{"id":"https://openalex.org/W1991346934","doi":"https://doi.org/10.1109/iceee.2010.5608640","title":"Characterization of polymeric thin films from isopropanol by PECVD","display_name":"Characterization of polymeric thin films from isopropanol by PECVD","publication_year":2010,"publication_date":"2010-09-01","ids":{"openalex":"https://openalex.org/W1991346934","doi":"https://doi.org/10.1109/iceee.2010.5608640","mag":"1991346934"},"language":"en","primary_location":{"id":"doi:10.1109/iceee.2010.5608640","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2010.5608640","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 7th International Conference on Electrical Engineering Computing Science and Automatic Control","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001421404","display_name":"J. O. Mart\u00ednez-Guti\u00e9rrez","orcid":null},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]},{"id":"https://openalex.org/I3133460883","display_name":"Mexicali Institute of Technology","ror":"https://ror.org/03jfd4440","country_code":"MX","type":"education","lineage":["https://openalex.org/I3133460883"]}],"countries":["MX"],"is_corresponding":true,"raw_author_name":"J. O. Martinez-Gutierrez","raw_affiliation_strings":["Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico"],"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico","institution_ids":["https://openalex.org/I3133460883"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021305547","display_name":"O. Garc\u00eda-Serrano","orcid":null},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"O. Garcia-Serrano","raw_affiliation_strings":["Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico"],"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047102528","display_name":"G. Romero-Paredes","orcid":null},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]},{"id":"https://openalex.org/I3133460883","display_name":"Mexicali Institute of Technology","ror":"https://ror.org/03jfd4440","country_code":"MX","type":"education","lineage":["https://openalex.org/I3133460883"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"G. Romero-Paredes","raw_affiliation_strings":["Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico"],"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico","institution_ids":["https://openalex.org/I3133460883"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010218680","display_name":"R. Pe\u00f1a\u2010Sierra","orcid":"https://orcid.org/0000-0002-5412-7256"},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]},{"id":"https://openalex.org/I3133460883","display_name":"Mexicali Institute of Technology","ror":"https://ror.org/03jfd4440","country_code":"MX","type":"education","lineage":["https://openalex.org/I3133460883"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"R. Pena-Sierra","raw_affiliation_strings":["Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico"],"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico","institution_ids":["https://openalex.org/I3133460883"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033715103","display_name":"A. \u00c1vila-Garc\u00eda","orcid":null},"institutions":[{"id":"https://openalex.org/I3133460883","display_name":"Mexicali Institute of Technology","ror":"https://ror.org/03jfd4440","country_code":"MX","type":"education","lineage":["https://openalex.org/I3133460883"]},{"id":"https://openalex.org/I68368234","display_name":"Center for Research and Advanced Studies of the National Polytechnic Institute","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"A. Avila-Garcia","raw_affiliation_strings":["Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico"],"affiliations":[{"raw_affiliation_string":"Electrical Engineering Department, CINVESTAV-IPN, Mexico, D.F., Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Electrical Engineering Department, Solid-State Electronics Section, Mexicali, Mexico","institution_ids":["https://openalex.org/I3133460883"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5001421404"],"corresponding_institution_ids":["https://openalex.org/I3133460883","https://openalex.org/I68368234"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.07190411,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"76","issue":null,"first_page":"574","last_page":"577"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10045","display_name":"Organic Electronics and Photovoltaics","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dopant","display_name":"Dopant","score":0.7903772592544556},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6461081504821777},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.6323167681694031},{"id":"https://openalex.org/keywords/ammonium-hydroxide","display_name":"Ammonium hydroxide","score":0.6192174553871155},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.6053933501243591},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.559059202671051},{"id":"https://openalex.org/keywords/photoluminescence","display_name":"Photoluminescence","score":0.5517605543136597},{"id":"https://openalex.org/keywords/band-gap","display_name":"Band gap","score":0.5302219986915588},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.4554126560688019},{"id":"https://openalex.org/keywords/polymerization","display_name":"Polymerization","score":0.4376228153705597},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.42255699634552},{"id":"https://openalex.org/keywords/chlorobenzene","display_name":"Chlorobenzene","score":0.4221002757549286},{"id":"https://openalex.org/keywords/inorganic-chemistry","display_name":"Inorganic