{"id":"https://openalex.org/W2164929305","doi":"https://doi.org/10.1145/1629911.1630052","title":"Provably good and practically efficient algorithms for CMP dummy fill","display_name":"Provably good and practically efficient algorithms for CMP dummy fill","publication_year":2009,"publication_date":"2009-07-26","ids":{"openalex":"https://openalex.org/W2164929305","doi":"https://doi.org/10.1145/1629911.1630052","mag":"2164929305"},"language":"en","primary_location":{"id":"doi:10.1145/1629911.1630052","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1629911.1630052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 46th Annual Design Automation Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017909520","display_name":"Chunyang Feng","orcid":"https://orcid.org/0009-0004-7497-119X"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunyang Feng","raw_affiliation_strings":["Fudan University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103038285","display_name":"Hai Zhou","orcid":"https://orcid.org/0000-0003-4824-7179"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai Zhou","raw_affiliation_strings":["Fudan University, China and Northwestern University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University, China and Northwestern University","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037328458","display_name":"Changhao Yan","orcid":"https://orcid.org/0000-0002-8936-3945"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Changhao Yan","raw_affiliation_strings":["Fudan University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062927280","display_name":"Jun Tao","orcid":"https://orcid.org/0000-0001-8742-687X"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Tao","raw_affiliation_strings":["Fudan University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064213921","display_name":"Xuan Zeng","orcid":"https://orcid.org/0000-0002-8097-4053"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuan Zeng","raw_affiliation_strings":["Fudan University, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University, China","institution_ids":["https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.1482,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.7992124,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"539","last_page":"544"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11245","display_name":"Advanced Numerical Analysis Techniques","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9797999858856201,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/heuristics","display_name":"Heuristics","score":0.7631874084472656},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6853626370429993},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.5987734794616699},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.5849770307540894},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.5350568890571594},{"id":"https://openalex.org/keywords/approximation-algorithm","display_name":"Approximation algorithm","score":0.4808862507343292},{"id":"https://openalex.org/keywords/greedy-algorithm","display_name":"Greedy algorithm","score":0.4672914147377014},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.42177045345306396},{"id":"https://openalex.org/keywords/time-complexity","display_name":"Time complexity","score":0.420889675617218},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.19180208444595337},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12682434916496277}],"concepts":[{"id":"https://openalex.org/C127705205","wikidata":"https://www.wikidata.org/wiki/Q5748245","display_name":"Heuristics","level":2,"score":0.7631874084472656},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6853626370429993},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.5987734794616699},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.5849770307540894},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.5350568890571594},{"id":"https://openalex.org/C148764684","wikidata":"https://www.wikidata.org/wiki/Q621751","display_name":"Approximation algorithm","level":2,"score":0.4808862507343292},{"id":"https://openalex.org/C51823790","wikidata":"https://www.wikidata.org/wiki/Q504353","display_name":"Greedy algorithm","level":2,"score":0.4672914147377014},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.42177045345306396},{"id":"https://openalex.org/C311688","wikidata":"https://www.wikidata.org/wiki/Q2393193","display_name":"Time complexity","level":2,"score":0.420889675617218},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.19180208444595337},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12682434916496277},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1145/1629911.1630052","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1629911.1630052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 46th Annual Design Automation Conference","raw_type":"proceedings-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.567.8052","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.567.8052","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://users.eecs.northwestern.edu/~haizhou/publications/dac09feng.