{"id":"https://openalex.org/W2150897308","doi":"https://doi.org/10.1109/mcom.2013.6495768","title":"MEMS inertial sensors: A tutorial overview","display_name":"MEMS inertial sensors: A tutorial overview","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W2150897308","doi":"https://doi.org/10.1109/mcom.2013.6495768","mag":"2150897308"},"language":"en","primary_location":{"id":"doi:10.1109/mcom.2013.6495768","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mcom.2013.6495768","pdf_url":null,"source":{"id":"https://openalex.org/S158797327","display_name":"IEEE Communications Magazine","issn_l":"0163-6804","issn":["0163-6804","1558-1896"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Communications Magazine","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051987369","display_name":"D.K. Shaeffer","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Derek K. Shaeffer","raw_affiliation_strings":["InvenSense, Inc., USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"InvenSense, Inc., USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5051987369"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":14.3983,"has_fulltext":false,"cited_by_count":363,"citation_normalized_percentile":{"value":0.99237248,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":100},"biblio":{"volume":"51","issue":"4","first_page":"100","last_page":"109"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.770930290222168},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.692528247833252},{"id":"https://openalex.org/keywords/inertial-measurement-unit","display_name":"Inertial measurement unit","score":0.593070387840271},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.5866000652313232},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.46698516607284546},{"id":"https://openalex.org/keywords/wearable-computer","display_name":"Wearable computer","score":0.4462512731552124},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.44363337755203247},{"id":"https://openalex.org/keywords/electronics","display_name":"Electronics","score":0.4347935914993286},{"id":"https://openalex.org/keywords/interface","display_name":"Interface (matter)","score":0.4276420474052429},{"id":"https://openalex.org/keywords/wearable-technology","display_name":"Wearable technology","score":0.42263704538345337},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.23969069123268127},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2108795940876007},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14443650841712952}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.770930290222168},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.692528247833252},{"id":"https://openalex.org/C79061980","wikidata":"https://www.wikidata.org/wiki/Q941680","display_name":"Inertial measurement unit","level":2,"score":0.593070387840271},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.5866000652313232},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.46698516607284546},{"id":"https://openalex.org/C150594956","wikidata":"https://www.wikidata.org/wiki/Q1334829","display_name":"Wearable computer","level":2,"score":0.4462512731552124},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.44363337755203247},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.4347935914993286},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.4276420474052429},{"id":"https://openalex.org/C54290928","wikidata":"https://www.wikidata.org/wiki/Q4845080","display_name":"Wearable technology","level":3,"score":0.42263704538345337},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.23969069123268127},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2108795940876007},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14443650841712952},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C129307140","wikidata":"https://www.wikidata.org/wiki/Q6795880","display_name":"Maximum bubble pressure method","level":3,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C157915830","wikidata":"https://www.wikidata.org/wiki/Q2928001","display_name":"Bubble","level":2,"score":0.0},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/mcom.2013.6495768","is_oa":false,"landing_page_url":"https://doi.org/10.1109/mcom.2013.6495768","pdf_url":null,"source":{"id":"https://openalex.org/S158797327","display_name":"IEEE