chemistry","score":0.2105591893196106},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.1850164234638214},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.18084734678268433},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18076074123382568},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.16149839758872986},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.09678590297698975},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.07103085517883301}],"concepts":[{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7903772592544556},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6461081504821777},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.6323167681694031},{"id":"https://openalex.org/C2777879272","wikidata":"https://www.wikidata.org/wiki/Q421888","display_name":"Ammonium hydroxide","level":2,"score":0.6192174553871155},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6053933501243591},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.559059202671051},{"id":"https://openalex.org/C85080765","wikidata":"https://www.wikidata.org/wiki/Q614893","display_name":"Photoluminescence","level":2,"score":0.5517605543136597},{"id":"https://openalex.org/C181966813","wikidata":"https://www.wikidata.org/wiki/Q806352","display_name":"Band gap","level":2,"score":0.5302219986915588},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.4554126560688019},{"id":"https://openalex.org/C44228677","wikidata":"https://www.wikidata.org/wiki/Q181898","display_name":"Polymerization","level":3,"score":0.4376228153705597},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.42255699634552},{"id":"https://openalex.org/C2776041390","wikidata":"https://www.wikidata.org/wiki/Q407768","display_name":"Chlorobenzene","level":3,"score":0.4221002757549286},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.2105591893196106},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.1850164234638214},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18084734678268433},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18076074123382568},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16149839758872986},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.09678590297698975},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.07103085517883301},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iceee.2010.5608640","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2010.5608640","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 7th International Conference on Electrical Engineering Computing Science and Automatic Control","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation","score":0.5099999904632568}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W378256193","https://openalex.org/W1969626123","https://openalex.org/W1992772548","https://openalex.org/W2044405841","https://openalex.org/W2052722099","https://openalex.org/W2059453824","https://openalex.org/W2121114935"],"related_works":["https://openalex.org/W2117170447","https://openalex.org/W4280529188","https://openalex.org/W4310866124","https://openalex.org/W1967628125","https://openalex.org/W2377900058","https://openalex.org/W2464965998","https://openalex.org/W2364247342","https://openalex.org/W4220665709","https://openalex.org/W1971890606","https://openalex.org/W2797945640"],"abstract_inverted_index":{"Polymerized":[0],"organic":[1],"thin":[2],"films":[3,50,104,136],"were":[4,32,51,105],"synthesized":[5],"on":[6,77],"a":[7,146],"variety":[8],"of":[9,48,55,72,82,102,109,120,133],"substrates":[10],"by":[11,143],"Plasma":[12],"Enhanced":[13],"Chemical":[14],"Vapor":[15],"Deposition":[16],"(PECVD)":[17],"technique":[18],"using":[19],"isopropanol":[20,31],"as":[21,34,39,53],"precursor.":[22,41],"Hydrogen":[23],"peroxide,":[24],"ammonium":[25],"hydroxide,":[26],"and":[27,37,45,59,70,80],"iodine":[28],"dissolved":[29],"in":[30,106,117,139],"used":[33],"precursor's":[35],"dopants":[36],"chlorobenzene":[38],"copolymerization":[40],"The":[42,61,85,98,130],"structural,":[43],"optical":[44,66,99],"electrical":[46],"properties":[47],"the":[49,56,73,78,103,107,114,118,134,140],"studied":[52],"functions":[54],"dopant":[57],"type":[58,81],"concentration.":[60],"growth":[62],"rate,":[63],"refractive":[64],"index,":[65],"bandgap,":[67],"chemical":[68],"structure":[69],"resistivity":[71,115],"films,":[74],"strongly":[75],"depend":[76],"concentration":[79],"added":[83],"dopant.":[84],"AFM":[86],"microphotographs":[87],"showed":[88],"smooth":[89],"surfaces":[90],"with":[91,145],"RMS":[92],"roughness":[93],"less":[94],"than":[95],"10":[96,121],"nm.":[97],"band-gap":[100],"values":[101],"range":[108],"2.6":[110],"to":[111],"3.26":[112],"eV,":[113],"was":[116,137],"order":[119],"<sup":[122,126],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[123,127],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sup>":[124],"-10":[125],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</sup>":[128],"ohm-cm.":[129],"photoluminescence":[131],"response":[132],"polymerized":[135],"obtained":[138],"visible":[141],"region,":[142],"exciting":[144],"UV":[147],"laser.":[148]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}