{"id":"https://openalex.org/W2114153270","doi":"https://doi.org/10.1109/iccd.2009.5413120","title":"Optical lithography simulation using wavelet transform","display_name":"Optical lithography simulation using wavelet transform","publication_year":2009,"publication_date":"2009-10-01","ids":{"openalex":"https://openalex.org/W2114153270","doi":"https://doi.org/10.1109/iccd.2009.5413120","mag":"2114153270"},"language":"en","primary_location":{"id":"doi:10.1109/iccd.2009.5413120","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2009.5413120","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Computer Design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.7275/1106117","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103414058","display_name":"Rance Rodrigues","orcid":null},"institutions":[{"id":"https://openalex.org/I24603500","display_name":"University of Massachusetts Amherst","ror":"https://ror.org/0072zz521","country_code":"US","type":"education","lineage":["https://openalex.org/I24603500"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Rance Rodrigues","raw_affiliation_strings":["University of Massachusetts, Amherst, USA","University of Massachusetts at Amherst"],"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Amherst, USA","institution_ids":["https://openalex.org/I24603500"]},{"raw_affiliation_string":"University of Massachusetts at Amherst","institution_ids":["https://openalex.org/I24603500"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008433592","display_name":"Aswin Sreedhar","orcid":null},"institutions":[{"id":"https://openalex.org/I24603500","display_name":"University of Massachusetts Amherst","ror":"https://ror.org/0072zz521","country_code":"US","type":"education","lineage":["https://openalex.org/I24603500"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Aswin Sreedhar","raw_affiliation_strings":["University of Massachusetts, Amherst, USA","University of Massachusetts at Amherst"],"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Amherst, USA","institution_ids":["https://openalex.org/I24603500"]},{"raw_affiliation_string":"University of Massachusetts at Amherst","institution_ids":["https://openalex.org/I24603500"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054064879","display_name":"Sandip Kundu","orcid":"https://orcid.org/0000-0001-8221-3824"},"institutions":[{"id":"https://openalex.org/I24603500","display_name":"University of Massachusetts Amherst","ror":"https://ror.org/0072zz521","country_code":"US","type":"education","lineage":["https://openalex.org/I24603500"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sandip Kundu","raw_affiliation_strings":["University of Massachusetts, Amherst, USA","University of Massachusetts at Amherst"],"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Amherst, USA","institution_ids":["https://openalex.org/I24603500"]},{"raw_affiliation_string":"University of Massachusetts at Amherst","institution_ids":["https://openalex.org/I24603500"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5103414058"],"corresponding_institution_ids":["https://openalex.org/I24603500"],"apc_list":null,"apc_paid":null,"fwci":0.9144,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.77690248,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"5754","issue":null,"first_page":"427","last_page":"432"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10481","display_name":"Computer Graphics and Visualization Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1704","display_name":"Computer Graphics and Computer-Aided Design"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11245","display_name":"Advanced Numerical Analysis Techniques","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/design-for-manufacturability","display_name":"Design for manufacturability","score":0.856752872467041},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.6744166016578674},{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"Optical proximity correction","score":0.6617283821105957},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6496294140815735},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4732019603252411},{"id":"https://openalex.org/keywords/wavelet-transform","display_name":"Wavelet transform","score":0.4584393799304962},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4545333981513977},{"id":"https://openalex.org/keywords/polygon","display_name":"Polygon (computer graphics)","score":0.42248648405075073},{"id":"https://openalex.org/keywords/wavelet","display_name":"Wavelet","score":0.41752058267593384},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3822130560874939},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1669459044933319},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.165567547082901},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.11686968803405762},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.08820116519927979}],"concepts":[{"id":"https://openalex.org/C62064638","wikidata":"https://www.wikidata.org/wiki/Q553878","display_name":"Design for manufacturability","level":2,"score":0.856752872467041},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6744166016578674},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.6617283821105957},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6496294140815735},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4732019603252411},{"id":"https://openalex.org/C196216189","wikidata":"https://www.wikidata.org/wiki/Q2867","display_name":"Wavelet transform","level":3,"score":0.4584393799304962},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4545333981513977},{"id":"https://openalex.org/C190694206","wikidata":"https://www.wikidata.org/wiki/Q3276654","display_name":"Polygon (computer