{"id":"https://openalex.org/W2044001825","doi":"https://doi.org/10.1117/1.1762518","title":"Content based segmentation of patterned wafers","display_name":"Content based segmentation of patterned wafers","publication_year":2004,"publication_date":"2004-07-01","ids":{"openalex":"https://openalex.org/W2044001825","doi":"https://doi.org/10.1117/1.1762518","mag":"2044001825"},"language":"en","primary_location":{"id":"doi:10.1117/1.1762518","is_oa":false,"landing_page_url":"https://doi.org/10.1117/1.1762518","pdf_url":null,"source":{"id":"https://openalex.org/S158511090","display_name":"Journal of Electronic Imaging","issn_l":"1017-9909","issn":["1017-9909","1560-229X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Electronic Imaging","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Fabrice Meriaudeau","orcid":null},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]},{"id":"https://openalex.org/I177064439","display_name":"Universit\u00e9 de Bourgogne","ror":"https://ror.org/03k1bsr36","country_code":"FR","type":"education","lineage":["https://openalex.org/I177064439"]}],"countries":["FR","US"],"is_corresponding":true,"raw_author_name":"Fabrice Meriaudeau","raw_affiliation_strings":["Univ. de Bourgogne (France)","Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6011","University of Burgundy, Le2i Laboratory, 12 rue de la fonderie, 71200 Le Creusot, France"],"affiliations":[{"raw_affiliation_string":"Univ. de Bourgogne (France)","institution_ids":["https://openalex.org/I177064439"]},{"raw_affiliation_string":"Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6011","institution_ids":["https://openalex.org/I1289243028"]},{"raw_affiliation_string":"University of Burgundy, Le2i Laboratory, 12 rue de la fonderie, 71200 Le Creusot, France","institution_ids":["https://openalex.org/I177064439"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I1289243028","https://openalex.org/I177064439"],"apc_list":null,"apc_paid":null,"fwci":2.5442,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.8920443,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"13","issue":"3","first_page":"428","last_page":"428"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12549","display_name":"Image and Object Detection Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/segmentation","display_name":"Segmentation","score":0.8229622840881348},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.7507332563400269},{"id":"https://openalex.org/keywords/image-segmentation","display_name":"Image segmentation","score":0.6553650498390198},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6423391103744507},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6235147714614868},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.6212487816810608},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.516172468662262},{"id":"https://openalex.org/keywords/image-texture","display_name":"Image texture","score":0.4619237780570984},{"id":"https://openalex.org/keywords/classifier","display_name":"Classifier (UML)","score":0.4612170457839966},{"id":"https://openalex.org/keywords/scale-space-segmentation","display_name":"Scale-space segmentation","score":0.43230724334716797},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2353525161743164},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.09944352507591248}],"concepts":[{"id":"https://openalex.org/C89600930","wikidata":"https://www.wikidata.org/wiki/Q1423946","display_name":"Segmentation","level":2,"score":0.8229622840881348},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.7507332563400269},{"id":"https://openalex.org/C124504099","wikidata":"https://www.wikidata.org/wiki/Q56933","display_name":"Image segmentation","level":3,"score":0.6553650498390198},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6423391103744507},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6235147714614868},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.6212487816810608},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.516172468662262},{"id":"https://openalex.org/C63099799","wikidata":"https://www.wikidata.org/wiki/Q17147001","display_name":"Image texture","level":4,"score":0.4619237780570984},{"id":"https://openalex.org/C95623464","wikidata":"https://www.wikidata.org/wiki/Q1096149","display_name":"Classifier (UML)","level":2,"score":0.4612170457839966},{"id":"https://openalex.org/C65885262","wikidata":"https://www.wikidata.org/wiki/Q7429708","display_name":"Scale-space segmentation","level":4,"score":0.43230724334716797},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2353525161743164},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09944352507591248}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/1.1762518","is_oa":false,"landing_page_url":"https://doi.org/10.1117/1.1762518","pdf_url":null,"source":{"id":"https://openalex.org/S158511090","display_name":"Journal of Electronic Imaging","issn_l":"1017-9909","issn":["1017-9909","1560-229X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Electronic Imaging","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W657108430","https://openalex.org/W1558659784","https://openalex.org/W1594494252","https://openalex.org/W1980780785","https://openalex.org/W1982734844","https://openalex.org/W1984990385","https://openalex.org/W2000348481","https://openalex.org/W2001282003","https://openalex.org/W2057557187","https://openalex.org/W2100860054","https://openalex.org/W2116988482","https://openalex.org/W2159205782","https://openalex.org/W2502894514","https://openalex.org/W4251564091","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W4360784979","https://openalex.org/W2204605857","https://openalex.org/W3017192027","https://openalex.org/W1996489018","https://openalex.org/W2007664797","https://openalex.org/W2120981610","https://openalex.org/W3196005494","https://openalex.org/W2131637713","https://openalex.org/W2069318476","https://openalex.org/W2093085045"],"abstract_inverted_index":{"We":[0,106],"extend":[1],"our":[2],"previous":[3],"work":[4],"on":[5,12,21,30,37,92],"the":[6,17,31,34,44,57,68,71,93,97,100,104,123,128],"image":[7],"segmentation":[8,75,129],"of":[9,33,49,54,56,99,118],"electronic":[10],"structures":[11],"patterned":[13],"wafers":[14],"to":[15,67,78,110,126],"improve":[16,127],"defect":[18],"detection":[19],"process":[20],"optical":[22],"inspection":[23,27],"tools.":[24],"Die-to-die":[25],"wafer":[26],"is":[28,76],"based":[29],"comparison":[32],"same":[35,72],"area":[36,53],"two":[38],"neighboring":[39],"dies.":[40,58],"The":[41,59],"dissimilarities":[42],"between":[43],"images":[45],"are":[46],"a":[47,80,108,115],"result":[48],"defects":[50],"in":[51,87],"this":[52],"one":[55,65],"noise":[60],"level":[61],"can":[62,95],"vary":[63],"from":[64],"structure":[66],"other,":[69],"within":[70],"image.":[73],"Therefore,":[74],"required":[77],"create":[79],"mask":[81],"and":[82,121],"apply":[83],"an":[84],"optimal":[85],"threshold":[86],"each":[88],"region.":[89],"Contrast":[90],"variation":[91],"texture":[94],"affect":[96],"response":[98],"parameters":[101],"used":[102],"for":[103],"segmentation.":[105],"show":[107],"method":[109],"anticipate":[111],"these":[112],"variations":[113],"with":[114],"limited":[116],"number":[117],"training":[119],"samples,":[120],"modify":[122],"classifier":[124],"accordingly":[125],"results.":[130]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-03-25T23:56:10.502304","created_date":"2016-06-24T00:00:00"}