{"id":"https://openalex.org/W2046674243","doi":"https://doi.org/10.1142/s1465876303001289","title":"DEVELOPMENT AND COMPARISON OF MICROMACHINED INDUCTORS FOR RF APPLICATIONS","display_name":"DEVELOPMENT AND COMPARISON OF MICROMACHINED INDUCTORS FOR RF APPLICATIONS","publication_year":2003,"publication_date":"2003-06-01","ids":{"openalex":"https://openalex.org/W2046674243","doi":"https://doi.org/10.1142/s1465876303001289","mag":"2046674243"},"language":"en","primary_location":{"id":"doi:10.1142/s1465876303001289","is_oa":false,"landing_page_url":"https://doi.org/10.1142/s1465876303001289","pdf_url":null,"source":{"id":"https://openalex.org/S107240834","display_name":"International Journal of Computational Engineering Science","issn_l":"1465-8763","issn":["1465-8763","2047-6086"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310311754","host_organization_name":"Imperial College Press","host_organization_lineage":["https://openalex.org/P4310311754"],"host_organization_lineage_names":["Imperial College Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Computational Engineering Science","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003400196","display_name":"Jianbo Sun","orcid":"https://orcid.org/0000-0001-9741-8726"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"JIANBO SUN","raw_affiliation_strings":["Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113521751","display_name":"Jianmin Miao","orcid":null},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"JIANMIN MIAO","raw_affiliation_strings":["Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100861629","display_name":"Tietun Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"TIETUN SUN","raw_affiliation_strings":["Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052109054","display_name":"Hong Zhu","orcid":"https://orcid.org/0000-0001-7919-5661"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"HONG ZHU","raw_affiliation_strings":["Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micromachines Center, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I172675005"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.143906,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"04","issue":"02","first_page":"363","last_page":"367"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6866981983184814},{"id":"https://openalex.org/keywords/inductor","display_name":"Inductor","score":0.6147068738937378},{"id":"https://openalex.org/keywords/engineering-physics","display_name":"Engineering physics","score":0.5780413746833801},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.5680800676345825},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.5037574172019958},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4921683669090271},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4876903295516968},{"id":"https://openalex.org/keywords/equivalent-series-resistance","display_name":"Equivalent series resistance","score":0.48491889238357544},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.45943683385849},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.42511290311813354},{"id":"https://openalex.org/keywords/electroplating","display_name":"Electroplating","score":0.4230496883392334},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35875511169433594},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31249478459358215},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.2862834334373474},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.2682965397834778},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18907177448272705},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18318015336990356},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.09730613231658936}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6866981983184814},{"id":"https://openalex.org/C144534570","wikidata":"https://www.wikidata.org/wiki/Q5325","display_name":"Inductor","level":3,"score":0.6147068738937378},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.5780413746833801},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5680800676345825},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.5037574172019958},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4921683669090271},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4876903295516968},{"id":"https://openalex.org/C14485415","wikidata":"https://www.wikidata.org/wiki/Q5384730","display_name":"Equivalent series resistance","level":3,"score":0.48491889238357544},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45943683385849},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.42511290311813354},{"id":"https://openalex.org/C51807945","wikidata":"https://www.wikidata.org/wiki/Q3503392","display_name":"Electroplating","level":3,"score":0.4230496883392334},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35875511169433594},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31249478459358215},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.2862834334373474},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.2682965397834778},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18907177448272705},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18318015336990356},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.09730613231658936},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1142/s1465876303001289","is_oa":false,"landing_page_url":"https://doi.org/10.1142/s1465876303001289","pdf_url":null,"source":{"id":"https://openalex.org/S107240834","display_name":"International Journal of Computational Engineering Science","issn_l":"1465-8763","issn":["1465-8763","2047-6086"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310311754","host_organization_name":"Imperial College Press","host_organization_lineage":["https://openalex.org/P4310311754"],"host_organization_lineage_names":["Imperial College Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Computational Engineering Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.5899999737739563}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2100304920","https://openalex.org/W2129753094","https://openalex.org/W2142640275","https://openalex.org/W4243660927","https://openalex.org/W4256650126"],"related_works":["https://openalex.org/W1970639697","https://openalex.org/W3036421215","https://openalex.org/W2101324558","https://openalex.org/W3148043136","https://openalex.org/W2142565038","https://openalex.org/W1933793995","https://openalex.org/W4252668482","https://openalex.org/W4387490263","https://openalex.org/W4312846065","https://openalex.org/W2169859991"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}