{"id":"https://openalex.org/W3039739825","doi":"https://doi.org/10.1109/irps45951.2020.9129285","title":"BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms","display_name":"BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms","publication_year":2020,"publication_date":"2020-04-01","ids":{"openalex":"https://openalex.org/W3039739825","doi":"https://doi.org/10.1109/irps45951.2020.9129285","mag":"3039739825"},"language":"en","primary_location":{"id":"doi:10.1109/irps45951.2020.9129285","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps45951.2020.9129285","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://publica.fraunhofer.de/documents/N-597000.html","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016051418","display_name":"Bettina Wehring","orcid":"https://orcid.org/0000-0002-4255-5552"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"B. Wehring","raw_affiliation_strings":["Fraunhofer IPMS, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer IPMS, Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071642444","display_name":"Raik Hoffmann","orcid":"https://orcid.org/0009-0007-9464-6185"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Hoffmann","raw_affiliation_strings":["Fraunhofer IPMS, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer IPMS, Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052200642","display_name":"Lukas Gerlich","orcid":"https://orcid.org/0000-0001-6335-877X"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"L. Gerlich","raw_affiliation_strings":["Fraunhofer IPMS, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer IPMS, Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073904645","display_name":"M. Czernohorsky","orcid":"https://orcid.org/0009-0001-5634-9805"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Czernohorsky","raw_affiliation_strings":["Fraunhofer IPMS, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer IPMS, Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044617866","display_name":"Benjamin Uhlig","orcid":"https://orcid.org/0009-0003-9850-2323"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Uhlig","raw_affiliation_strings":["Fraunhofer IPMS, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer IPMS, Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045272640","display_name":"Robert Seidel","orcid":"https://orcid.org/0000-0003-2613-4106"},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Seidel","raw_affiliation_strings":["GLOBALFOUNDRIES, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Dresden, Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021690656","display_name":"T. Barchewitz","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Barchewitz","raw_affiliation_strings":["GLOBALFOUNDRIES, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Dresden, Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087116355","display_name":"F. Schlaphof","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"F. Schlaphof","raw_affiliation_strings":["GLOBALFOUNDRIES, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Dresden, Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049626466","display_name":"L. Meinshausen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142027","display_name":"GlobalFoundries (Germany)","ror":"https://ror.org/045jad561","country_code":"DE","type":"company","lineage":["https://openalex.org/I35662394","https://openalex.org/I4210142027"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"L. Meinshausen","raw_affiliation_strings":["GLOBALFOUNDRIES, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Dresden, Germany","institution_ids":["https://openalex.org/I4210142027"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067274650","display_name":"Christoph Leyens","orcid":"https://orcid.org/0000-0002-1885-9054"},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"TU Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Leyens","raw_affiliation_strings":["Technical University of Dresden, Dresden, Germany"],"affiliations":[{"raw_affiliation_string":"Technical University of Dresden, Dresden, Germany","institution_ids":["https://openalex.org/I78650965"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5016051418"],"corresponding_institution_ids":["https://openalex.org/I4210110247"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.05752198,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/x-ray-photoelectron-spectroscopy","display_name":"X-ray photoelectron spectroscopy","score":0.787671685218811},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7731118202209473},{"id":"https://openalex.org/keywords/schottky-barrier","display_name":"Schottky barrier","score":0.6041460037231445},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.585963249206543},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.5783339738845825},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.573701024055481},{"id":"https://openalex.org/keywords/leakage","display_name":"Leakage (economics)","score":0.5459812879562378},{"id":"https://openalex.org/keywords/wide-bandgap-semiconductor","display_name":"Wide-bandgap semiconductor","score":0.47189080715179443},{"id":"https://openalex.org/keywords/deep-level-transient-spectroscopy","display_name":"Deep-level transient spectroscopy","score":0.4572164714336395},{"id":"https://openalex.org/keywords/schottky-diode","display_name":"Schottky diode","score":0.4371156692504883},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.4274749159812927},{"id":"https://openalex.org/keywords/back-end-of-line","display_name":"Back end of