{"id":"https://openalex.org/W2137068727","doi":"https://doi.org/10.1145/1629911.1630158","title":"A parameterized mask model for lithography simulation","display_name":"A parameterized mask model for lithography simulation","publication_year":2009,"publication_date":"2009-07-26","ids":{"openalex":"https://openalex.org/W2137068727","doi":"https://doi.org/10.1145/1629911.1630158","mag":"2137068727"},"language":"en","primary_location":{"id":"doi:10.1145/1629911.1630158","is_oa":true,"landing_page_url":"https://doi.org/10.1145/1629911.1630158","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/1629911.1630158","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 46th Annual Design Automation Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://dl.acm.org/doi/pdf/10.1145/1629911.1630158","any_repository_has_fulltext":null},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100891678","display_name":"Zhenhai Zhu","orcid":null},"institutions":[{"id":"https://openalex.org/I66217453","display_name":"Cadence Design Systems (United States)","ror":"https://ror.org/04w8xa018","country_code":"US","type":"company","lineage":["https://openalex.org/I66217453"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Zhenhai Zhu","raw_affiliation_strings":["Cadence Research Labs, Berkeley, CA","Cadence Research Laboratories, Berkeley, CA 94704, USA"],"affiliations":[{"raw_affiliation_string":"Cadence Research Labs, Berkeley, CA","institution_ids":["https://openalex.org/I66217453"]},{"raw_affiliation_string":"Cadence Research Laboratories, Berkeley, CA 94704, USA","institution_ids":["https://openalex.org/I66217453"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5100891678"],"corresponding_institution_ids":["https://openalex.org/I66217453"],"apc_list":null,"apc_paid":null,"fwci":0.2404,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.58601773,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"963","last_page":"968"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11206","display_name":"Model Reduction and Neural Networks","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3109","display_name":"Statistical and Nonlinear Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11206","display_name":"Model Reduction and Neural Networks","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3109","display_name":"Statistical and Nonlinear Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10928","display_name":"Probabilistic and Robust Engineering Design","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parameterized-complexity","display_name":"Parameterized complexity","score":0.7254981994628906},{"id":"https://openalex.org/keywords/affine-transformation","display_name":"Affine transformation","score":0.7125568985939026},{"id":"https://openalex.org/keywords/model-order-reduction","display_name":"Model order reduction","score":0.6782484650611877},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6517361402511597},{"id":"https://openalex.org/keywords/parametric-statistics","display_name":"Parametric statistics","score":0.6318705081939697},{"id":"https://openalex.org/keywords/kernel","display_name":"Kernel (algebra)","score":0.6183871030807495},{"id":"https://openalex.org/keywords/discretization","display_name":"Discretization","score":0.5822741389274597},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5807368755340576},{"id":"https://openalex.org/keywords/parametric-model","display_name":"Parametric model","score":0.5623501539230347},{"id":"https://openalex.org/keywords/reduction","display_name":"Reduction (mathematics)","score":0.5377419590950012},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4875042140483856},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.4340782165527344},{"id":"https://openalex.org/keywords/applied-mathematics","display_name":"Applied mathematics","score":0.38940685987472534},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3831617534160614},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.22810915112495422},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.18772059679031372},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.16123521327972412},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.15088868141174316},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14410662651062012},{"id":"https://openalex.org/keywords/discrete-mathematics","display_name":"Discrete mathematics","score":0.07577931880950928}],"concepts":[{"id":"https://openalex.org/C165464430","wikidata":"https://www.wikidata.org/wiki/Q1570441","display_name":"Parameterized complexity","level":2,"score":0.7254981994628906},{"id":"https://openalex.org/C92757383","wikidata":"https://www.wikidata.org/wiki/Q382497","display_name":"Affine transformation","level":2,"score":0.7125568985939026},{"id":"https://openalex.org/C2779277453","wikidata":"https://www.wikidata.org/wiki/Q12202921","display_name":"Model order