{"id":"https://openalex.org/W2085388621","doi":"https://doi.org/10.1142/s1465876303001174","title":"STUDY ON FEATURE OF SILICON MICROTRENCHES WITH A MULTIPLEXED INDUCTIVELY COUPLED PLASMA ETCHER","display_name":"STUDY ON FEATURE OF SILICON MICROTRENCHES WITH A MULTIPLEXED INDUCTIVELY COUPLED PLASMA ETCHER","publication_year":2003,"publication_date":"2003-06-01","ids":{"openalex":"https://openalex.org/W2085388621","doi":"https://doi.org/10.1142/s1465876303001174","mag":"2085388621"},"language":"en","primary_location":{"id":"doi:10.1142/s1465876303001174","is_oa":false,"landing_page_url":"https://doi.org/10.1142/s1465876303001174","pdf_url":null,"source":{"id":"https://openalex.org/S107240834","display_name":"International Journal of Computational Engineering Science","issn_l":"1465-8763","issn":["1465-8763","2047-6086"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310311754","host_organization_name":"Imperial College Press","host_organization_lineage":["https://openalex.org/P4310311754"],"host_organization_lineage_names":["Imperial College Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Computational Engineering Science","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100861629","display_name":"Tietun Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"TIETUN SUN","raw_affiliation_strings":["School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113521751","display_name":"Jianmin Miao","orcid":null},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"JIANMIN MIAO","raw_affiliation_strings":["School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044873149","display_name":"Hongtao Zhu","orcid":"https://orcid.org/0000-0003-1405-7828"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"HONG ZHU","raw_affiliation_strings":["School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000638496","display_name":"Ciprian Iliescu","orcid":"https://orcid.org/0000-0001-7042-5248"},"institutions":[{"id":"https://openalex.org/I4210113188","display_name":"Institute of Bioengineering and Nanotechnology","ror":"https://ror.org/022xyn875","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I2801752549","https://openalex.org/I4210113188"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"CIPRIAN ILIESCU","raw_affiliation_strings":["Institute of Bioengineering and Nanotechnology,  51 Science Park Road, The Aries, Singapore 117586, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bioengineering and Nanotechnology,  51 Science Park Road, The Aries, Singapore 117586, Singapore","institution_ids":["https://openalex.org/I4210113188"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003400196","display_name":"Jianbo Sun","orcid":"https://orcid.org/0000-0001-9741-8726"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"J. B. SUN","raw_affiliation_strings":["School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of M. P. E, Nanyang Technological University,  50 Nanyang Avenue, Singapore 639798, Singapore","institution_ids":["https://openalex.org/I172675005"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.15867313,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"04","issue":"02","first_page":"319","last_page":"322"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inductively-coupled-plasma","display_name":"Inductively coupled plasma","score":0.7879723310470581},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5844333171844482},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5756045579910278},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.5195969939231873},{"id":"https://openalex.org/keywords/inductively-coupled-plasma-atomic-emission-spectroscopy","display_name":"Inductively coupled plasma atomic emission spectroscopy","score":0.47722581028938293},{"id":"https://openalex.org/keywords/inductively-coupled-plasma-mass-spectrometry","display_name":"Inductively coupled plasma mass spectrometry","score":0.43299806118011475},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42848700284957886},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3535439372062683},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1541343629360199},{"id":"https://openalex.org/keywords/mass-spectrometry","display_name":"Mass spectrometry","score":0.0905153751373291},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.07809913158416748},{"id":"https://openalex.org/keywords/nuclear-physics","display_name":"Nuclear physics","score":0.05783495306968689}],"concepts":[{"id":"https://openalex.org/C95974651","wikidata":"https://www.wikidata.org/wiki/Q2454436","display_name":"Inductively coupled plasma","level":3,"score":0.7879723310470581},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5844333171844482},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5756045579910278},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5195969939231873},{"id":"https://openalex.org/C196009443","wikidata":"https://www.wikidata.org/wiki/Q261552","display_name":"Inductively coupled plasma atomic emission spectroscopy","level":4,"score":0.47722581028938293},{"id":"https://openalex.org/C165697059","wikidata":"https://www.wikidata.org/wiki/Q900680","display_name":"Inductively coupled plasma mass spectrometry","level":3,"score":0.43299806118011475},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42848700284957886},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3535439372062683},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1541343629360199},{"id":"https://openalex.org/C162356407","wikidata":"https://www.wikidata.org/wiki/Q180809","display_name":"Mass spectrometry","level":2,"score":0.0905153751373291},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.07809913158416748},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.05783495306968689}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1142/s1465876303001174","is_oa":false,"landing_page_url":"https://doi.org/10.1142/s1465876303001174","pdf_url":null,"source":{"id":"https://openalex.org/S107240834","display_name":"International Journal of Computational Engineering Science","issn_l":"1465-8763","issn":["1465-8763","2047-6086"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310311754","host_organization_name":"Imperial College Press","host_organization_lineage":["https://openalex.org/P4310311754"],"host_organization_lineage_names":["Imperial College Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Computational Engineering Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.6000000238418579}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2137178805","https://openalex.org/W2888782157"],"related_works":["https://openalex.org/W2351985390","https://openalex.org/W2806547556","https://openalex.org/W4200077207","https://openalex.org/W2243189255","https://openalex.org/W2317482776","https://openalex.org/W4233091998","https://openalex.org/W4298257957","https://openalex.org/W4231007040","https://openalex.org/W2092721245","https://openalex.org/W2923955154"],"abstract_inverted_index":null,"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}