{"id":"https://openalex.org/W2972777651","doi":"https://doi.org/10.1145/3355391","title":"Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning","display_name":"Cut Optimization for Redundant Via Insertion in Self-Aligned Double Patterning","publication_year":2019,"publication_date":"2019-09-09","ids":{"openalex":"https://openalex.org/W2972777651","doi":"https://doi.org/10.1145/3355391","mag":"2972777651"},"language":"en","primary_location":{"id":"doi:10.1145/3355391","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3355391","pdf_url":null,"source":{"id":"https://openalex.org/S105046310","display_name":"ACM Transactions on Design Automation of Electronic Systems","issn_l":"1084-4309","issn":["1084-4309","1557-7309"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319798","host_organization_name":"Association for Computing Machinery","host_organization_lineage":["https://openalex.org/P4310319798"],"host_organization_lineage_names":["Association for Computing Machinery"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACM Transactions on Design Automation of Electronic Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014796830","display_name":"Youngsoo Song","orcid":"https://orcid.org/0000-0002-7674-4722"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Youngsoo Song","raw_affiliation_strings":["KAIST, Daejeon, Republic of Korea, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KAIST, Daejeon, Republic of Korea, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001898344","display_name":"Daijoon Hyun","orcid":"https://orcid.org/0000-0002-0576-9666"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Daijoon Hyun","raw_affiliation_strings":["KAIST, Daejeon, Republic of Korea, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KAIST, Daejeon, Republic of Korea, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085803815","display_name":"Jingon Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jingon Lee","raw_affiliation_strings":["KAIST, Daejeon, Republic of Korea, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KAIST, Daejeon, Republic of Korea, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101764248","display_name":"Jinwook Jung","orcid":"https://orcid.org/0000-0002-9384-5277"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jinwook Jung","raw_affiliation_strings":["KAIST, Daejeon, Republic of Korea, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KAIST, Daejeon, Republic of Korea, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020011072","display_name":"Youngsoo Shin","orcid":"https://orcid.org/0000-0002-7474-9212"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Youngsoo Shin","raw_affiliation_strings":["KAIST, Daejeon, Republic of Korea, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KAIST, Daejeon, Republic of Korea, Korea","institution_ids":["https://openalex.org/I157485424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I157485424"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0897833,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"24","issue":"6","first_page":"1","last_page":"21"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6842024326324463},{"id":"https://openalex.org/keywords/integer-programming","display_name":"Integer programming","score":0.6555477380752563},{"id":"https://openalex.org/keywords/linear-programming","display_name":"Linear programming","score":0.5530074834823608},{"id":"https://openalex.org/keywords/multiple-patterning","display_name":"Multiple patterning","score":0.5021171569824219},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"Insertion loss","score":0.49845290184020996},{"id":"https://openalex.org/keywords/line","display_name":"Line (geometry)","score":0.4759249985218048},{"id":"https://openalex.org/keywords/set","display_name":"Set (abstract data type)","score":0.4741717576980591},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.43521153926849365},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4304805099964142},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.4151100218296051},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4117639660835266},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.23131310939788818},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.20260709524154663},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.09785309433937073},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.09782320261001587},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.09084591269493103},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.08816593885421753},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.07938981056213379}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6842024326324463},{"id":"https://openalex.org/C56086750","wikidata":"https://www.wikidata.org/wiki/Q6042592","display_name":"Integer programming","level":2,"score":0.6555477380752563},{"id":"https://openalex.org/C41045048","wikidata":"https://www.wikidata.org/wiki/Q202843","display_name":"Linear programming","level":2,"score":0.5530074834823608},{"id":"https://openalex.org/C177409738","wikidata":"https://www.wikidata.org/wiki/Q1917460","display_name":"Multiple patterning","level":4,"score":0.5021171569824219},{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.49845290184020996},{"id":"https://openalex.org/C198352243","wikidata":"https://www.wikidata.org/wiki/Q37105","display_name":"Line (geometry)","level":2,"score":0.4759249985218048},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.4741717576980591},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.43521153926849365},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4304805099964142},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.4151100218296051},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4117639660835266},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.23131310939788818},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.20260709524154663},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.09785309433937073},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09782320261001587},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09084591269493103},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08816593885421753},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.07938981056213379},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1145/3355391","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3355391","pdf_url":null,"source":{"id":"https://openalex.org/S105046310","display_name":"ACM Transactions on Design Automation of Electronic Systems","issn_l":"1084-4309","issn":["1084-4309","1557-7309"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319798","host_organization_name":"Association for Computing Machinery","host_organization_lineage":["https://openalex.org/P4310319798"],"host_organization_lineage_names":["Association for Computing Machinery"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACM Transactions on Design Automation of Electronic Systems","raw_type":"journal-article"},{"id":"pmh:oai:koasas.kaist.ac.kr:10203/269057","is_oa":false,"landing_page_url":"http://hdl.handle.net/10203/269057","pdf_url":null,"source":{"id":"https://openalex.org/S4306402435","display_name":"KAIST Institutional Repository (KAIST)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I157485424","host_organization_name":"Korea Advanced Institute of Science and Technology","host_organization_lineage":["https://openalex.org/I157485424"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1967934869","https://openalex.org/W1974959172","https://openalex.org/W1987404336","https://openalex.org/W2016999260","https://openalex.org/W2035821057","https://openalex.org/W2067939252","https://openalex.org/W2118752641","https://openalex.org/W2127254586","https://openalex.org/W2137560895","https://openalex.org/W2139653724","https://openalex.org/W2147474017","https://openalex.org/W2147520163","https://openalex.org/W2159563034","https://openalex.org/W2320218226","https://openalex.org/W2535823762","https://openalex.org/W2604565383","https://openalex.org/W2621496481","https://openalex.org/W2895640830","https://openalex.org/W2914723795","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2060249924","https://openalex.org/W1516468884","https://openalex.org/W1604868505","https://openalex.org/W2011675579","https://openalex.org/W4285278887","https://openalex.org/W2995925505","https://openalex.org/W2365237642","https://openalex.org/W3116484972","https://openalex.org/W2941986668","https://openalex.org/W4232431455"],"abstract_inverted_index":{"Redundant":[0],"via":[1,6],"(RV)":[2],"insertion":[3,16,128],"helps":[4],"prevent":[5],"defects":[7],"and":[8,44,89,112,129,166],"hence":[9],"leads":[10],"to":[11,29,58,61,63,79,105,115,168],"yield":[12],"enhancement.":[13],"However,":[14],"RV":[15,52,75,87,127,181],"in":[17,157,196],"self-aligned":[18],"double":[19],"patterning":[20],"(SADP)":[21],"processes":[22],"is":[23,53,77,152,201],"challenging":[24],"since":[25],"cut":[26,130],"optimization":[27],"has":[28],"be":[30,59,106,138],"considered":[31],"together.":[32],"In":[33,118],"SADP,":[34],"parallel":[35],"one-dimensional":[36],"metal":[37],"lines":[38],"are":[39,92,163],"divided":[40],"into":[41],"signal":[42,55],"wires":[43,46,56],"dummy":[45],"by":[47,210],"line-end":[48,90],"cuts.":[49,117,182],"If":[50],"an":[51,69,141],"inserted,":[54],"need":[57],"extended":[60],"connect":[62],"the":[64,84,95,135,178,206],"RV.":[65],"To":[66],"this":[67,119],"end,":[68],"additional":[70],"cut,":[71,76],"which":[72,108,158,200],"we":[73,121],"call":[74],"introduced":[78],"make":[80],"a":[81,123,149],"space":[82],"for":[83,154],"extension.":[85],"Since":[86],"cuts":[88,91,103],"manufactured":[93],"with":[94,193],"same":[96],"mask":[97,113],"set,":[98],"design":[99],"rules":[100],"between":[101,180],"those":[102],"have":[104],"honored,":[107],"incurs":[109],"proper":[110],"distribution":[111],"assignment":[114],"individual":[116],"article,":[120],"address":[122],"problem":[124,136],"of":[125,161,189],"integrated":[126],"optimization.":[131],"We":[132,146],"show":[133],"that":[134,187],"can":[137],"formulated":[139],"as":[140,171,174],"integer":[142],"linear":[143],"programming":[144],"(ILP).":[145],"also":[147],"propose":[148],"heuristic":[150],"algorithm":[151],"presented":[153],"practical":[155],"application,":[156],"potential":[159],"locations":[160],"RVs":[162,173,192],"first":[164],"identified":[165],"used":[167],"properly":[169],"insert":[170],"many":[172],"possible":[175],"while":[176],"minimizing":[177],"conflict":[179],"Our":[183],"experimental":[184],"results":[185],"demonstrate":[186],"75%":[188],"vias":[190],"receive":[191],"8%":[194],"increase":[195],"total":[197],"wire":[198],"length,":[199],"only":[202],"slightly":[203],"worse":[204],"than":[205],"optimal":[207],"result":[208],"obtained":[209],"ILP.":[211]},"counts_by_year":[],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}