reduction","level":3,"score":0.6782484650611877},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6517361402511597},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.6318705081939697},{"id":"https://openalex.org/C74193536","wikidata":"https://www.wikidata.org/wiki/Q574844","display_name":"Kernel (algebra)","level":2,"score":0.6183871030807495},{"id":"https://openalex.org/C73000952","wikidata":"https://www.wikidata.org/wiki/Q17007827","display_name":"Discretization","level":2,"score":0.5822741389274597},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5807368755340576},{"id":"https://openalex.org/C24574437","wikidata":"https://www.wikidata.org/wiki/Q7135228","display_name":"Parametric model","level":3,"score":0.5623501539230347},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.5377419590950012},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4875042140483856},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.4340782165527344},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.38940685987472534},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3831617534160614},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.22810915112495422},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.18772059679031372},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.16123521327972412},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.15088868141174316},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14410662651062012},{"id":"https://openalex.org/C118615104","wikidata":"https://www.wikidata.org/wiki/Q121416","display_name":"Discrete mathematics","level":1,"score":0.07577931880950928},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C57493831","wikidata":"https://www.wikidata.org/wiki/Q3134666","display_name":"Projection (relational algebra)","level":2,"score":0.0},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1145/1629911.1630158","is_oa":true,"landing_page_url":"https://doi.org/10.1145/1629911.1630158","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/1629911.1630158","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 46th Annual Design Automation Conference","raw_type":"proceedings-article"}],"best_oa_location":{"id":"doi:10.1145/1629911.1630158","is_oa":true,"landing_page_url":"https://doi.org/10.1145/1629911.1630158","pdf_url":"https://dl.acm.org/doi/pdf/10.1145/1629911.1630158","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 46th Annual Design Automation Conference","raw_type":"proceedings-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2137068727.pdf","grobid_xml":"https://content.openalex.org/works/W2137068727.grobid-xml"},"referenced_works_count":17,"referenced_works":["https://openalex.org/W1504642953","https://openalex.org/W1594489858","https://openalex.org/W1605773447","https://openalex.org/W1658472922","https://openalex.org/W1971871033","https://openalex.org/W2018865855","https://openalex.org/W2052690618","https://openalex.org/W2060214472","https://openalex.org/W2107818375","https://openalex.org/W2114667122","https://openalex.org/W2116444046","https://openalex.org/W2123947147","https://openalex.org/W2125556313","https://openalex.org/W2154720964","https://openalex.org/W2330331365","https://openalex.org/W2998023265","https://openalex.org/W4290864872"],"related_works":["https://openalex.org/W2051058708","https://openalex.org/W1494268238","https://openalex.org/W154868527","https://openalex.org/W1983207144","https://openalex.org/W2522856630","https://openalex.org/W4302014076","https://openalex.org/W2051787597","https://openalex.org/W2046224185","https://openalex.org/W3210125739","https://openalex.org/W2552991881"],"abstract_inverted_index":{"We":[0],"formulate":[1],"the":[2,14,19,38,48,67,83,90,95],"mask":[3,59,86,92],"modeling":[4],"as":[5],"a":[6,24,29,51,99],"parametric":[7,26,53],"model":[8,63,93],"order":[9],"reduction":[10,54],"problem":[11],"based":[12,65],"on":[13,66],"finite":[15],"element":[16],"discretization":[17],"of":[18,50],"Helmholtz":[20],"equation.":[21],"By":[22],"using":[23],"new":[25,91],"mesh":[27],"and":[28,74,104],"machine":[30],"learning":[31],"technique":[32,55],"called":[33],"Kernel":[34],"Method,":[35],"we":[36],"convert":[37],"nonlinearly":[39],"parameterized":[40],"FEM":[41],"matrices":[42],"into":[43],"affine":[44],"forms.":[45],"This":[46],"allows":[47],"application":[49],"well-understood":[52],"to":[56,97],"generate":[57],"compact":[58],"model.":[60],"Since":[61],"this":[62],"is":[64],"first":[68],"principle,":[69],"it":[70],"naturally":[71],"includes":[72],"diffraction":[73],"couplings,":[75],"important":[76],"effects":[77],"that":[78],"are":[79],"poorly":[80],"handled":[81],"by":[82],"existing":[84],"heuristic":[85],"models.":[87],"Further":[88],"more,":[89],"offers":[94],"capability":[96],"make":[98],"smooth":[100],"trade-off":[101],"between":[102],"accuracy":[103],"speed.":[105]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}