{"id":"https://openalex.org/W3159330986","doi":"https://doi.org/10.1109/irps46558.2021.9405190","title":"Evaluation methodology for assessment of dielectric degradation and breakdown dynamics using time-dependent impedance spectroscopy (TDIS)","display_name":"Evaluation methodology for assessment of dielectric degradation and breakdown dynamics using time-dependent impedance spectroscopy (TDIS)","publication_year":2021,"publication_date":"2021-03-01","ids":{"openalex":"https://openalex.org/W3159330986","doi":"https://doi.org/10.1109/irps46558.2021.9405190","mag":"3159330986"},"language":"en","primary_location":{"id":"doi:10.1109/irps46558.2021.9405190","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps46558.2021.9405190","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088919203","display_name":"Tomohiro Kuyama","orcid":"https://orcid.org/0000-0001-6576-5504"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Tomohiro Kuyama","raw_affiliation_strings":["Graduate School of Engineering, Kyoto University, Kyoto, Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050621503","display_name":"Keiichiro Urabe","orcid":"https://orcid.org/0000-0001-9743-3184"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Keiichiro Urabe","raw_affiliation_strings":["Graduate School of Engineering, Kyoto University, Kyoto, Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064180912","display_name":"Koji Eriguchi","orcid":"https://orcid.org/0000-0003-1485-5897"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koji Eriguchi","raw_affiliation_strings":["Graduate School of Engineering, Kyoto University, Kyoto, Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5088919203"],"corresponding_institution_ids":["https://openalex.org/I22299242"],"apc_list":null,"apc_paid":null,"fwci":0.1016,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.41279368,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"7"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dielectric-spectroscopy","display_name":"Dielectric spectroscopy","score":0.8502718210220337},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.720291018486023},{"id":"https://openalex.org/keywords/nyquist-plot","display_name":"Nyquist plot","score":0.7084324359893799},{"id":"https://openalex.org/keywords/degradation","display_name":"Degradation (telecommunications)","score":0.6643880605697632},{"id":"https://openalex.org/keywords/dielectric-strength","display_name":"Dielectric strength","score":0.5843128561973572},{"id":"https://openalex.org/keywords/dynamics","display_name":"Dynamics (music)","score":0.573383092880249},{"id":"https://openalex.org/keywords/spectral-line","display_name":"Spectral line","score":0.5568707585334778},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5290685296058655},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.48071911931037903},{"id":"https://openalex.org/keywords/trapping","display_name":"Trapping","score":0.47710686922073364},{"id":"https://openalex.org/keywords/kinetics","display_name":"Kinetics","score":0.45469656586647034},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4340393543243408},{"id":"https://openalex.org/keywords/spectroscopy","display_name":"Spectroscopy","score":0.42414388060569763},{"id":"https://openalex.org/keywords/molecular-dynamics","display_name":"Molecular dynamics","score":0.4158196449279785},{"id":"https://openalex.org/keywords/chemical-physics","display_name":"Chemical physics","score":0.3470308482646942},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.31779980659484863},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.23764193058013916},{"id":"https://openalex.org/keywords/computational-chemistry","display_name":"Computational chemistry","score":0.23481404781341553},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.19818630814552307},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18795645236968994},{"id":"https://openalex.org/keywords/physical-chemistry","display_name":"Physical chemistry","score":0.1767587661743164},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.16176366806030273},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.09168025851249695},{"id":"https://openalex.org/keywords/electrochemistry","display_name":"Electrochemistry","score":0.06450742483139038}],"concepts":[{"id":"https://openalex.org/C7040849","wikidata":"https://www.wikidata.org/wiki/Q899580","display_name":"Dielectric spectroscopy","level":4,"score":0.8502718210220337},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.720291018486023},{"id":"https://openalex.org/C195762429","wikidata":"https://www.wikidata.org/wiki/Q1756793","display_name":"Nyquist plot","level":5,"score":0.7084324359893799},{"id":"https://openalex.org/C2779679103","wikidata":"https://www.wikidata.org/wiki/Q5251805","display_name":"Degradation (telecommunications)","level":2,"score":0.6643880605697632},{"id":"https://openalex.org/C70401718","wikidata":"https://www.wikidata.org/wiki/Q343241","display_name":"Dielectric strength","level":3,"score":0.5843128561973572},{"id":"https://openalex.org/C145912823","wikidata":"https://www.wikidata.org/wiki/Q113558","display_name":"Dynamics (music)","level":2,"score":0.573383092880249},{"id":"https://openalex.org/C4839761","wikidata":"https://www.wikidata.org/wiki/Q212111","display_name":"Spectral line","level":2,"score":0.5568707585334778},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5290685296058655},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.48071911931037903},{"id":"https://openalex.org/C2777924906","wikidata":"https://www.wikidata.org/wiki/Q34168","display_name":"Trapping","level":2,"score":0.47710686922073364},{"id":"https://openalex.org/C148898269","wikidata":"https://www.wikidata.org/wiki/Q1108792","display_name":"Kinetics","level":2,"score":0.45469656586647034},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4340393543243408},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.42414388060569763},{"id":"https://openalex.org/C59593255","wikidata":"https://www.wikidata.org/wiki/Q901663","display_name":"Molecular dynamics","level":2,"score":0.4158196449279785},{"id":"https://openalex.org/C159467904","wikidata":"https://www.wikidata.org/wiki/Q2001702","display_name":"Chemical physics","level":1,"score":0.3470308482646942},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.31779980659484863},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.23764193058013916},{"id":"https://openalex.org/C147597530","wikidata":"https://www.wikidata.org/wiki/Q369472","display_name":"Computational chemistry","level":1,"score":0.23481404781341553},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19818630814552307},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18795645236968994},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.1767587661743164},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.16176366806030273},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.09168025851249695},{"id":"https://openalex.org/C52859227","wikidata":"https://www.wikidata.org/wiki/Q7877","display_name":"Electrochemistry","level":3,"score":0.06450742483139038},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps46558.2021.9405190","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps46558.2021.9405190","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1530332147","https://openalex.org/W1603253863","https://openalex.org/W1661368752","https://openalex.org/W1992981913","https://openalex.org/W2002809092","https://openalex.org/W2023858409","https://openalex.org/W2029561216","https://openalex.org/W2059537683","https://openalex.org/W2117749367","https://openalex.org/W2134511326","https://openalex.org/W2153816568","https://openalex.org/W2525065954","https://openalex.org/W2539561614","https://openalex.org/W2544964708","https://openalex.org/W2596545060","https://openalex.org/W2620047315","https://openalex.org/W2807435418","https://openalex.org/W2915616483","https://openalex.org/W2971481946","https://openalex.org/W2974006943","https://openalex.org/W3091250708","https://openalex.org/W4247603946","https://openalex.org/W4250470534","https://openalex.org/W4255399170"],"related_works":["https://openalex.org/W2463017226","https://openalex.org/W2019075675","https://openalex.org/W2322548244","https://openalex.org/W2954369111","https://openalex.org/W2381931568","https://openalex.org/W2266185502","https://openalex.org/W3088401845","https://openalex.org/W2185595207","https://openalex.org/W4382141343","https://openalex.org/W2068623945"],"abstract_inverted_index":{"We":[0],"propose":[1],"a":[2],"method":[3,112,127],"to":[4,101,116,122],"analyze":[5],"the":[6,16,55,73,88,95,105,117,132,138],"dielectric":[7,42,144],"degradation":[8,85,139],"and":[9,37,50,70,137,140],"breakdown":[10,141],"dynamics":[11,58,74,142],"under":[12,59],"electrical":[13,60,133],"stressing":[14,81],"on":[15,54],"basis":[17],"of":[18,29,65,75,91,107,119,135,143],"time-resolved":[19],"impedance":[20,24],"Z(\u03c9,":[21,30,66,96],"t)":[22,31,67,97],"spectra-time-dependent":[23],"spectroscopy":[25],"(TDIS).":[26],"Nyquist":[27],"plots":[28],"show":[32],"unique":[33],"features":[34],"at":[35],"soft-":[36],"hard-breakdown":[38],"stages":[39],"for":[40,130],"various":[41],"films":[43],"(SiO":[44],"<sub":[45],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[46],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[47],",":[48],"SiN,":[49],"high-":[51,92],"k)":[52],"depending":[53],"defect":[56],"creation":[57],"stressing.":[61],"The":[62,125],"time":[63],"evolution":[64],"spectra-":[68],"R(t)":[69],"C(t)":[71],"-implies":[72],"defects":[76,136],"(charge":[77],"trapping/de-trapping":[78],"features)":[79],"during":[80],"in":[82],"accordance":[83],"with":[84],"kinetics.":[86],"At":[87],"post-breakdown":[89],"stage":[90],"k":[93],"dielectrics,":[94],"spectra":[98],"was":[99,113],"observed":[100],"be":[102],"distorted,":[103],"implying":[104],"presence":[106],"different":[108],"degenerated":[109],"phases.":[110],"This":[111],"also":[114],"applied":[115],"evaluation":[118],"plasma-induced":[120],"damage":[121],"SiN":[123],"films.":[124,145],"TDIS":[126],"is":[128],"useful":[129],"investigating":[131],"nature":[134]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-04-21T08:09:41.155169","created_date":"2025-10-10T00:00:00"}