{"id":"https://openalex.org/W2958682821","doi":"https://doi.org/10.1145/3319619.3326879","title":"Predicting the remaining useful life of plasma equipment through XCSR","display_name":"Predicting the remaining useful life of plasma equipment through XCSR","publication_year":2019,"publication_date":"2019-07-10","ids":{"openalex":"https://openalex.org/W2958682821","doi":"https://doi.org/10.1145/3319619.3326879","mag":"2958682821"},"language":"en","primary_location":{"id":"doi:10.1145/3319619.3326879","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3319619.3326879","pdf_url":null,"source":{"id":"https://openalex.org/S4363608771","display_name":"Proceedings of the Genetic and Evolutionary Computation Conference Companion","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Genetic and Evolutionary Computation Conference Companion","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100780219","display_name":"Liangyu Chen","orcid":"https://orcid.org/0000-0003-0394-6208"},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Liang-Yu Chen","raw_affiliation_strings":["National Chiao Tung University, Hsinchu, Taiwan R.O.C"],"affiliations":[{"raw_affiliation_string":"National Chiao Tung University, Hsinchu, Taiwan R.O.C","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048837915","display_name":"Jia\u2010Hua Lee","orcid":"https://orcid.org/0000-0002-3302-4231"},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jia-Hua Lee","raw_affiliation_strings":["National Chiao Tung University, Hsinchu, Taiwan R.O.C"],"affiliations":[{"raw_affiliation_string":"National Chiao Tung University, Hsinchu, Taiwan R.O.C","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057124065","display_name":"Ya\u2010Liang Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ya-Liang Yang","raw_affiliation_strings":["National Chiao Tung University, Hsinchu, Taiwan R.O.C"],"affiliations":[{"raw_affiliation_string":"National Chiao Tung University, Hsinchu, Taiwan R.O.C","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056902493","display_name":"Ming-Tsung Yeh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210159061","display_name":"ELAN Microelectronics (Taiwan)","ror":"https://ror.org/051d31036","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210159061"]},{"id":"https://openalex.org/I4210161555","display_name":"United Microelectronics (Taiwan)","ror":"https://ror.org/0580qje17","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210161555"]},{"id":"https://openalex.org/I77566578","display_name":"United Microelectronics (United States)","ror":"https://ror.org/00vrhw316","country_code":"US","type":"company","lineage":["https://openalex.org/I4210161555","https://openalex.org/I77566578"]}],"countries":["TW","US"],"is_corresponding":false,"raw_author_name":"Ming-Tsung Yeh","raw_affiliation_strings":["United Microelectronics Corporation, Tainan City, Taiwan R.O.C"],"affiliations":[{"raw_affiliation_string":"United Microelectronics Corporation, Tainan City, Taiwan R.O.C","institution_ids":["https://openalex.org/I4210161555","https://openalex.org/I4210159061","https://openalex.org/I77566578"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109883093","display_name":"Tzu\u2010Chien Hsiao","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tzu-Chien Hsiao","raw_affiliation_strings":["National Chiao Tung University, Hsinchu, Taiwan R.O.C"],"affiliations":[{"raw_affiliation_string":"National Chiao Tung University, Hsinchu, Taiwan R.O.C","institution_ids":["https://openalex.org/I148366613"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100780219"],"corresponding_institution_ids":["https://openalex.org/I148366613"],"apc_list":null,"apc_paid":null,"fwci":0.3936,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.66923736,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1263","last_page":"1270"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11975","display_name":"Evolutionary Algorithms and Applications","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11975","display_name":"Evolutionary Algorithms and