{"id":"https://openalex.org/W1548387209","doi":"https://doi.org/10.1109/icton.2015.7193380","title":"Ultra-thin metal and dielectric layers for nanophotonic applications","display_name":"Ultra-thin metal and dielectric layers for nanophotonic applications","publication_year":2015,"publication_date":"2015-07-01","ids":{"openalex":"https://openalex.org/W1548387209","doi":"https://doi.org/10.1109/icton.2015.7193380","mag":"1548387209"},"language":"en","primary_location":{"id":"doi:10.1109/icton.2015.7193380","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2015.7193380","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 17th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://orbit.dtu.dk/en/publications/2e002aaa-cae6-41d0-b597-144b108260a0","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009854862","display_name":"Evgeniy Shkondin","orcid":"https://orcid.org/0000-0002-8347-1814"},"institutions":[{"id":"https://openalex.org/I96673099","display_name":"Technical University of Denmark","ror":"https://ror.org/04qtj9h94","country_code":"DK","type":"education","lineage":["https://openalex.org/I96673099"]}],"countries":["DK"],"is_corresponding":true,"raw_author_name":"Evgeniy Shkondin","raw_affiliation_strings":["Danish National Center for Micro- and Nanofabrication (DANCHIP), Kongens Lyngby, Denmark","Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Danish National Center for Micro- and Nanofabrication (DANCHIP), Kongens Lyngby, Denmark","institution_ids":[]},{"raw_affiliation_string":"Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark","institution_ids":["https://openalex.org/I96673099"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025739458","display_name":"Lorenzo Leandro","orcid":"https://orcid.org/0000-0002-5259-3114"},"institutions":[{"id":"https://openalex.org/I96673099","display_name":"Technical University of Denmark","ror":"https://ror.org/04qtj9h94","country_code":"DK","type":"education","lineage":["https://openalex.org/I96673099"]}],"countries":["DK"],"is_corresponding":false,"raw_author_name":"Lorenzo Leandro","raw_affiliation_strings":["Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark","institution_ids":["https://openalex.org/I96673099"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090871675","display_name":"Radu Malureanu","orcid":"https://orcid.org/0000-0002-6093-5030"},"institutions":[{"id":"https://openalex.org/I96673099","display_name":"Technical University of Denmark","ror":"https://ror.org/04qtj9h94","country_code":"DK","type":"education","lineage":["https://openalex.org/I96673099"]}],"countries":["DK"],"is_corresponding":false,"raw_author_name":"Radu Malureanu","raw_affiliation_strings":["Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark","institution_ids":["https://openalex.org/I96673099"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030327369","display_name":"Flemming Jensen","orcid":"https://orcid.org/0000-0003-3535-8726"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Flemming Jensen","raw_affiliation_strings":["Danish National Center for Micro- and Nanofabrication (DANCHIP), Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Danish National Center for Micro- and Nanofabrication (DANCHIP), Kongens Lyngby, Denmark","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061617225","display_name":"No\u00e9mi Rozlosnik","orcid":null},"institutions":[{"id":"https://openalex.org/I96673099","display_name":"Technical University of Denmark","ror":"https://ror.org/04qtj9h94","country_code":"DK","type":"education","lineage":["https://openalex.org/I96673099"]}],"countries":["DK"],"is_corresponding":false,"raw_author_name":"Noemi Rozlosnik","raw_affiliation_strings":["Department of Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Department of Nanotechnology, Technical University of Denmark, Kongens Lyngby, Denmark","institution_ids":["https://openalex.org/I96673099"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003571731","display_name":"Andrei V. Lavrinenko","orcid":"https://orcid.org/0000-0001-8853-2033"},"institutions":[{"id":"https://openalex.org/I96673099","display_name":"Technical University of Denmark","ror":"https://ror.org/04qtj9h94","country_code":"DK","type":"education","lineage":["https://openalex.org/I96673099"]}],"countries":["DK"],"is_corresponding":false,"raw_author_name":"Andrei V. Lavrinenko","raw_affiliation_strings":["Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark"],"affiliations":[{"raw_affiliation_string":"Department of Photonics Engineering, Technical University of Denmark, Kongens Lyngby, Denmark","institution_ids":["https://openalex.org/I96673099"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5009854862"],"corresponding_institution_ids":["https://openalex.org/I96673099"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.02596405,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":"12","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanophotonics","display_name":"Nanophotonics","score":0.890554666519165},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"Atomic layer