{"id":"https://openalex.org/W4404133788","doi":"https://doi.org/10.1145/3649329.3656254","title":"CAMO: Correlation-Aware Mask Optimization with Modulated Reinforcement Learning","display_name":"CAMO: Correlation-Aware Mask Optimization with Modulated Reinforcement Learning","publication_year":2024,"publication_date":"2024-06-23","ids":{"openalex":"https://openalex.org/W4404133788","doi":"https://doi.org/10.1145/3649329.3656254"},"language":"en","primary_location":{"id":"doi:10.1145/3649329.3656254","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3649329.3656254","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 61st ACM/IEEE Design Automation Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055355549","display_name":"Xiaoxiao Liang","orcid":"https://orcid.org/0000-0003-4691-3940"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Xiaoxiao Liang","raw_affiliation_strings":["The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, Guangdong, China"],"raw_orcid":"https://orcid.org/0000-0003-4691-3940","affiliations":[{"raw_affiliation_string":"The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, Guangdong, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100642435","display_name":"Haoyu Yang","orcid":"https://orcid.org/0000-0002-4709-0061"},"institutions":[{"id":"https://openalex.org/I4210127875","display_name":"Nvidia (United States)","ror":"https://ror.org/03jdj4y14","country_code":"US","type":"company","lineage":["https://openalex.org/I4210127875"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Haoyu Yang","raw_affiliation_strings":["NVIDIA Corp., Austin, TX, United States"],"raw_orcid":"https://orcid.org/0000-0002-4709-0061","affiliations":[{"raw_affiliation_string":"NVIDIA Corp., Austin, TX, United States","institution_ids":["https://openalex.org/I4210127875"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100389879","display_name":"Kang Liu","orcid":"https://orcid.org/0000-0001-7231-8315"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kang Liu","raw_affiliation_strings":["Huazhong University of Science and Technology, Wuhan, Hubei, China"],"raw_orcid":"https://orcid.org/0000-0001-7231-8315","affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology, Wuhan, Hubei, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["The Chinese University of Hong Kong, Shatin, N/A, Hong Kong Special Administrative Region of China"],"raw_orcid":"https://orcid.org/0000-0001-6406-4810","affiliations":[{"raw_affiliation_string":"The Chinese University of Hong Kong, Shatin, N/A, Hong Kong Special Administrative Region of China","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071995111","display_name":"Yuzhe Ma","orcid":"https://orcid.org/0000-0002-3612-4182"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yuzhe Ma","raw_affiliation_strings":["The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, Guangdong, China"],"raw_orcid":"https://orcid.org/0000-0002-3612-4182","affiliations":[{"raw_affiliation_string":"The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, Guangdong, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5055355549"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4961,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.82966501,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11245","display_name":"Advanced Numerical Analysis Techniques","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9855999946594238,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reinforcement-learning","display_name":"Reinforcement learning","score":0.8300951719284058},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6288818120956421},{"id":"https://openalex.org/keywords/correlation","display_name":"Correlation","score":0.5138064026832581},{"id":"https://openalex.org/keywords/reinforcement","display_name":"Reinforcement","score":0.43851256370544434},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3881586194038391},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1574220061302185},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.11733469367027283},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.0704541802406311}],"concepts":[{"id":"https://openalex.org/C97541855","wikidata":"https://www.wikidata.org/wiki/Q830687","display_name":"Reinforcement learning","level":2,"score":0.8300951719284058},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6288818120956421},{"id":"https://openalex.org/C117220453","wikidata":"https://www.wikidata.org/wiki/Q5172842","display_name":"Correlation","level":2,"score":0.5138064026832581},{"id":"https://openalex.org/C67203356","wikidata":"https://www.wikidata.org/wiki/Q1321905","display_name":"Reinforcement","level":2,"score":0.43851256370544434},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3881586194038391},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1574220061302185},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.11733469367027283},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.0704541802406311},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1145/3649329.3656254","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3649329.3656254","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 61st ACM/IEEE Design Automation Conference","raw_type":"proceedings-article"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-159438","is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-159438","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference paper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4099999964237213,"id":"https://metadata.un.org/sdg/10","display_name":"Reduced inequalities"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W21269541","https://openalex.org/W1995708416","https://openalex.org/W1999879018","https://openalex.org/W2038980326","https://openalex.org/W2056830856","https://openalex.org/W2095030662","https://openalex.org/W2119717200","https://openalex.org/W2129996279","https://openalex.org/W2146918190","https://openalex.org/W2149602086","https://openalex.org/W2344299637","https://openalex.org/W2624431344","https://openalex.org/W2909831073","https://openalex.org/W2971516606","https://openalex.org/W3006089892","https://openalex.org/W3047198287","https://openalex.org/W3112693398","https://openalex.org/W3121891885","https://openalex.org/W4241870777","https://openalex.org/W4288079630","https://openalex.org/W4293024179","https://openalex.org/W4386242015","https://openalex.org/W6681442893"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4310083477","https://openalex.org/W2328553770","https://openalex.org/W2920061524","https://openalex.org/W1977959518","https://openalex.org/W2038908348","https://openalex.org/W2107890255","https://openalex.org/W2106552856"],"abstract_inverted_index":{"Optical":[0],"proximity":[1],"correction":[2],"(OPC)":[3],"is":[4],"a":[5,57],"vital":[6],"step":[7],"to":[8,25,45],"ensure":[9],"print-ability":[10],"in":[11],"modern":[12],"VLSI":[13],"manufacturing.":[14],"Various":[15],"OPC":[16,42,60,69,110],"approaches":[17],"based":[18],"on":[19,94],"machine":[20],"learning":[21],"have":[22],"been":[23],"proposed":[24],"pursue":[26],"performance":[27,47],"and":[28,34,83,99,115],"efficiency,":[29],"which":[30],"are":[31,92],"typically":[32],"data-driven":[33],"hardly":[35],"involve":[36],"any":[37],"particular":[38],"considerations":[39],"of":[40,67,80],"the":[41,68,74,78],"problem,":[43],"leading":[44],"potential":[46],"or":[48],"efficiency":[49],"bottlenecks.":[50],"In":[51],"this":[52],"paper,":[53],"we":[54],"propose":[55],"CAMO,":[56],"reinforcement":[58],"learning-based":[59],"system":[61],"that":[62,106],"specifically":[63],"integrates":[64],"important":[65],"principles":[66],"problem.":[70],"CAMO":[71,107],"explicitly":[72],"involves":[73],"spatial":[75],"correlation":[76],"among":[77],"movements":[79],"neighboring":[81],"segments":[82],"an":[84],"OPC-inspired":[85],"modulation":[86],"for":[87],"movement":[88],"action":[89],"selection.":[90],"Experiments":[91],"conducted":[93],"both":[95,113],"via":[96],"layer":[97,101],"patterns":[98],"metal":[100],"patterns.":[102],"The":[103],"results":[104],"demonstrate":[105],"outperforms":[108],"state-of-the-art":[109],"engines":[111],"from":[112],"academia":[114],"industry.":[116]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-06T09:05:17.133730","created_date":"2025-10-10T00:00:00"}