{"id":"https://openalex.org/W4401880226","doi":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631318","title":"Unveiling Cryogenic Performance (4 to 300 K) Towards Ultra-Thin Ferroelectric HZO: Novel Kinetic Barrier Engineering and Underlying Mechanism","display_name":"Unveiling Cryogenic Performance (4 to 300 K) Towards Ultra-Thin Ferroelectric HZO: Novel Kinetic Barrier Engineering and Underlying Mechanism","publication_year":2024,"publication_date":"2024-06-16","ids":{"openalex":"https://openalex.org/W4401880226","doi":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631318"},"language":"en","primary_location":{"id":"doi:10.1109/vlsitechnologyandcir46783.2024.10631318","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631318","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100366092","display_name":"Dong Zhang","orcid":"https://orcid.org/0000-0002-0821-5538"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"Dong Zhang","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102499359","display_name":"Yang Feng","orcid":null},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yang Feng","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000856188","display_name":"Zijie Zheng","orcid":"https://orcid.org/0000-0001-8265-6019"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Zijie Zheng","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100729874","display_name":"Chen Sun","orcid":"https://orcid.org/0000-0001-5695-7803"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Chen Sun","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050799754","display_name":"Qiwen Kong","orcid":"https://orcid.org/0000-0002-8092-6959"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Qiwen Kong","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100726357","display_name":"Gan Liu","orcid":"https://orcid.org/0000-0002-6165-3799"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Gan Liu","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086756993","display_name":"Zuopu Zhou","orcid":"https://orcid.org/0000-0003-4812-8524"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Zuopu Zhou","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000688694","display_name":"Gengchiau Liang","orcid":"https://orcid.org/0000-0002-9354-6509"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Gengchiau Liang","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075633314","display_name":"Kai Ni","orcid":"https://orcid.org/0000-0002-3628-3431"},"institutions":[{"id":"https://openalex.org/I107639228","display_name":"University of Notre Dame","ror":"https://ror.org/00mkhxb43","country_code":"US","type":"education","lineage":["https://openalex.org/I107639228"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kai Ni","raw_affiliation_strings":["University of Notre Dame,IN,USA"],"affiliations":[{"raw_affiliation_string":"University of Notre Dame,IN,USA","institution_ids":["https://openalex.org/I107639228"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089119173","display_name":"Jixuan Wu","orcid":"https://orcid.org/0000-0002-3207-9724"},"institutions":[{"id":"https://openalex.org/I154099455","display_name":"Shandong University","ror":"https://ror.org/0207yh398","country_code":"CN","type":"education","lineage":["https://openalex.org/I154099455"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jixuan Wu","raw_affiliation_strings":["School of Information Science and Engineering, Shandong University,Qinzdao,China"],"affiliations":[{"raw_affiliation_string":"School of Information Science and Engineering, Shandong University,Qinzdao,China","institution_ids":["https://openalex.org/I154099455"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035943534","display_name":"Jiezhi Chen","orcid":"https://orcid.org/0000-0003-2996-1406"},"institutions":[{"id":"https://openalex.org/I154099455","display_name":"Shandong University","ror":"https://ror.org/0207yh398","country_code":"CN","type":"education","lineage":["https://openalex.org/I154099455"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiezhi Chen","raw_affiliation_strings":["School of Information Science and Engineering, Shandong University,Qinzdao,China"],"affiliations":[{"raw_affiliation_string":"School of Information Science and Engineering, Shandong University,Qinzdao,China","institution_ids":["https://openalex.org/I154099455"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112752921","display_name":"Xiao Gong","orcid":null},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Xiao Gong","raw_affiliation_strings":["National University of Singapore,ECE,Singapore,Singapore"],"affiliations":[{"raw_affiliation_string":"National University of Singapore,ECE,Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":12,"corresponding_author_ids":["https://openalex.org/A5100366092"],"corresponding_institution_ids":["https://openalex.org/I165932596"],"apc_list":null,"apc_paid":null,"fwci":3.8996,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.94457963,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.973800003528595,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12557","display_name":"Inorganic Chemistry and Materials","score":0.9652000069618225,"subfield":{"id":"https://openalex.org/subfields/1604","display_name":"Inorganic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.7520217895507812},{"id":"https://openalex.org/keywords/mechanism","display_name":"Mechanism (biology)","score":0.7237756848335266},{"id":"https://openalex.org/keywords/kinetic-energy","display_name":"Kinetic energy","score":0.6764320731163025},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5518704652786255},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5404072999954224},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.4363478422164917},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.36551573872566223},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.29443681240081787},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26794004440307617},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.09103280305862427},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.07852178812026978}],"concepts":[{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.7520217895507812},{"id":"https://openalex.org/C89611455","wikidata":"https://www.wikidata.org/wiki/Q6804646","display_name":"Mechanism (biology)","level":2,"score":0.7237756848335266},{"id":"https://openalex.org/C135889238","wikidata":"https://www.wikidata.org/wiki/Q46276","display_name":"Kinetic energy","level":2,"score":0.6764320731163025},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5518704652786255},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5404072999954224},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4363478422164917},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.36551573872566223},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29443681240081787},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26794004440307617},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.09103280305862427},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.07852178812026978}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsitechnologyandcir46783.2024.10631318","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631318","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1697241262","display_name":null,"funder_award_id":"62034006,U23B2040","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2095920209","display_name":null,"funder_award_id":"2346953","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320320751","display_name":"Ministry of Education - Singapore","ror":"https://ror.org/01kcva023"},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W4236403279"],"related_works":["https://openalex.org/W2795319754","https://openalex.org/W2248971758","https://openalex.org/W2332612935","https://openalex.org/W1974744264","https://openalex.org/W2410108108","https://openalex.org/W2129539607","https://openalex.org/W4327948915","https://openalex.org/W1974020084","https://openalex.org/W2079374728","https://openalex.org/W3095125871"],"abstract_inverted_index":{"We":[0,41],"perform":[1],"comprehensive":[2],"and":[3,38,45,60,70,83,97,106,126,150],"in-depth":[4],"investigation":[5],"into":[6],"the":[7,30,94,99,154],"cryogenic":[8,159],"characteristics":[9],"of":[10,85,102,142],"ferroelectric":[11],"(FE)":[12],"HZO":[13,48,172],"thin":[14],"films":[15,49],"with":[16,68,122],"varying":[17],"thicknesses":[18],"(3/5/7/10":[19],"nm)":[20],"across":[21],"a":[22,115],"broad":[23],"temperature":[24,52],"range":[25],"(4~300":[26],"K),":[27],"assisted":[28],"by":[29],"first-principles":[31],"calculations":[32],"as":[33,35,66,90,120],"well":[34],"extensive":[36],"material":[37],"electrical":[39],"characterizations.":[40],"discover:":[42],"(1)":[43],"3":[44],"5":[46],"nm":[47,72],"exhibit":[50],"distinct":[51],"dependence":[53],"in":[54],"remnant":[55],"polarization":[56],"<tex":[57,63,86,103,107,111,123,134,164],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[58,64,87,104,108,112,124,135,165],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$(P_{\\mathrm{r}})$</tex>":[59],"coercive":[61],"field":[62],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$(E_{\\mathrm{c}})$</tex>":[65],"compared":[67,121],"7":[69],"10":[71],"ones":[73],"owning":[74],"to":[75],"different":[76],"phase":[77],"transition":[78],"mechanisms.":[79],"(2)":[80],"The":[81],"concentration":[82,129],"location":[84],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\mathrm{V}_{\\mathrm{o}}{}^{2+}$</tex>":[88,113],"emerge":[89],"pivotal":[91],"factors":[92],"influencing":[93],"trap-assisted-tunneling":[95],"process,":[96],"thereby":[98],"temperature-dependent":[100],"behaviors":[101],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$P_{r}$</tex>":[105,166],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$E_{\\mathrm{c}}$</tex>.":[109],"(3)":[110],"possesses":[114],"lower":[116],"migration":[117],"energy":[118],"barrier":[119,160],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\mathrm{V}_{\\mathrm{o}}$</tex>,":[125],"oxygen":[127],"vacancy":[128],"can":[130],"be":[131],"engineered":[132],"through":[133],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\mathrm{O}_{3}$</tex>":[136],"pulse":[137],"duration":[138],"during":[139],"ALD":[140],"deposition":[141],"HZO.":[143],"Building":[144],"upon":[145],"these":[146],"insights,":[147],"we":[148],"propose":[149],"experimentally":[151],"demonstrated,":[152],"for":[153,163,170],"first":[155],"time,":[156],"an":[157],"innovative":[158],"engineering":[161],"approach":[162],"enhancement,":[167],"particularly":[168],"valuable":[169],"ultra-thin":[171],"films.":[173]},"counts_by_year":[{"year":2025,"cited_by_count":9},{"year":2024,"cited_by_count":2}],"updated_date":"2025-12-26T23:08:49.675405","created_date":"2025-10-10T00:00:00"}