Applications","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9818000197410583,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.9440000057220459,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4767354726791382},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.4584282636642456},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.36745893955230713},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2266896665096283},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09951657056808472},{"id":"https://openalex.org/keywords/nuclear-physics","display_name":"Nuclear physics","score":0.06646594405174255}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4767354726791382},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4584282636642456},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.36745893955230713},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2266896665096283},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09951657056808472},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.06646594405174255}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1145/3319619.3326879","is_oa":false,"landing_page_url":"https://doi.org/10.1145/3319619.3326879","pdf_url":null,"source":{"id":"https://openalex.org/S4363608771","display_name":"Proceedings of the Genetic and Evolutionary Computation Conference Companion","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Genetic and Evolutionary Computation Conference Companion","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6399999856948853,"id":"https://metadata.un.org/sdg/16","display_name":"Peace, Justice and strong institutions"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W110238773","https://openalex.org/W1989101984","https://openalex.org/W2029608738","https://openalex.org/W2044049559","https://openalex.org/W2052153221","https://openalex.org/W2137261852","https://openalex.org/W2325300021","https://openalex.org/W2477329842","https://openalex.org/W2735807379","https://openalex.org/W2746353786"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2382290278","https://openalex.org/W2049775471","https://openalex.org/W2350741829","https://openalex.org/W2530322880","https://openalex.org/W1596801655"],"abstract_inverted_index":{"Predicting":[0],"remaining":[1],"useful":[2],"life":[3],"(RUL)":[4],"of":[5,26,37,57,75,99,114,148,157,170,199,209],"plasma":[6,176],"equipment":[7,49],"becomes":[8],"an":[9,47],"important":[10],"issue":[11],"for":[12,83],"semiconductor":[13,52],"manufacturing":[14,53],"in":[15,50,91],"this":[16],"decade.":[17],"If":[18],"RUL":[19,74],"can":[20,28,138],"be":[21,29,60],"accurately":[22,195],"estimated,":[23],"the":[24,33,38,51,63,73,88,95,100,107,112,129,153,175,183,197],"schedule":[25],"maintenance":[27],"proper":[30],"to":[31,71,86,127,193,204],"moderate":[32],"waste":[34],"and":[35,66,105,142,152],"cost":[36],"production.":[39],"Digital":[40],"Radio":[41],"Frequency":[42],"Matching":[43],"Box":[44],"(RF-MB)":[45],"is":[46,150,159,168],"essential":[48],"process.":[54],"The":[55,133,145,163],"status":[56],"RF-MB":[58,101,115],"will":[59,186],"recorded":[61],"by":[62],"Fault":[64],"Detection":[65],"Classification":[67],"(FDC).":[68],"In":[69,182],"order":[70],"establish":[72],"RF-MB,":[76],"we":[77,185],"use":[78,187],"Fisher":[79],"Discriminant":[80],"Analysis":[81],"(FDA)":[82],"feature":[84],"selection":[85],"concentrate":[87],"leading":[89],"variables":[90],"FDC.":[92],"We":[93,118,201],"marked":[94,106],"first":[96],"2":[97,109],"days":[98,110],"operation":[102],"as":[103,116],"\"Good\"":[104],"last":[108],"before":[111,174],"failure":[113],"\"Bad\".":[117],"used":[119],"extended":[120],"Classifier":[121],"System":[122],"with":[123,189],"continuous-valued":[124],"inputs":[125],"(XCSR)":[126],"learn":[128],"well-labeled":[130],"FDC":[131],"data.":[132],"results":[134,164],"show":[135],"that":[136,166],"XCSR":[137,149,167],"quickly":[139],"find":[140],"patterns":[141],"meaningful":[143],"variables.":[144],"average":[146,154],"accuracy":[147],"97.3%":[151],"missing":[155],"rate":[156],"rules":[158],"only":[160],"about":[161],"1.6%.":[162],"confirmed":[165],"capable":[169],"alerting":[171],"related":[172],"operator":[173],"component":[177],"reaching":[178],"its":[179],"residual":[180],"life.":[181],"future,":[184],"XCS":[188],"Function":[190],"approximation":[191],"(XCSF)":[192],"more":[194],"approximate":[196],"function":[198],"RUL.":[200,210],"look":[202],"forward":[203],"building":[205],"a":[206],"complete":[207],"assessment":[208]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}