"built":[122],"mask":[125],"modeling":[126],"technique,":[127],"which":[128],"effectively":[129],"captures":[130],"geometric":[133],"information,":[134],"then":[136],"pre-trained":[138],"can":[140],"be":[141],"easily":[142],"fine-tuned":[143,178],"with":[148],"data.":[150],"fully":[152],"(LUM),":[158],"create":[160],"large":[162],"dataset":[164],"using":[165],"generation":[167],"techniques,":[168],"solving":[169],"data-hungry":[171],"issues.":[172],"Experimental":[173],"results":[174],"show":[175],"LUM":[179],"achieves":[181],"remarkable":[182]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}