{"id":"https://openalex.org/W2270669662","doi":"https://doi.org/10.1137/140991868","title":"A Variational Approach to the Inverse Photolithography Problem","display_name":"A Variational Approach to the Inverse Photolithography Problem","publication_year":2016,"publication_date":"2016-01-01","ids":{"openalex":"https://openalex.org/W2270669662","doi":"https://doi.org/10.1137/140991868","mag":"2270669662"},"language":"en","primary_location":{"id":"doi:10.1137/140991868","is_oa":false,"landing_page_url":"https://doi.org/10.1137/140991868","pdf_url":null,"source":{"id":"https://openalex.org/S77200987","display_name":"SIAM Journal on Applied Mathematics","issn_l":"0036-1399","issn":["0036-1399","1095-712X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320508","host_organization_name":"Society for Industrial and Applied Mathematics","host_organization_lineage":["https://openalex.org/P4310320508"],"host_organization_lineage_names":["Society for Industrial and Applied Mathematics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SIAM Journal on Applied Mathematics","raw_type":"journal-article"},"type":"article","indexed_in":["arxiv","crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/1410.4463","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073191254","display_name":"Luca Rondi","orcid":"https://orcid.org/0000-0002-8107-2983"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Luca Rondi","raw_affiliation_strings":["Dipartimento di Matematica e Geoscienze, Universit\u00e0 degli Studi di Trieste, via Valerio, 12/1, 34127 Trieste, Italy"],"affiliations":[{"raw_affiliation_string":"Dipartimento di Matematica e Geoscienze, Universit\u00e0 degli Studi di Trieste, via Valerio, 12/1, 34127 Trieste, Italy","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033911917","display_name":"Fadil Santosa","orcid":"https://orcid.org/0000-0002-0580-7079"},"institutions":[{"id":"https://openalex.org/I130238516","display_name":"University of Minnesota","ror":"https://ror.org/017zqws13","country_code":"US","type":"education","lineage":["https://openalex.org/I130238516"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Fadil Santosa","raw_affiliation_strings":["School of Mathematics, University of Minnesota, 127 Vincent Hall, 206 Church St. SE, Minneapolis, MN 55455, USA"],"affiliations":[{"raw_affiliation_string":"School of Mathematics, University of Minnesota, 127 Vincent Hall, 206 Church St. SE, Minneapolis, MN 55455, USA","institution_ids":["https://openalex.org/I130238516"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5008727951","display_name":"Zhu Wang","orcid":"https://orcid.org/0000-0002-7821-8574"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhu Wang","raw_affiliation_strings":["Department of Mathematics, University of South Carolina, 426 LeConte College, 1523 Greene Street, Columbia, SC 29208, USA"],"affiliations":[{"raw_affiliation_string":"Department of Mathematics, University of South Carolina, 426 LeConte College, 1523 Greene Street, Columbia, SC 29208, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5073191254"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00340248,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"76","issue":"1","first_page":"110","last_page":"137"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11245","display_name":"Advanced Numerical Analysis Techniques","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.9455413818359375},{"id":"https://openalex.org/keywords/regularization","display_name":"Regularization (linguistics)","score":0.6228236556053162},{"id":"https://openalex.org/keywords/inverse","display_name":"Inverse","score":0.6189176440238953},{"id":"https://openalex.org/keywords/thresholding","display_name":"Thresholding","score":0.5863803625106812},{"id":"https://openalex.org/keywords/novelty","display_name":"Novelty","score":0.5004405975341797},{"id":"https://openalex.org/keywords/inverse-problem","display_name":"Inverse problem","score":0.4783180058002472},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4594671428203583},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.41290971636772156},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.37143561244010925},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3284080922603607},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.24015659093856812},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2022494077682495},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.18338146805763245},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.10194602608680725},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.07849869132041931},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.06374496221542358}],"concepts":[{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.9455413818359375},{"id":"https://openalex.org/C2776135515","wikidata":"https://www.wikidata.org/wiki/Q17143721","display_name":"Regularization (linguistics)","level":2,"score":0.6228236556053162},{"id":"https://openalex.org/C207467116","wikidata":"https://www.wikidata.org/wiki/Q4385666","display_name":"Inverse","level":2,"score":0.6189176440238953},{"id":"https://openalex.org/C191178318","wikidata":"https://www.wikidata.org/wiki/Q2256906","display_name":"Thresholding","level":3,"score":0.5863803625106812},{"id":"https://openalex.org/C2778738651","wikidata":"https://www.wikidata.org/wiki/Q16546687","display_name":"Novelty","level":2,"score":0.5004405975341797},{"id":"https://openalex.org/C135252773","wikidata":"https://www.wikidata.org/wiki/Q1567213","display_name":"Inverse