{"id":"https://openalex.org/W2105025175","doi":"https://doi.org/10.1109/iscas.2005.1465851","title":"Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors","display_name":"Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors","publication_year":2005,"publication_date":"2005-07-27","ids":{"openalex":"https://openalex.org/W2105025175","doi":"https://doi.org/10.1109/iscas.2005.1465851","mag":"2105025175"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2005.1465851","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2005.1465851","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2005 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044322491","display_name":"Mikko Saukoski","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"M. Saukoski","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland"],"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]},{"raw_affiliation_string":"Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065746324","display_name":"Lasse Aaltonen","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. Aaltonen","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland"],"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]},{"raw_affiliation_string":"Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066316803","display_name":"K. Halonen","orcid":"https://orcid.org/0000-0002-4385-9689"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Halonen","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland"],"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]},{"raw_affiliation_string":"Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, , Finland","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072696493","display_name":"T. Salo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Salo","raw_affiliation_strings":["VTI Technologies Oy, Vantaa, Finland","[VTI Technologies Oy, Vantaa, Finland]"],"affiliations":[{"raw_affiliation_string":"VTI Technologies Oy, Vantaa, Finland","institution_ids":[]},{"raw_affiliation_string":"[VTI Technologies Oy, Vantaa, Finland]","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5044322491"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.2682,"has_fulltext":false,"cited_by_count":38,"citation_normalized_percentile":{"value":0.94148287,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"5377","last_page":"5380"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6947740912437439},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6946165561676025},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.6822415590286255},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.6435801982879639},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.592524528503418},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5148802995681763},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5063225030899048},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4579528570175171},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.44498398900032043},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.4418286979198456},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4412878453731537},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.437948614358902},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4023987650871277},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.38075581192970276},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.36628997325897217},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35741397738456726},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.33834224939346313},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2880781292915344},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.23691996932029724},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.11836758255958557},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.11435148119926453}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6947740912437439},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6946165561676025},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.6822415590286255},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.6435801982879639},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.592524528503418},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5148802995681763},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5063225030899048},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4579528570175171},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.44498398900032043},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.4418286979198456},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4412878453731537},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.437948614358902},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4023987650871277},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38075581192970276},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.36628997325897217},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35741397738456726},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.33834224939346313},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2880781292915344},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.23691996932029724},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.11836758255958557},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.11435148119926453},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2005.1465851","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2005.1465851","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2005 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8799999952316284,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1511254434","https://openalex.org/W2003469080","https://openalex.org/W2157764301"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W1966596465","https://openalex.org/W2051563071","https://openalex.org/W2080828231","https://openalex.org/W2337947459","https://openalex.org/W4386858602","https://openalex.org/W2080773395","https://openalex.org/W3212531278","https://openalex.org/W2099626417","https://openalex.org/W2118205267"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,27,90,95],"charge":[4],"sensitive":[5],"amplifier":[6],"(CSA)":[7],"for":[8,86],"readout":[9,88],"of":[10,30,35,89,98,104,110,129],"micromechanical":[11],"capacitive":[12],"sensors.":[13],"The":[14,32,55,124],"transfer":[15],"function":[16],"and":[17,84,101],"noise":[18,22],"performance":[19],"together":[20],"with":[21,94],"optimisation":[23],"are":[24,38],"studied":[25],"from":[26,72],"theoretical":[28],"point":[29],"view.":[31],"feedback":[33,57],"resistors":[34],"the":[36,46,62,73,87,119],"CSA":[37,81,125],"implemented":[39,85],"as":[40],"long-channel":[41],"MOS":[42],"transistors":[43],"to":[44,60,67,77],"set":[45],"-3":[47],"dB":[48],"corner":[49],"frequency":[50,97],"well":[51],"below":[52],"1":[53],"kHz.":[54],"common-mode":[56,64],"is":[58,122],"designed":[59,83],"keep":[61],"input":[63],"level":[65],"constant":[66],"achieve":[68],"an":[69],"accurate":[70],"gain":[71],"change":[74,116],"in":[75,114],"capacitance":[76,115],"output":[78],"signal.":[79],"A":[80,107],"was":[82],"bulk":[91],"micromachined":[92],"gyroscope":[93],"resonance":[96],"8-10":[99],"kHz":[100],"signal":[102,120],"bandwidth":[103],"100":[105],"Hz.":[106],"measured":[108],"resolution":[109],"2.47-3.00":[111],"aF":[112],"(rms)":[113],"integrated":[117],"over":[118,130],"band":[121],"achieved.":[123],"tolerates":[126],"leakage":[127],"currents":[128],"5":[131],"nA":[132],"at":[133],"its":[134],"input.":[135]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":5}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}