deposition","score":0.7806860208511353},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.7788026332855225},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7753148078918457},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7398090362548828},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.6208023428916931},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.5757177472114563},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.5214025974273682},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.5126129984855652},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5034906268119812},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.46369990706443787},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.43132126331329346}],"concepts":[{"id":"https://openalex.org/C27289702","wikidata":"https://www.wikidata.org/wiki/Q2475861","display_name":"Nanophotonics","level":2,"score":0.890554666519165},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.7806860208511353},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7788026332855225},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7753148078918457},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7398090362548828},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6208023428916931},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5757177472114563},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.5214025974273682},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5126129984855652},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5034906268119812},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.46369990706443787},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.43132126331329346},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icton.2015.7193380","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2015.7193380","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 17th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.atira.dk:publications/2e002aaa-cae6-41d0-b597-144b108260a0","is_oa":true,"landing_page_url":"https://orbit.dtu.dk/en/publications/2e002aaa-cae6-41d0-b597-144b108260a0","pdf_url":null,"source":{"id":"https://openalex.org/S4306400705","display_name":"Technical University of Denmark, DTU Orbit (Technical University of Denmark, DTU)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I96673099","host_organization_name":"Technical University of Denmark","host_organization_lineage":["https://openalex.org/I96673099"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Shkondin , E , Leandro , L , Malureanu , R , Jensen , F , Rozlosnik , N & Lavrinenko , A 2015 , Ultra-thin Metal and Dielectric Layers for Nanophotonic Applications . in Proceedings of ICTON 2015 . , 7193380 , IEEE , 17th International Conference on Transparent Optical Networks , Budapest , Hungary , 05/07/2015 . https://doi.org/10.1109/icton.2015.7193380","raw_type":"contributionToPeriodical"}],"best_oa_location":{"id":"pmh:oai:pure.atira.dk:publications/2e002aaa-cae6-41d0-b597-144b108260a0","is_oa":true,"landing_page_url":"https://orbit.dtu.dk/en/publications/2e002aaa-cae6-41d0-b597-144b108260a0","pdf_url":null,"source":{"id":"https://openalex.org/S4306400705","display_name":"Technical University of Denmark, DTU Orbit (Technical University of Denmark, DTU)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I96673099","host_organization_name":"Technical University of Denmark","host_organization_lineage":["https://openalex.org/I96673099"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Shkondin , E , Leandro , L , Malureanu , R , Jensen , F , Rozlosnik , N & Lavrinenko , A 2015 , Ultra-thin Metal and Dielectric Layers for Nanophotonic Applications . in Proceedings of ICTON 2015 . , 7193380 , IEEE , 17th International Conference on Transparent Optical Networks , Budapest , Hungary , 05/07/2015 . https://doi.org/10.1109/icton.2015.7193380","raw_type":"contributionToPeriodical"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1971663664","https://openalex.org/W1974682629","https://openalex.org/W2009415312","https://openalex.org/W2038189548","https://openalex.org/W2040709426","https://openalex.org/W2064614109","https://openalex.org/W2099610951","https://openalex.org/W2146845297","https://openalex.org/W2295434126","https://openalex.org/W2316669282","https://openalex.org/W2334538937","https://openalex.org/W2895473374","https://openalex.org/W3103924675"],"related_works":["https://openalex.org/W2017189043","https://openalex.org/W1524640612","https://openalex.org/W4248115860","https://openalex.org/W4304136734","https://openalex.org/W2045648267","https://openalex.org/W2140795224","https://openalex.org/W2314929293","https://openalex.org/W4244370485","https://openalex.org/W2162906603","https://openalex.org/W2613656376"],"abstract_inverted_index":{"In":[0,68],"our":[1,22],"talk":[2],"we":[3,20,72],"first":[4],"give":[5],"an":[6],"overview":[7],"of":[8,17,29,32],"the":[9,15,69],"various":[10],"thin":[11],"films":[12,31],"used":[13],"in":[14,25,63],"field":[16],"nanophotonics.":[18],"Then":[19],"describe":[21],"own":[23],"activity":[24],"fabrication":[26],"and":[27,55],"characterization":[28],"ultra-thin":[30],"high":[33,64],"quality.":[34],"We":[35],"particularly":[36],"focus":[37],"on":[38,52],"uniform":[39],"gold":[40],"layers":[41],"having":[42],"thicknesses":[43],"down":[44],"to":[45],"6":[46],"nm":[47],"fabricated":[48],"by":[49,59],"e-beam":[50],"deposition":[51,62],"dielectric":[53],"substrates":[54],"Al-oxides/Ti-oxides":[56],"multilayers":[57],"prepared":[58],"atomic":[60],"layer":[61],"aspect":[65,77],"ratio":[66,78],"trenches.":[67],"latter":[70],"case":[71],"show":[73],"more":[74],"than":[75],"1:20":[76],"structures":[79],"can":[80],"be":[81],"achieved.":[82]},"counts_by_year":[{"year":2020,"cited_by_count":2}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}