{"id":"https://openalex.org/W2613108079","doi":"https://doi.org/10.1109/icit.2017.7915482","title":"Double stage FPCB scanning micromirror for laser pattern generation","display_name":"Double stage FPCB scanning micromirror for laser pattern generation","publication_year":2017,"publication_date":"2017-03-01","ids":{"openalex":"https://openalex.org/W2613108079","doi":"https://doi.org/10.1109/icit.2017.7915482","mag":"2613108079"},"language":"en","primary_location":{"id":"doi:10.1109/icit.2017.7915482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icit.2017.7915482","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Conference on Industrial Technology (ICIT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102025840","display_name":"Hui Zuo","orcid":"https://orcid.org/0000-0002-6955-0516"},"institutions":[{"id":"https://openalex.org/I530967","display_name":"Toronto Metropolitan University","ror":"https://ror.org/05g13zd79","country_code":"CA","type":"education","lineage":["https://openalex.org/I530967"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"Hui Zuo","raw_affiliation_strings":["Dept. of Mechanical and Industrial Eng., Ryerson University, Toronto, Canada"],"affiliations":[{"raw_affiliation_string":"Dept. of Mechanical and Industrial Eng., Ryerson University, Toronto, Canada","institution_ids":["https://openalex.org/I530967"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023751104","display_name":"Siyuan He","orcid":"https://orcid.org/0000-0002-6954-1206"},"institutions":[{"id":"https://openalex.org/I530967","display_name":"Toronto Metropolitan University","ror":"https://ror.org/05g13zd79","country_code":"CA","type":"education","lineage":["https://openalex.org/I530967"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Siyuan He","raw_affiliation_strings":["Dept. of Mechanical and Industrial Eng., Ryerson University, Toronto, Canada"],"affiliations":[{"raw_affiliation_string":"Dept. of Mechanical and Industrial Eng., Ryerson University, Toronto, Canada","institution_ids":["https://openalex.org/I530967"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5102025840"],"corresponding_institution_ids":["https://openalex.org/I530967"],"apc_list":null,"apc_paid":null,"fwci":0.1433,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.48492848,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"917","last_page":"921"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.712132453918457},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6883806586265564},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6665976643562317},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5209930539131165},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5009510517120361},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.46410712599754333},{"id":"https://openalex.org/keywords/rotation","display_name":"Rotation (mathematics)","score":0.41684186458587646},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3750227093696594},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.19061189889907837},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.0878276526927948}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.712132453918457},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6883806586265564},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6665976643562317},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5209930539131165},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5009510517120361},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.46410712599754333},{"id":"https://openalex.org/C74050887","wikidata":"https://www.wikidata.org/wiki/Q848368","display_name":"Rotation (mathematics)","level":2,"score":0.41684186458587646},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3750227093696594},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19061189889907837},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0878276526927948},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icit.2017.7915482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icit.2017.7915482","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Conference on Industrial Technology (ICIT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5099999904632568,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1975772284","https://openalex.org/W1997658106","https://openalex.org/W2045414264","https://openalex.org/W2057992472","https://openalex.org/W2091825939","https://openalex.org/W2101575235","https://openalex.org/W2103794403","https://openalex.org/W2113788623","https://openalex.org/W2115125798","https://openalex.org/W2119652112","https://openalex.org/W2129000627","https://openalex.org/W2133627653","https://openalex.org/W2150495532","https://openalex.org/W2159584101","https://openalex.org/W2163169083","https://openalex.org/W2331720111","https://openalex.org/W2591340092","https://openalex.org/W2592729829"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2384315251","https://openalex.org/W2058003992","https://openalex.org/W2993506873"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,34,51],"double":[4],"stage":[5],"FPCB":[6,25,35],"(Flexible":[7],"Printed":[8],"Circuit":[9],"Board)":[10],"electrostatic":[11],"parallel":[12],"plate":[13,54],"(DSFP)":[14],"micromirror.":[15],"It":[16,95],"is":[17],"designed":[18],"and":[19,50,71,93],"fabricated":[20,92],"base":[21],"on":[22,47],"mature":[23],"commercial":[24],"processes":[26],"with":[27,55,59,102],"low":[28],"cost.":[29],"The":[30,76],"DSFP":[31,79],"micromirror":[32,80],"includes":[33],"moving":[36],"electrode":[37],"in":[38],"the":[39],"middle,":[40],"two":[41],"identical":[42],"FR4":[43],"PCB":[44],"fixed":[45],"electrodes":[46],"both":[48],"sides":[49],"silicon":[52],"mirror":[53,73],"aluminum":[56],"coating.":[57],"Compare":[58],"conventional":[60],"MEMS":[61],"micromirrors,":[62],"it":[63],"has":[64],"much":[65],"lower":[66],"cost,":[67],"shorter":[68],"fabrication":[69],"cycle":[70],"higher":[72],"surface":[74],"quality.":[75],"performances":[77],"of":[78],"are":[81,91],"modeled":[82],"by":[83],"Finite":[84],"Element":[85],"Analysis":[86],"(FEA)":[87],"software":[88],"ANSYS.":[89],"Prototypes":[90],"tested.":[94],"can":[96],"reach":[97],"3.25\u00b0":[98],"average":[99],"rotation":[100],"angle":[101],"100":[103],"V":[104],"sinusoidal":[105],"driving":[106],"at":[107],"117":[108],"Hz":[109],"resonance.":[110]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}