Communications Magazine","issn_l":"0163-6804","issn":["0163-6804","1558-1896"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Communications Magazine","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.6700000166893005,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W2007901286","https://openalex.org/W2103198996","https://openalex.org/W2132190766","https://openalex.org/W2149128480","https://openalex.org/W2563505887","https://openalex.org/W2926357666","https://openalex.org/W2926894959","https://openalex.org/W6679510653","https://openalex.org/W6760675713","https://openalex.org/W6761004959"],"related_works":["https://openalex.org/W2356006086","https://openalex.org/W2545168295","https://openalex.org/W2365897603","https://openalex.org/W1973973903","https://openalex.org/W4234814094","https://openalex.org/W4287084017","https://openalex.org/W3195533899","https://openalex.org/W2156308897","https://openalex.org/W3179745820","https://openalex.org/W4303613760"],"abstract_inverted_index":{"Inertial":[0],"sensors":[1,116],"based":[2],"on":[3],"MEMS":[4,101],"technology":[5,102],"are":[6,182],"fast":[7],"becoming":[8],"ubiquitous":[9],"with":[10],"their":[11,137],"adoption":[12],"into":[13],"many":[14],"types":[15],"of":[16,42,76,87,100,108,150,157,160,167,170,207],"consumer":[17],"electronics":[18],"products,":[19],"including":[20],"smart":[21,44],"phones,":[22,45],"tablets,":[23],"gaming":[24],"systems,":[25],"TV":[26],"remotes,":[27],"toys,":[28],"and":[29,35,68,72,91,103,118,132,136,178,199],"even":[30],"(more":[31],"recently)":[32],"power":[33],"tools":[34],"wearable":[36],"sensors.":[37],"Now":[38],"a":[39,155],"standard":[40],"feature":[41],"most":[43,114],"MEMS-based":[46],"motion":[47],"tracking":[48],"enhances":[49],"the":[50,60,74,105,109,113,140,145,158,171,186,197,204],"user":[51,57],"interface":[52],"by":[53,63,85],"allowing":[54],"response":[55],"to":[56,127],"motions,":[58],"complements":[59],"GPS":[61],"receiver":[62],"providing":[64],"dead-reckoning":[65],"indoor":[66],"navigation":[67],"supporting":[69],"location-based":[70],"services,":[71],"holds":[73],"promise":[75],"enabling":[77],"handset":[78],"optical":[79],"image":[80],"stabilization":[81],"in":[82],"next-generation":[83],"handsets":[84],"virtue":[86],"its":[88],"lower":[89],"cost":[90,198],"small":[92],"form":[93,200],"factor.":[94],"This":[95],"tutorial":[96,187],"provides":[97],"an":[98,151],"overview":[99],"describes":[104],"essential":[106],"features":[107],"mechanical":[110,128,173],"systems":[111,142],"underlying":[112,172],"common":[115],"accelerometers":[117],"gyroscopes.":[119],"It":[120],"also":[121,183],"highlights":[122],"some":[123],"fundamental":[124],"trade-offs":[125],"related":[126],"system":[129],"dynamics,":[130],"force":[131],"charge":[133],"transduction":[134],"methods,":[135],"implications":[138],"for":[139],"mixed-signal":[141],"that":[143],"process":[144],"sensor":[146,162,176],"outputs.":[147],"The":[148],"presentation":[149],"energy-based":[152],"metric":[153],"allows":[154],"comparison":[156],"performance":[159],"competing":[161],"solutions.":[163],"For":[164],"each":[165],"type":[166],"sensor,":[168],"descriptions":[169],"theory,":[174],"canonical":[175],"architectures,":[177],"key":[179],"design":[180],"challenges":[181],"presented.":[184],"Finally,":[185],"reviews":[188],"multisensor":[189],"silicon":[190],"MEMS/CMOS":[191],"monolithic":[192],"integration,":[193],"which":[194],"is":[195],"driving":[196],"factor":[201],"reduction":[202],"behind":[203],"current":[205],"proliferation":[206],"these":[208],"devices.":[209]},"counts_by_year":[{"year":2026,"cited_by_count":11},{"year":2025,"cited_by_count":32},{"year":2024,"cited_by_count":34},{"year":2023,"cited_by_count":28},{"year":2022,"cited_by_count":34},{"year":2021,"cited_by_count":36},{"year":2020,"cited_by_count":32},{"year":2019,"cited_by_count":39},{"year":2018,"cited_by_count":31},{"year":2017,"cited_by_count":25},{"year":2016,"cited_by_count":25},{"year":2015,"cited_by_count":25},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":4}],"updated_date":"2026-05-27T09:02:27.158192","created_date":"2025-10-10T00:00:00"}