{"id":"https://openalex.org/W2059670849","doi":"https://doi.org/10.1109/nems.2013.6559839","title":"Application of micromachined quartz tuning fork resonator for temperature sensing","display_name":"Application of micromachined quartz tuning fork resonator for temperature sensing","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2059670849","doi":"https://doi.org/10.1109/nems.2013.6559839","mag":"2059670849"},"language":"en","primary_location":{"id":"doi:10.1109/nems.2013.6559839","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559839","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100353929","display_name":"Xin Li","orcid":"https://orcid.org/0000-0002-6992-8849"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Li","raw_affiliation_strings":["Computer Center, Harbin University of Science and Technology, China","Computer Center, Harbin University of Science and Technology, Harbin, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Computer Center, Harbin University of Science and Technology, China","institution_ids":["https://openalex.org/I100188998"]},{"raw_affiliation_string":"Computer Center, Harbin University of Science and Technology, Harbin, China","institution_ids":["https://openalex.org/I100188998"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089996806","display_name":"Jing Ma","orcid":"https://orcid.org/0000-0003-0987-345X"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jing Ma","raw_affiliation_strings":["College of Automation, Harbin University of Science and Technology, China","College of Automation, Harbin University of Science and Technology, Harbin China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, China","institution_ids":["https://openalex.org/I100188998"]},{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, Harbin China","institution_ids":["https://openalex.org/I100188998"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102323066","display_name":"Haibo Xu","orcid":null},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-bo Xu","raw_affiliation_strings":["College of Automation, Harbin University of Science and Technology, China","College of Automation, Harbin University of Science and Technology, Harbin China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, China","institution_ids":["https://openalex.org/I100188998"]},{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, Harbin China","institution_ids":["https://openalex.org/I100188998"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103168438","display_name":"Zhichao Jia","orcid":"https://orcid.org/0009-0005-8701-3000"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhi-chao Jia","raw_affiliation_strings":["College of Automation, Harbin University of Science and Technology, China","College of Automation, Harbin University of Science and Technology, Harbin China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, China","institution_ids":["https://openalex.org/I100188998"]},{"raw_affiliation_string":"College of Automation, Harbin University of Science and Technology, Harbin China","institution_ids":["https://openalex.org/I100188998"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I100188998"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.2052407,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"20","issue":null,"first_page":"759","last_page":"762"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tuning-fork","display_name":"Tuning fork","score":0.9168399572372437},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7347519397735596},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7223485708236694},{"id":"https://openalex.org/keywords/quartz","display_name":"Quartz","score":0.6375038623809814},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6166247129440308},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6019027829170227},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4968450367450714},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.462304025888443},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4604950249195099},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.44846922159194946},{"id":"https://openalex.org/keywords/repeatability","display_name":"Repeatability","score":0.4172675609588623},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2826552391052246},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.2710210382938385},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.2626691460609436},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.17654359340667725},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.1495489776134491},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13515135645866394},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08554518222808838},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08472961187362671}],"concepts":[{"id":"https://openalex.org/C107677527","wikidata":"https://www.wikidata.org/wiki/Q201898","display_name":"Tuning fork","level":3,"score":0.9168399572372437},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7347519397735596},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7223485708236694},{"id":"https://openalex.org/C2779870107","wikidata":"https://www.wikidata.org/wiki/Q43010","display_name":"Quartz","level":2,"score":0.6375038623809814},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6166247129440308},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6019027829170227},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4968450367450714},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.462304025888443},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4604950249195099},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.44846922159194946},{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.4172675609588623},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2826552391052246},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.2710210382938385},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.2626691460609436},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17654359340667725},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.1495489776134491},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13515135645866394},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08554518222808838},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08472961187362671},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nems.2013.6559839","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2013.6559839","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5199999809265137,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1974505963","https://openalex.org/W1975457067","https://openalex.org/W1978308348","https://openalex.org/W2001832375","https://openalex.org/W2024712402","https://openalex.org/W2031089593","https://openalex.org/W2050983011","https://openalex.org/W2057205750","https://openalex.org/W2100314529","https://openalex.org/W2126904273","https://openalex.org/W2127657523","https://openalex.org/W2157304667","https://openalex.org/W2165186501","https://openalex.org/W2362871737","https://openalex.org/W2992562298","https://openalex.org/W6674929671"],"related_works":["https://openalex.org/W4288084846","https://openalex.org/W2893816048","https://openalex.org/W3168747143","https://openalex.org/W2315867670","https://openalex.org/W1968795594","https://openalex.org/W2237675924","https://openalex.org/W2755432716","https://openalex.org/W1605170656","https://openalex.org/W2144897418","https://openalex.org/W2086083558"],"abstract_inverted_index":{"This":[0],"article":[1],"describes":[2],"a":[3,19,24,40,53,76],"micromachined":[4],"quartz":[5,102],"tuning":[6,103],"fork":[7,104],"resonator,":[8],"6":[9],"mm":[10,15],"in":[11,16,39,75,118],"height":[12],"by":[13],"2":[14],"diamter,":[17],"holding":[18],"two-terminal":[20],"electronic":[21],"component":[22],"with":[23,58,124],"nomial":[25],"frequency":[26],"of":[27,93,100,126],"36":[28],"kHz":[29],"(at":[30],"zero":[31],"degree)":[32],"and":[33,62,89,97,116],"15":[34],"pF":[35],"typical":[36],"capacitance":[37],"packed":[38],"90":[41],"Pa":[42],"He":[43],"gas":[44],"sealed":[45],"metal":[46],"container,":[47],"which":[48],"has":[49,107],"been":[50,108],"used":[51,83],"as":[52],"sensor":[54,66,106,111],"for":[55],"temperature":[56,65,105],"measurement":[57],"good":[59],"sensitivity,":[60],"repeatability":[61],"reliability.":[63],"The":[64,110],"is":[67,82],"ZYtw-cut-quartz":[68],"crystal":[69],"bulk":[70],"acoustic":[71],"wave":[72],"resonator":[73],"vibrating":[74],"flexural":[77],"mode.":[78],"Finite":[79],"element":[80],"method":[81],"to":[84,122],"analyze":[85],"the":[86,91,94,101],"vibratory":[87],"modes":[88],"optimize":[90],"structure":[92],"sensor.":[95],"Design":[96],"performance":[98],"analysis":[99],"conducted.":[109],"prototype":[112],"was":[113],"successfully":[114],"fabricated":[115],"calibrated":[117],"operation":[119],"from":[120],"0\u00b0C":[121],"100\u00b0C":[123],"sensitivity":[125],"80":[127],"ppm/\u00b0C.":[128]},"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}