{"id":"https://openalex.org/W2007778846","doi":"https://doi.org/10.1145/1735023.1735052","title":"Density gradient minimization with coupling-constrained dummy fill for CMP control","display_name":"Density gradient minimization with coupling-constrained dummy fill for CMP control","publication_year":2010,"publication_date":"2010-03-14","ids":{"openalex":"https://openalex.org/W2007778846","doi":"https://doi.org/10.1145/1735023.1735052","mag":"2007778846"},"language":"en","primary_location":{"id":"doi:10.1145/1735023.1735052","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1735023.1735052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 19th international symposium on Physical design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079596246","display_name":"Huang-Yu Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Huang-Yu Chen","raw_affiliation_strings":["National Taiwan University, Taipei 106, Taiwan Roc"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei 106, Taiwan Roc","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103185265","display_name":"Szu-Jui Chou","orcid":"https://orcid.org/0000-0003-3552-2151"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Szu-Jui Chou","raw_affiliation_strings":["National Taiwan University, Taipei 106, Taiwan Roc"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei 106, Taiwan Roc","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018371636","display_name":"Yao\u2010Wen Chang","orcid":"https://orcid.org/0000-0002-0564-5719"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yao-Wen Chang","raw_affiliation_strings":["National Taiwan University, Taipei 106, Taiwan Roc"],"affiliations":[{"raw_affiliation_string":"National Taiwan University, Taipei 106, Taiwan Roc","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5079596246"],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":1.7318,"has_fulltext":false,"cited_by_count":21,"citation_normalized_percentile":{"value":0.85227427,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"105","last_page":"111"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.6491981744766235},{"id":"https://openalex.org/keywords/density-gradient","display_name":"Density gradient","score":0.5692606568336487},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.5635966062545776},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.537116527557373},{"id":"https://openalex.org/keywords/overhead","display_name":"Overhead (engineering)","score":0.4921249747276306},{"id":"https://openalex.org/keywords/gaussian","display_name":"Gaussian","score":0.4826929569244385},{"id":"https://openalex.org/keywords/place-and-route","display_name":"Place and route","score":0.464401513338089},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.43636634945869446},{"id":"https://openalex.org/keywords/variation","display_name":"Variation (astronomy)","score":0.425019234418869},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.22998297214508057},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.17409464716911316},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.12516430020332336},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.09927013516426086}],"concepts":[{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.6491981744766235},{"id":"https://openalex.org/C2778892434","wikidata":"https://www.wikidata.org/wiki/Q1871401","display_name":"Density gradient","level":2,"score":0.5692606568336487},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.5635966062545776},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.537116527557373},{"id":"https://openalex.org/C2779960059","wikidata":"https://www.wikidata.org/wiki/Q7113681","display_name":"Overhead (engineering)","level":2,"score":0.4921249747276306},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.4826929569244385},{"id":"https://openalex.org/C127879752","wikidata":"https://www.wikidata.org/wiki/Q3390760","display_name":"Place and route","level":3,"score":0.464401513338089},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.43636634945869446},{"id":"https://openalex.org/C2778334786","wikidata":"https://www.wikidata.org/wiki/Q1586270","display_name":"Variation (astronomy)","level":2,"score":0.425019234418869},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.22998297214508057},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.17409464716911316},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12516430020332336},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.09927013516426086},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C44870925","wikidata":"https://www.wikidata.org/wiki/Q37547","display_name":"Astrophysics","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1145/1735023.1735052","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1735023.1735052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 19th international symposium on Physical design","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1537332224","https://openalex.org/W1964324435","https://openalex.org/W1975628451","https://openalex.org/W1976727896","https://openalex.org/W2016999260","https://openalex.org/W2054111428","https://openalex.org/W2135501127","https://openalex.org/W2141335436","https://openalex.org/W2160936640","https://openalex.org/W2161615290","https://openalex.org/W2178412182"],"related_works":["https://openalex.org/W2347585086","https://openalex.org/W1527953837","https://openalex.org/W2042100038","https://openalex.org/W1966596465","https://openalex.org/W3086500945","https://openalex.org/W2018850574","https://openalex.org/W2781651239","https://openalex.org/W2368367884","https://openalex.org/W2764319374","https://openalex.org/W3032934611"],"abstract_inverted_index":{"In":[0,109],"the":[1,16,43,65,79,93,102,114,121,142,169,173,179,198,204],"nanometer":[2],"IC":[3],"design,":[4],"dummy":[5,134,152],"fill":[6,165],"is":[7,73],"often":[8],"performed":[9],"to":[10,36,42,51,76,119,155,167,196],"improve":[11],"layout":[12,45],"pattern":[13,80],"uniformity":[14],"and":[15,28,32,61,124,162,201],"post-CMP":[17,103],"quality.":[18],"However,":[19],"filling":[20],"dummies":[21,171,195],"might":[22,33],"greatly":[23],"increase":[24],"interconnect":[25],"coupling":[26,66,132,205],"capacitance":[27],"thus":[29],"circuit":[30,107],"delay,":[31],"also":[34],"lead":[35],"explosion":[37],"of":[38,83,105],"mask":[39],"data":[40],"due":[41],"extra":[44],"patterns.":[46],"Traditional":[47],"dummy-fill":[48,117,139],"algorithms":[49],"try":[50],"make":[52],"each":[53,84],"tile":[54],"(window)":[55],"density":[56,59,81,87,90,94,122,130,153,157,180,199],"satisfy":[57],"foundry's":[58],"upper":[60],"lower":[62],"bounds":[63],"under":[64,203],"constraint.":[67],"As":[68],"technology":[69],"advances,":[70],"however,":[71],"it":[72],"not":[74],"sufficient":[75],"just":[77],"keep":[78],"variation":[82,202],"layer":[85],"within":[86,172],"bounds.":[88],"The":[89],"gradient,":[91],"besides":[92],"variation,":[95,131],"plays":[96],"a":[97,208],"pivotal":[98],"role":[99],"in":[100],"determining":[101],"thickness":[104],"modern":[106],"designs.":[108],"this":[110],"paper,":[111],"we":[112],"present":[113],"first":[115],"gradient-driven":[116,150],"algorithm":[118,140,187],"address":[120],"gradient":[123,158,200],"other":[125],"classical":[126],"objectives":[127],"(such":[128],"as":[129,136],"constraints,":[133],"count)":[135],"well.":[137],"Our":[138],"has":[141],"two":[143],"distinguished":[144],"features:":[145],"(1)":[146],"Gaussian":[147],"smoothing":[148],"based":[149],"multilevel":[151],"analysis":[154],"minimize":[156],"level":[159],"by":[160,192],"level,":[161],"(2)":[163],"ILP-based":[164],"synthesis":[166],"insert":[168],"fewest":[170],"coupling-violation-free":[174],"feasible":[175],"regions":[176],"while":[177],"satisfying":[178],"constraints.":[181],"Experimental":[182],"results":[183,191],"show":[184],"that":[185],"our":[186],"can":[188],"achieve":[189],"promising":[190],"inserting":[193],"minimal":[194],"reduce":[197],"constraints":[206],"with":[207],"reasonable":[209],"runtime":[210],"overhead.":[211]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}