line","score":0.42373281717300415},{"id":"https://openalex.org/keywords/argon","display_name":"Argon","score":0.4122283458709717},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.19863617420196533},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.16155856847763062},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.15706247091293335},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.1501457393169403},{"id":"https://openalex.org/keywords/nuclear-magnetic-resonance","display_name":"Nuclear magnetic resonance","score":0.0809328556060791}],"concepts":[{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.787671685218811},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7731118202209473},{"id":"https://openalex.org/C16115445","wikidata":"https://www.wikidata.org/wiki/Q2391942","display_name":"Schottky barrier","level":3,"score":0.6041460037231445},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.585963249206543},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5783339738845825},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.573701024055481},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.5459812879562378},{"id":"https://openalex.org/C189278905","wikidata":"https://www.wikidata.org/wiki/Q2157708","display_name":"Wide-bandgap semiconductor","level":2,"score":0.47189080715179443},{"id":"https://openalex.org/C2780080961","wikidata":"https://www.wikidata.org/wiki/Q176282","display_name":"Deep-level transient spectroscopy","level":3,"score":0.4572164714336395},{"id":"https://openalex.org/C205200001","wikidata":"https://www.wikidata.org/wiki/Q176066","display_name":"Schottky diode","level":3,"score":0.4371156692504883},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4274749159812927},{"id":"https://openalex.org/C2776628375","wikidata":"https://www.wikidata.org/wiki/Q4839229","display_name":"Back end of line","level":3,"score":0.42373281717300415},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.4122283458709717},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.19863617420196533},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.16155856847763062},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.15706247091293335},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.1501457393169403},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.0809328556060791},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/irps45951.2020.9129285","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps45951.2020.9129285","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},{"id":"pmh:oai:fraunhofer.de:N-597000","is_oa":true,"landing_page_url":"http://publica.fraunhofer.de/documents/N-597000.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IPMS","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/408500","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/408500","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":{"id":"pmh:oai:fraunhofer.de:N-597000","is_oa":true,"landing_page_url":"http://publica.fraunhofer.de/documents/N-597000.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IPMS","raw_type":"Conference Paper"},"sustainable_development_goals":[{"score":0.8799999952316284,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1914741926","https://openalex.org/W1974423278","https://openalex.org/W1991849163","https://openalex.org/W1993662404","https://openalex.org/W2003765188","https://openalex.org/W2007639067","https://openalex.org/W2057204582","https://openalex.org/W2070792739","https://openalex.org/W2155022099","https://openalex.org/W2156373378","https://openalex.org/W2346967757","https://openalex.org/W2802604451","https://openalex.org/W2919064253","https://openalex.org/W4300060838"],"related_works":["https://openalex.org/W2147656057","https://openalex.org/W1540585561","https://openalex.org/W1981646027","https://openalex.org/W2917180890","https://openalex.org/W2614156624","https://openalex.org/W2911343812","https://openalex.org/W2124971553","https://openalex.org/W2064836534","https://openalex.org/W2610840581","https://openalex.org/W2289026509"],"abstract_inverted_index":{"We":[0],"used":[1],"electrical":[2],"characterization":[3],"as":[4,6,46,48],"well":[5,47],"surface":[7],"analytical":[8],"methods":[9,81],"to":[10],"understand":[11],"leakage":[12],"behavior":[13],"and":[14,69],"breakdown":[15],"mechanisms":[16],"of":[17,33,41,102,115],"three":[18],"different":[19],"interlayer":[20],"dielectrics":[21,126],"(ILD)":[22],"in":[23],"detail.":[24],"Leakage":[25],"current":[26],"measurements":[27],"were":[28,52,88],"conducted":[29],"on":[30,61,90],"Back":[31],"End":[32],"Line":[34],"(BEoL)":[35],"metal":[36],"comb":[37],"structures":[38],"with":[39,92],"variations":[40],"line":[42],"spaces.":[43],"Schottky":[44,56],"barriers":[45],"trap":[49],"potential":[50],"heights":[51],"estimated.":[53],"Furthermore":[54],"the":[55,79,112,121,125],"barrier":[57],"height":[58],"was":[59,82,97],"determined":[60],"blanked":[62],"wafers":[63],"by":[64,99],"X-Ray":[65],"Photoelectron":[66],"Spectroscopy":[67,74],"(XPS)":[68],"Reflection":[70],"Electron":[71],"Energy":[72],"Loss":[73],"(REELS).":[75],"A":[76],"correlation":[77],"between":[78],"two":[80],"established.":[83],"In":[84],"addition":[85],"REELS":[86],"studies":[87],"performed":[89],"samples":[91],"etch":[93],"induced":[94],"damage":[95],"that":[96],"emulated":[98],"argon":[100],"sputtering":[101],"pristine":[103],"ILDs.":[104],"Two":[105],"defect":[106],"states":[107],"have":[108],"been":[109],"found":[110],"within":[111],"band":[113],"gap":[114],"all":[116],"ILDs,":[117],"which":[118],"could":[119],"influence":[120],"electron":[122],"transport":[123],"at":[124],"interface.":[127]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}