problem","level":2,"score":0.4783180058002472},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4594671428203583},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.41290971636772156},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.37143561244010925},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3284080922603607},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.24015659093856812},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2022494077682495},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.18338146805763245},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.10194602608680725},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.07849869132041931},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.06374496221542358},{"id":"https://openalex.org/C27206212","wikidata":"https://www.wikidata.org/wiki/Q34178","display_name":"Theology","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1137/140991868","is_oa":false,"landing_page_url":"https://doi.org/10.1137/140991868","pdf_url":null,"source":{"id":"https://openalex.org/S77200987","display_name":"SIAM Journal on Applied Mathematics","issn_l":"0036-1399","issn":["0036-1399","1095-712X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320508","host_organization_name":"Society for Industrial and Applied Mathematics","host_organization_lineage":["https://openalex.org/P4310320508"],"host_organization_lineage_names":["Society for Industrial and Applied Mathematics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SIAM Journal on Applied Mathematics","raw_type":"journal-article"},{"id":"pmh:oai:arXiv.org:1410.4463","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1410.4463","pdf_url":"https://arxiv.org/pdf/1410.4463","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"pmh:oai:air.unimi.it:2434/597734","is_oa":true,"landing_page_url":"http://hdl.handle.net/2434/597734","pdf_url":null,"source":{"id":"https://openalex.org/S4306400516","display_name":"Archivio Istituzionale della Ricerca (Universita Degli Studi Di Milano)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I189158943","host_organization_name":"University of Milan","host_organization_lineage":["https://openalex.org/I189158943"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:arts.units.it:11368/2860013","is_oa":false,"landing_page_url":"http://www.siam.org/journals/siap/76-1/99186.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400480","display_name":"ArTS Archivio della ricerca di Trieste (University of Trieste https://www.units.it/)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I142444530","host_organization_name":"University of Trieste","host_organization_lineage":["https://openalex.org/I142444530"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:1410.4463","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1410.4463","pdf_url":"https://arxiv.org/pdf/1410.4463","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[{"display_name":"Sustainable cities and communities","score":0.5099999904632568,"id":"https://metadata.un.org/sdg/11"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W656727543","https://openalex.org/W1480714962","https://openalex.org/W1514655958","https://openalex.org/W1596056153","https://openalex.org/W1931821121","https://openalex.org/W1973654887","https://openalex.org/W1983385832","https://openalex.org/W1990541396","https://openalex.org/W2113173089","https://openalex.org/W2129996279","https://openalex.org/W3101586995"],"related_works":["https://openalex.org/W1829060647","https://openalex.org/W1965977581","https://openalex.org/W2061980133","https://openalex.org/W2077506191","https://openalex.org/W2387685679","https://openalex.org/W2050855072","https://openalex.org/W4298004047","https://openalex.org/W3134728064","https://openalex.org/W2374214022","https://openalex.org/W2347781941"],"abstract_inverted_index":{"Photolithography":[0],"is":[1,14,35,46,52,76,94],"a":[2,12,22,32,56,67],"process":[3],"in":[4,10,73,86,96],"the":[5,27,38,49,77,82,92],"production":[6],"of":[7,30,60,91],"integrated":[8],"circuits":[9],"which":[11,45],"mask":[13,39],"used":[15],"to":[16,48],"create":[17],"an":[18,42],"exposed":[19,43],"pattern":[20,34,44],"with":[21],"desired":[23,33,50],"geometric":[24],"shape.":[25],"In":[26],"inverse":[28],"problem":[29,64],"photolithography,":[31],"given":[36],"and":[37,65],"that":[40,80],"produces":[41],"close":[47],"one":[51],"sought.":[53],"We":[54],"propose":[55],"variational":[57],"approach":[58],"formulation":[59],"this":[61,74],"shape":[62],"design":[63],"introduce":[66],"regularization":[68,78],"strategy.":[69],"The":[70,89],"main":[71],"novelty":[72],"work":[75],"term":[79],"makes":[81],"thresholding":[83],"operation":[84],"involved":[85],"photolithography":[87],"stable.":[88],"potential":[90],"method":[93],"demonstrated":[95],"numerical":[97],"experiments.":[98]},"counts_by_year":[],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}