{"id":"https://openalex.org/W4404133669","doi":"https://doi.org/10.1145/3649329.3657309","title":"Efficient ILT via Multigrid-Schwartz Method","display_name":"Efficient ILT via Multigrid-Schwartz Method","publication_year":2024,"publication_date":"2024-06-23","ids":{"openalex":"https://openalex.org/W4404133669","doi":"https://doi.org/10.1145/3649329.3657309"},"language":"en","primary_location":{"id":"doi:10.1145/3649329.3657309","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3649329.3657309","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 61st ACM/IEEE Design Automation Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014433698","display_name":"Shuyuan Sun","orcid":"https://orcid.org/0009-0003-5737-3422"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Shuyuan Sun","raw_affiliation_strings":["Fudan University, Shanghai, Shanghai, China"],"raw_orcid":"https://orcid.org/0009-0003-5737-3422","affiliations":[{"raw_affiliation_string":"Fudan University, Shanghai, Shanghai, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045464812","display_name":"Fan Yang","orcid":"https://orcid.org/0000-0003-2164-8175"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fan Yang","raw_affiliation_strings":["Fudan University, Shanghai, Shanghai, China"],"raw_orcid":"https://orcid.org/0000-0003-2164-8175","affiliations":[{"raw_affiliation_string":"Fudan University, Shanghai, Shanghai, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["The Chinese University of Hong Kong, Shatin, Hong Kong Special Administrative Region of China"],"raw_orcid":"https://orcid.org/0000-0001-6406-4810","affiliations":[{"raw_affiliation_string":"The Chinese University of Hong Kong, Shatin, Hong Kong Special Administrative Region of China","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004722925","display_name":"Li Shang","orcid":"https://orcid.org/0000-0003-3944-7531"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Li Shang","raw_affiliation_strings":["fudan university, shanghai, shanghai, China"],"raw_orcid":"https://orcid.org/0000-0003-3944-7531","affiliations":[{"raw_affiliation_string":"fudan university, shanghai, shanghai, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054960059","display_name":"Dian Zhou","orcid":"https://orcid.org/0000-0002-2648-5232"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dian Zhou","raw_affiliation_strings":["Fudan University, shanghai, shanghai, China"],"raw_orcid":"https://orcid.org/0000-0002-2648-5232","affiliations":[{"raw_affiliation_string":"Fudan University, shanghai, shanghai, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064213921","display_name":"Xuan Zeng","orcid":"https://orcid.org/0000-0002-8097-4053"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuan Zeng","raw_affiliation_strings":["Fudan University, shanghai, shanghai, China"],"raw_orcid":"https://orcid.org/0000-0002-8097-4053","affiliations":[{"raw_affiliation_string":"Fudan University, shanghai, shanghai, China","institution_ids":["https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5014433698"],"corresponding_institution_ids":["https://openalex.org/I24943067"],"apc_list":null,"apc_paid":null,"fwci":0.3076,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.64195832,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11659","display_name":"Advanced Image Fusion Techniques","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11659","display_name":"Advanced Image Fusion Techniques","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10688","display_name":"Image and Signal Denoising Methods","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11019","display_name":"Image Enhancement Techniques","score":0.9919999837875366,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multigrid-method","display_name":"Multigrid method","score":0.6445461511611938},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6189342737197876},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.18586349487304688},{"id":"https://openalex.org/keywords/partial-differential-equation","display_name":"Partial differential equation","score":0.04889726638793945}],"concepts":[{"id":"https://openalex.org/C137119250","wikidata":"https://www.wikidata.org/wiki/Q1413101","display_name":"Multigrid method","level":3,"score":0.6445461511611938},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6189342737197876},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.18586349487304688},{"id":"https://openalex.org/C93779851","wikidata":"https://www.wikidata.org/wiki/Q271977","display_name":"Partial differential equation","level":2,"score":0.04889726638793945},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1145/3649329.3657309","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3649329.3657309","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 61st ACM/IEEE Design Automation Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.44999998807907104,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1975807217","https://openalex.org/W1986812736","https://openalex.org/W2018685527","https://openalex.org/W2033627854","https://openalex.org/W2056830856","https://openalex.org/W2084073638","https://openalex.org/W2117281050","https://openalex.org/W2136401825","https://openalex.org/W2587363559","https://openalex.org/W2913342441","https://openalex.org/W2971516606","https://openalex.org/W3013607396","https://openalex.org/W3094112803","https://openalex.org/W4251158353","https://openalex.org/W4367307875","https://openalex.org/W4367307908","https://openalex.org/W4386763932","https://openalex.org/W4386767094","https://openalex.org/W4392678671","https://openalex.org/W6680348478","https://openalex.org/W6786939320","https://openalex.org/W6862483025"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2077078424","https://openalex.org/W2182328658","https://openalex.org/W1519938374","https://openalex.org/W84272617","https://openalex.org/W613282331","https://openalex.org/W2092341060","https://openalex.org/W2625595466"],"abstract_inverted_index":{"Inverse":[0],"Lithography":[1],"Technology":[2,9],"(ILT)":[3],"is":[4],"an":[5],"important":[6],"Resolution":[7],"Enhancement":[8],"(RET)":[10],"in":[11,44,65],"chip":[12],"manufacturing.":[13],"Due":[14],"to":[15,41,56],"the":[16,57,69],"high":[17],"computational":[18],"demands":[19],"of":[20,77],"ILT,":[21,59],"large-scale":[22],"layouts":[23],"are":[24],"typically":[25],"partitioned":[26],"into":[27],"smaller":[28],"tiles":[29],"for":[30],"independent":[31],"processing.":[32],"In":[33],"this":[34],"paper,":[35],"we":[36],"propose":[37],"a":[38],"multigrid-Schwarz":[39],"method":[40],"overcome":[42],"challenges":[43],"tile":[45,78],"assembly.":[46],"Experimental":[47],"results":[48],"show":[49],"that":[50],"our":[51],"approach":[52],"achieves":[53],"comparable":[54],"performance":[55],"full-chip":[58],"offering":[60],"increased":[61],"parallelizability":[62],"and":[63],"speedup":[64],"parallel":[66],"mode.":[67],"Unlike":[68],"traditional":[70],"divide-and-conquer":[71],"algorithm,":[72],"it":[73],"effectively":[74],"alleviates":[75],"discontinuities":[76],"stitching,":[79],"preventing":[80],"manufacturing":[81],"failures.":[82]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-12-23T23:11:35.936235","created_date":"2025-10-10T00:00:00"}