graphics)","level":3,"score":0.42248648405075073},{"id":"https://openalex.org/C47432892","wikidata":"https://www.wikidata.org/wiki/Q831390","display_name":"Wavelet","level":2,"score":0.41752058267593384},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3822130560874939},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1669459044933319},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.165567547082901},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.11686968803405762},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.08820116519927979},{"id":"https://openalex.org/C126042441","wikidata":"https://www.wikidata.org/wiki/Q1324888","display_name":"Frame (networking)","level":2,"score":0.0},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.1109/iccd.2009.5413120","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2009.5413120","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Computer Design","raw_type":"proceedings-article"},{"id":"pmh:oai:scholarworks.umass.edu:ece_faculty_pubs-1885","is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/ece_faculty_pubs/886","pdf_url":null,"source":{"id":"https://openalex.org/S4306402057","display_name":"Scholarworks (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Electrical and Computer Engineering Faculty Publication Series","raw_type":"text"},{"id":"pmh:oai:scholarworks.umass.edu:theses-1495","is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/theses/412","pdf_url":null,"source":{"id":"https://openalex.org/S4306402057","display_name":"Scholarworks (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Masters Theses 1911 - February 2014","raw_type":"text"},{"id":"pmh:oai:scholarworks.umass.edu:20.500.14394/21570","is_oa":false,"landing_page_url":"https://hdl.handle.net/20.500.14394/21570","pdf_url":null,"source":{"id":"https://openalex.org/S4306402057","display_name":"Scholarworks (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"published","raw_type":"article"},{"id":"pmh:oai:works.bepress.com:rance_rodrigues-1000","is_oa":false,"landing_page_url":"https://works.bepress.com/rance_rodrigues/1","pdf_url":null,"source":{"id":"https://openalex.org/S4306402240","display_name":"ScholarWorks@UMassAmherst (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Rance Rodrigues","raw_type":"text"},{"id":"doi:10.7275/1106117","is_oa":true,"landing_page_url":"https://doi.org/10.7275/1106117","pdf_url":null,"source":{"id":"https://openalex.org/S7407053130","display_name":"University of Massachusetts (UMass) Amherst","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"article-journal"}],"best_oa_location":{"id":"doi:10.7275/1106117","is_oa":true,"landing_page_url":"https://doi.org/10.7275/1106117","pdf_url":null,"source":{"id":"https://openalex.org/S7407053130","display_name":"University of Massachusetts (UMass) Amherst","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},"sustainable_development_goals":[{"score":0.41999998688697815,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W94169221","https://openalex.org/W1514655958","https://openalex.org/W1839775469","https://openalex.org/W1979616688","https://openalex.org/W1990184359","https://openalex.org/W2000358180","https://openalex.org/W2005445969","https://openalex.org/W2009102457","https://openalex.org/W2015622761","https://openalex.org/W2021311077","https://openalex.org/W2062055033","https://openalex.org/W2068347376","https://openalex.org/W2071724711","https://openalex.org/W2074803427","https://openalex.org/W2077123400","https://openalex.org/W2094050913","https://openalex.org/W2094370252","https://openalex.org/W2110652343","https://openalex.org/W2113173089","https://openalex.org/W2115092649","https://openalex.org/W2120442423","https://openalex.org/W2123173853","https://openalex.org/W2127533906","https://openalex.org/W2130702032","https://openalex.org/W2146192871","https://openalex.org/W2148115459","https://openalex.org/W2175772671","https://openalex.org/W2501873590","https://openalex.org/W3149318025","https://openalex.org/W4233705760","https://openalex.org/W6679063738"],"related_works":["https://openalex.org/W2068691156","https://openalex.org/W2346707445","https://openalex.org/W2409660592","https://openalex.org/W2558069187","https://openalex.org/W2077995885","https://openalex.org/W2157255030","https://openalex.org/W3146466684","https://openalex.org/W1973661732","https://openalex.org/W1966512888","https://openalex.org/W2042284703"],"abstract_inverted_index":{"Optical":[0,15],"lithography":[1,16,42],"is":[2,18,44,50,143],"an":[3,64,95],"indispensible":[4],"step":[5],"in":[6,34,119,154],"the":[7,39,70,90,105,112],"process":[8],"flow":[9],"of":[10,41,45,78,98,111],"design":[11],"for":[12,55,146,162],"manufacturability":[13],"(DFM).":[14],"simulation":[17,24,43,53,66,142],"a":[19,31,51,76,155],"compute":[20],"intensive":[21],"task":[22],"and":[23,74,121,157],"performance,":[25],"or":[26],"lack":[27],"thereof":[28],"can":[29],"be":[30,131,152,160],"determining":[32],"factor":[33],"time":[35],"to":[36,81,130],"market.":[37],"Thus,":[38],"efficiency":[40],"paramount":[46],"importance.":[47],"Coherent":[48],"decomposition":[49,107],"popular":[52],"technique":[54,67],"aerial":[56],"imaging":[57],"simulation.":[58],"In":[59],"this":[60],"paper,":[61],"we":[62],"propose":[63],"approximate":[65],"based":[68],"on":[69],"2D":[71],"wavelet":[72],"transform":[73],"use":[75],"number":[77],"optimization":[79,148],"methods":[80],"further":[82],"improve":[83],"polygon":[84],"edge":[85],"detection.":[86],"Results":[87],"show":[88],"that":[89],"proposed":[91,113],"method":[92,114],"suffers":[93],"from":[94],"average":[96],"error":[97],"less":[99],"than":[100],"5%":[101],"when":[102],"compared":[103],"with":[104],"coherent":[106],"method.":[108],"The":[109],"benefits":[110],"are":[115,137],"(i)":[116],">10X":[117],"increase":[118],"performance":[120],"more":[122],"importantly":[123],"(ii)":[124],"it":[125,150],"allows":[126],"very":[127],"large":[128],"circuits":[129],"simulated":[132],"while":[133],"some":[134],"commercial":[135],"tools":[136],"severely":[138],"capacity":[139],"limited.":[140],"Approximate":[141],"quite":[144],"attractive":[145],"layout":[147,164],"where":[149],"may":[151,158],"used":[153],"loop":[156],"even":[159],"acceptable":[161],"final":[163],"verification.":[165]},"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}