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/12","score":0.46000000834465027,"display_name":"Responsible consumption and production"}],"awards":[{"id":"https://openalex.org/G1326144771","display_name":null,"funder_award_id":"2005CB321701","funder_id":"https://openalex.org/F4320321540","funder_display_name":"Ministry of Science and Technology of the People's Republic of China"},{"id":"https://openalex.org/G4726700717","display_name":null,"funder_award_id":"CCF-0238484CCF-0811270","funder_id":"https://openalex.org/F4320337387","funder_display_name":"Division of Computing and Communication Foundations"},{"id":"https://openalex.org/G6696681808","display_name":null,"funder_award_id":"8510700100","funder_id":"https://openalex.org/F4320321540","funder_display_name":"Ministry of Science and Technology of the People's Republic of China"},{"id":"https://openalex.org/G7080421446","display_name":null,"funder_award_id":"6.07E+15","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8708529866","display_name":null,"funder_award_id":"2.01E+11","funder_id":"https://openalex.org/F4320321106","funder_display_name":"Ministry of Education of the People's Republic of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321106","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934"},{"id":"https://openalex.org/F4320321540","display_name":"Ministry of Science and Technology of the People's Republic of China","ror":"https://ror.org/027s68j25"},{"id":"https://openalex.org/F4320337387","display_name":"Division of Computing and Communication Foundations","ror":"https://ror.org/01mng8331"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1530492441","https://openalex.org/W1560543304","https://openalex.org/W1949163578","https://openalex.org/W2008196589","https://openalex.org/W2022191808","https://openalex.org/W2113335196","https://openalex.org/W2132854647","https://openalex.org/W2135501127","https://openalex.org/W2142928176","https://openalex.org/W2144694699","https://openalex.org/W2159655716","https://openalex.org/W2160936640","https://openalex.org/W2162354220","https://openalex.org/W2164859698","https://openalex.org/W2165956524","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W3177062893","https://openalex.org/W3125143773","https://openalex.org/W3119129187","https://openalex.org/W2007032764","https://openalex.org/W803550684","https://openalex.org/W2483226803","https://openalex.org/W4352977312","https://openalex.org/W2041180560","https://openalex.org/W1827895227","https://openalex.org/W4285104409"],"abstract_inverted_index":{"Abstract\u2014To":[0],"reduce":[1],"chip-scale":[2],"topography":[3],"variation":[4],"in":[5,53],"Chemical":[6],"Me-chanical":[7],"Polishing":[8],"(CMP)":[9],"process,":[10],"dummy":[11,26,74],"fill":[12,27,75],"is":[13,45,78,87],"widely":[14],"used":[15],"to":[16,117],"improve":[17],"the":[18,25,37,51,55,106,133],"layout":[19],"density":[20],"uniformity.":[21],"Previous":[22],"researches":[23],"formulated":[24],"problem":[28],"as":[29],"a":[30,73,90,112],"standard":[31],"Linear":[32],"Program":[33],"(LP).":[34],"However,":[35],"solving":[36],"huge":[38],"linear":[39],"program":[40],"formed":[41],"by":[42,96],"real-life":[43],"designs":[44],"very":[46],"expensive":[47],"and":[48,81,135],"has":[49],"become":[50],"hurdle":[52],"deploying":[54],"technology.":[56],"Even":[57],"though":[58],"there":[59],"exist":[60],"efficient":[61,80],"heuristics,":[62],"their":[63],"performance":[64],"cannot":[65],"be":[66],"guaranteed.":[67],"In":[68],"this":[69],"paper,":[70],"we":[71,109],"develop":[72],"algorithm":[76,116],"that":[77],"both":[79],"with":[82],"provably":[83],"good":[84],"performance.":[85],"It":[86],"based":[88,104,127],"on":[89,105],"fully":[91],"polynomial":[92],"time":[93],"approximation":[94,107],"scheme":[95],"Fleischer":[97],"[4]":[98],"for":[99],"covering":[100],"LP":[101],"problems.":[102],"Furthermore,":[103],"algorithm,":[108],"also":[110],"propose":[111],"new":[113],"greedy":[114],"iterative":[115],"achieve":[118],"high":[119],"quality":[120],"solutions":[121],"more":[122],"efficiently":[123],"than":[124],"previous":[125],"Monte-Carlo":[126],"heuristic":[128],"methods.":[129],"Experimental":[130],"results":[131],"demonstrate":[132],"effectiveness":[134],"efficiency":[136],"of":[137],"our":[138],"algorithms.":[139]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}