{"id":"https://openalex.org/W2133384380","doi":"https://doi.org/10.1145/1120725.1120836","title":"CMP aware shuttle mask floorplanning","display_name":"CMP aware shuttle mask floorplanning","publication_year":2005,"publication_date":"2005-01-01","ids":{"openalex":"https://openalex.org/W2133384380","doi":"https://doi.org/10.1145/1120725.1120836","mag":"2133384380"},"language":"en","primary_location":{"id":"doi:10.1145/1120725.1120836","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1120725.1120836","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005 conference on Asia South Pacific design automation  - ASP-DAC '05","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102827878","display_name":"Gang Xu","orcid":"https://orcid.org/0000-0002-1071-6577"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Gang Xu","raw_affiliation_strings":["University of Texas at Austin, Austin, TX","Dept. of CS, Texas Univ., Austin, TX, USA"],"affiliations":[{"raw_affiliation_string":"University of Texas at Austin, Austin, TX","institution_ids":["https://openalex.org/I86519309"]},{"raw_affiliation_string":"Dept. of CS, Texas Univ., Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015812756","display_name":"Ruiqi Tian","orcid":"https://orcid.org/0000-0002-2302-6196"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ruiqi Tian","raw_affiliation_strings":["Freescale Semiconductor, Austin, TX"],"affiliations":[{"raw_affiliation_string":"Freescale Semiconductor, Austin, TX","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["University of Texas at Austin, Austin, TX","Univ. of Texas at Austin, Austin TX"],"affiliations":[{"raw_affiliation_string":"University of Texas at Austin, Austin, TX","institution_ids":["https://openalex.org/I86519309"]},{"raw_affiliation_string":"Univ. of Texas at Austin, Austin TX","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053378706","display_name":"Martin D. F. Wong","orcid":"https://orcid.org/0000-0001-8274-9688"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Martin D. F. Wong","raw_affiliation_strings":["University of Illinois at, Urbana Champaign, Urbana, IL","[University of Illinois at Urbana-Champaign,Urbana,IL]"],"affiliations":[{"raw_affiliation_string":"University of Illinois at, Urbana Champaign, Urbana, IL","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"[University of Illinois at Urbana-Champaign,Urbana,IL]","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5102827878"],"corresponding_institution_ids":["https://openalex.org/I86519309"],"apc_list":null,"apc_paid":null,"fwci":4.2682,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.94228241,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1111","last_page":"1111"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9936000108718872,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/floorplan","display_name":"Floorplan","score":0.8564903736114502},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5925843715667725},{"id":"https://openalex.org/keywords/environmental-science","display_name":"Environmental science","score":0.36858680844306946},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.29358285665512085}],"concepts":[{"id":"https://openalex.org/C130145326","wikidata":"https://www.wikidata.org/wiki/Q1553985","display_name":"Floorplan","level":2,"score":0.8564903736114502},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5925843715667725},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.36858680844306946},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.29358285665512085}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1145/1120725.1120836","is_oa":false,"landing_page_url":"https://doi.org/10.1145/1120725.1120836","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005 conference on Asia South Pacific design automation  - ASP-DAC '05","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.6499999761581421,"display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1798470167","https://openalex.org/W1970369321","https://openalex.org/W2055396352","https://openalex.org/W2067035452","https://openalex.org/W2084399796","https://openalex.org/W2092362792","https://openalex.org/W2094042791","https://openalex.org/W2104767888","https://openalex.org/W2113350263","https://openalex.org/W2123131789","https://openalex.org/W2142928176","https://openalex.org/W2164920631"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2055008360","https://openalex.org/W1500063550","https://openalex.org/W215057456","https://openalex.org/W2135118255","https://openalex.org/W2165891825","https://openalex.org/W2106366463","https://openalex.org/W2043725682","https://openalex.org/W2103370420"],"abstract_inverted_index":{"By":[0],"putting":[1],"different":[2],"chips":[3,40],"on":[4,144],"the":[5,27,56,88,93,101,107,127],"same":[6],"mask,":[7],"shuttle":[8,61],"mask":[9,29,62],"(or":[10],"multiple":[11],"project":[12],"wafer)":[13],"provides":[14],"an":[15],"economical":[16],"solution":[17],"for":[18],"low":[19],"volume":[20],"designs":[21],"and":[22,44,49,76],"design":[23],"prototypes":[24],"to":[25,36,42,47,86,99,105],"share":[26],"rising":[28],"cost.":[30],"A":[31],"challenging":[32],"floorplanning":[33],"problem":[34,57,71],"is":[35,65,112],"optimally":[37],"pack":[38],"these":[39],"according":[41],"objectives":[43,73],"constraints":[45],"related":[46],"cost":[48],"manufacturability.":[50],"In":[51],"this":[52],"paper,":[53],"we":[54,91,125],"study":[55],"of":[58,74,130],"CMP":[59,97],"aware":[60],"floorplanning,":[63],"which":[64],"formulated":[66],"as":[67],"a":[68,83,135],"rectangle":[69],"packing":[70],"with":[72,134],"area":[75],"post-CMP":[77],"topography":[78,108],"variation":[79],"minimization.":[80],"We":[81],"propose":[82],"3-step":[84],"procedure":[85],"solve":[87],"problem.":[89],"First,":[90],"use":[92],"low-pass":[94],"filter":[95],"oxide":[96],"model":[98],"guide":[100],"simulated":[102],"annealing":[103],"search":[104],"minimize":[106],"variation.":[109],"The":[110],"result":[111],"then":[113],"further":[114],"improved":[115],"by":[116],"sliding":[117],"each":[118],"chip":[119],"in":[120],"its":[121],"enclosing":[122],"rectangle.":[123],"Finally,":[124],"calculate":[126],"optimal":[128],"amount":[129],"dummy":[131],"feature":[132],"needed":[133],"linear":[136],"programming":[137],"method.":[138],"Our":[139],"experiment":[140],"show":[141],"excellent":[142],"results":[143],"real":[145],"industry":[146],"data.":[147]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}