{"id":"https://openalex.org/W4409285471","doi":"https://doi.org/10.1145/3676536.3676763","title":"Enabling Robust Inverse Lithography with Rigorous Multi-Objective Optimization","display_name":"Enabling Robust Inverse Lithography with Rigorous Multi-Objective Optimization","publication_year":2024,"publication_date":"2024-10-27","ids":{"openalex":"https://openalex.org/W4409285471","doi":"https://doi.org/10.1145/3676536.3676763"},"language":"en","primary_location":{"id":"doi:10.1145/3676536.3676763","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3676536.3676763","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/3676536.3676763","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 43rd IEEE/ACM International Conference on Computer-Aided Design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://dl.acm.org/doi/pdf/10.1145/3676536.3676763","any_repository_has_fulltext":null},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101848551","display_name":"Yang Luo","orcid":"https://orcid.org/0000-0003-3661-3047"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]},{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]}],"countries":["HK"],"is_corresponding":true,"raw_author_name":"Yang Luo","raw_affiliation_strings":["The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China"],"raw_orcid":"https://orcid.org/0000-0003-3661-3047","affiliations":[{"raw_affiliation_string":"The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China","institution_ids":["https://openalex.org/I200769079","https://openalex.org/I889458895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055355549","display_name":"Xiaoxiao Liang","orcid":"https://orcid.org/0000-0003-4691-3940"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]},{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Xiaoxiao Liang","raw_affiliation_strings":["The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China"],"raw_orcid":"https://orcid.org/0000-0003-4691-3940","affiliations":[{"raw_affiliation_string":"The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China","institution_ids":["https://openalex.org/I200769079","https://openalex.org/I889458895"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071995111","display_name":"Yuzhe Ma","orcid":"https://orcid.org/0000-0002-3612-4182"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]},{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yuzhe Ma","raw_affiliation_strings":["The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China"],"raw_orcid":"https://orcid.org/0000-0002-3612-4182","affiliations":[{"raw_affiliation_string":"The Hong Kong University of Science and Technology (GuangZhou), GuangZhou, China","institution_ids":["https://openalex.org/I200769079","https://openalex.org/I889458895"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5101848551"],"corresponding_institution_ids":["https://openalex.org/I200769079","https://openalex.org/I889458895"],"apc_list":null,"apc_paid":null,"fwci":0.187,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.55253707,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10531","display_name":"Advanced Vision and Imaging","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7110856175422668},{"id":"https://openalex.org/keywords/inverse","display_name":"Inverse","score":0.5710538029670715},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5494047403335571},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.35904496908187866},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3225155770778656},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16244113445281982},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.12724557518959045}],"concepts":[{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7110856175422668},{"id":"https://openalex.org/C207467116","wikidata":"https://www.wikidata.org/wiki/Q4385666","display_name":"Inverse","level":2,"score":0.5710538029670715},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5494047403335571},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.35904496908187866},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3225155770778656},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16244113445281982},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.12724557518959045},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1145/3676536.3676763","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3676536.3676763","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/3676536.3676763","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 43rd IEEE/ACM International Conference on Computer-Aided Design","raw_type":"proceedings-article"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-161519","is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-161519","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference paper"}],"best_oa_location":{"id":"doi:10.1145/3676536.3676763","is_oa":true,"landing_page_url":"https://doi.org/10.1145/3676536.3676763","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/3676536.3676763","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 43rd IEEE/ACM International Conference on Computer-Aided Design","raw_type":"proceedings-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2291908008","display_name":null,"funder_award_id":"2023A03J0013","funder_id":"https://openalex.org/F4320335480","funder_display_name":"Guangzhou Municipal Science and Technology Project"},{"id":"https://openalex.org/G4563281474","display_name":null,"funder_award_id":"62204066","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6856683539","display_name":null,"funder_award_id":"No. 2023A03J0013","funder_id":"https://openalex.org/F4320335480","funder_display_name":"Guangzhou Municipal Science and Technology Project"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335480","display_name":"Guangzhou Municipal Science and Technology Project","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4409285471.pdf","grobid_xml":"https://content.openalex.org/works/W4409285471.grobid-xml"},"referenced_works_count":33,"referenced_works":["https://openalex.org/W21269541","https://openalex.org/W1594489858","https://openalex.org/W1901129140","https://openalex.org/W1963685841","https://openalex.org/W1973654887","https://openalex.org/W1980287119","https://openalex.org/W1993999542","https://openalex.org/W1999879018","https://openalex.org/W2030566567","https://openalex.org/W2036552973","https://openalex.org/W2038980326","https://openalex.org/W2053354927","https://openalex.org/W2056830856","https://openalex.org/W2095030662","https://openalex.org/W2120442423","https://openalex.org/W2129996279","https://openalex.org/W2146502635","https://openalex.org/W2771269622","https://openalex.org/W2807637204","https://openalex.org/W2809465272","https://openalex.org/W3111433944","https://openalex.org/W3129958428","https://openalex.org/W4235262418","https://openalex.org/W4250589301","https://openalex.org/W4318685681","https://openalex.org/W4386148469","https://openalex.org/W4386763932","https://openalex.org/W4387490569","https://openalex.org/W6658865388","https://openalex.org/W6688628972","https://openalex.org/W6771876938","https://openalex.org/W6790935598","https://openalex.org/W6856036966"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4404995717","https://openalex.org/W2016187641","https://openalex.org/W4404725684","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W4409278740","https://openalex.org/W2898370298"],"abstract_inverted_index":{"Inverse":[0],"lithography":[1,74],"technology":[2],"(ILT)":[3],"shows":[4],"great":[5],"power":[6],"in":[7,23,137],"optical":[8],"proximity":[9],"correction,":[10],"which":[11,59],"enlarges":[12],"the":[13,32,37,53,79,87,95,114,121,126,134,138,143,148,154,161],"solution":[14],"space":[15],"of":[16,25,39,84],"mask":[17,115],"optimization":[18,64,97,107,116],"and":[19,99,129,146],"generates":[20],"high-quality":[21],"masks":[22],"terms":[24],"various":[26,44],"criteria,":[27],"including":[28],"process":[29,33,45,54,80,162],"window.":[30,163],"Optimizing":[31],"window":[34,55,81],"involves":[35],"improving":[36],"fidelity":[38],"printed":[40],"wafer":[41],"patterns":[42],"on":[43,160],"conditions.":[46],"It":[47],"is":[48,60],"non-trivial":[49],"to":[50,77,132],"explicitly":[51],"optimize":[52,78],"during":[56,113],"ILT":[57],"optimization,":[58],"essentially":[61],"a":[62,71,90,104],"multi-objective":[63,96,106],"problem.":[65],"In":[66],"this":[67],"paper,":[68],"we":[69,93,102,119],"propose":[70],"robust":[72],"inverse":[73],"method,":[75],"RMO-ILT,":[76],"effectively.":[82],"Instead":[83],"aggregating":[85],"all":[86],"objectives":[88],"into":[89],"single":[91],"one,":[92],"target":[94],"directly":[98],"explicitly.":[100],"Specifically,":[101],"design":[103],"rigorous":[105],"algorithm":[108,122,127,156],"that":[109,153],"computes":[110],"uniform":[111],"gradients":[112],"process.":[117],"Furthermore,":[118],"improve":[120],"efficiency":[123],"from":[124],"both":[125],"level":[128,131],"implementation":[130],"address":[133],"intrinsic":[135],"increase":[136],"computation":[139],"overhead,":[140],"significantly":[141],"reducing":[142],"time":[144],"consumption":[145],"enhancing":[147],"scalability.":[149],"Experimental":[150],"results":[151],"show":[152],"proposed":[155],"achieves":[157],"superior":[158],"performance":[159]},"counts_by_year":[{"year":2026,"cited_by_count":1}],"updated_date":"2026-06-06T09:05:17.133730","created_date":"2025-10-10T00:00:00"}