{"id":"https://openalex.org/W2735200028","doi":"https://doi.org/10.1109/i2mtc.2017.7969660","title":"Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror","display_name":"Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror","publication_year":2017,"publication_date":"2017-05-01","ids":{"openalex":"https://openalex.org/W2735200028","doi":"https://doi.org/10.1109/i2mtc.2017.7969660","mag":"2735200028"},"language":"en","primary_location":{"id":"doi:10.1109/i2mtc.2017.7969660","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2017.7969660","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001872371","display_name":"Lisa-Marie Faller","orcid":"https://orcid.org/0000-0001-8434-1440"},"institutions":[{"id":"https://openalex.org/I4210166741","display_name":"University of Klagenfurt","ror":"https://ror.org/05q9m0937","country_code":"AT","type":"education","lineage":["https://openalex.org/I4210166741"]}],"countries":["AT"],"is_corresponding":true,"raw_author_name":"Lisa-Marie Faller","raw_affiliation_strings":["Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria"],"affiliations":[{"raw_affiliation_string":"Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria","institution_ids":["https://openalex.org/I4210166741"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076433858","display_name":"Juliana Padilha Leitzke","orcid":"https://orcid.org/0000-0002-7837-2686"},"institutions":[{"id":"https://openalex.org/I4210166741","display_name":"University of Klagenfurt","ror":"https://ror.org/05q9m0937","country_code":"AT","type":"education","lineage":["https://openalex.org/I4210166741"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Juliana Leitzke","raw_affiliation_strings":["Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria"],"affiliations":[{"raw_affiliation_string":"Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria","institution_ids":["https://openalex.org/I4210166741"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030185498","display_name":"Hubert Zangl","orcid":"https://orcid.org/0000-0002-9717-9566"},"institutions":[{"id":"https://openalex.org/I4210166741","display_name":"University of Klagenfurt","ror":"https://ror.org/05q9m0937","country_code":"AT","type":"education","lineage":["https://openalex.org/I4210166741"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Hubert Zangl","raw_affiliation_strings":["Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria"],"affiliations":[{"raw_affiliation_string":"Institute of Smart System Technologies, Sensors and Actuators Alpen-Adria-Universit\u00e4t, Klagenfurt, Klagenfurt, Austria","institution_ids":["https://openalex.org/I4210166741"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5001872371"],"corresponding_institution_ids":["https://openalex.org/I4210166741"],"apc_list":null,"apc_paid":null,"fwci":1.4691,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.83027579,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14163","display_name":"Astronomical Observations and Instrumentation","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8993582725524902},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.6450592279434204},{"id":"https://openalex.org/keywords/position-sensor","display_name":"Position sensor","score":0.5824697017669678},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.5569216012954712},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5130630731582642},{"id":"https://openalex.org/keywords/high-resolution","display_name":"High resolution","score":0.4859112799167633},{"id":"https://openalex.org/keywords/digital-micromirror-device","display_name":"Digital micromirror device","score":0.48103955388069153},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.39461302757263184},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3471972644329071},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.27531862258911133},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27211427688598633},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.23311695456504822},{"id":"https://openalex.org/keywords/remote-sensing","display_name":"Remote sensing","score":0.1366327702999115}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8993582725524902},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.6450592279434204},{"id":"https://openalex.org/C29258643","wikidata":"https://www.wikidata.org/wiki/Q2937669","display_name":"Position sensor","level":3,"score":0.5824697017669678},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.5569216012954712},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5130630731582642},{"id":"https://openalex.org/C3020199158","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"High resolution","level":2,"score":0.4859112799167633},{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.48103955388069153},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.39461302757263184},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3471972644329071},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.27531862258911133},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27211427688598633},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.23311695456504822},{"id":"https://openalex.org/C62649853","wikidata":"https://www.wikidata.org/wiki/Q199687","display_name":"Remote sensing","level":1,"score":0.1366327702999115},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/i2mtc.2017.7969660","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2017.7969660","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W250076511","https://openalex.org/W601814467","https://openalex.org/W1495315428","https://openalex.org/W1507525281","https://openalex.org/W1591300912","https://openalex.org/W2013333038","https://openalex.org/W2023618805","https://openalex.org/W2026303281","https://openalex.org/W2054532327","https://openalex.org/W2068844001","https://openalex.org/W2074490221","https://openalex.org/W2132448894","https://openalex.org/W2146136413","https://openalex.org/W2172258224","https://openalex.org/W2201679642","https://openalex.org/W2570308534","https://openalex.org/W6618243009","https://openalex.org/W6629729034"],"related_works":["https://openalex.org/W2183353491","https://openalex.org/W2022359168","https://openalex.org/W1989801241","https://openalex.org/W2141966428","https://openalex.org/W4212954839","https://openalex.org/W1583060487","https://openalex.org/W2090883315","https://openalex.org/W756886103","https://openalex.org/W2735200028","https://openalex.org/W1495980901"],"abstract_inverted_index":{"We":[0],"present":[1,188],"the":[2,38,83,120,190,200],"design":[3],"and":[4,113,148,171],"implementation":[5],"of":[6,19,32,45,47,63,74,85,116,169,199],"an":[7,20,72],"adaptable":[8,93],"FPGA-based":[9],"sensor":[10,24,152],"evaluation":[11],"platform.":[12,88],"This":[13],"platform":[14,102],"is":[15,91,155],"developed":[16],"for":[17,25,104,178],"benchmarking":[18],"inkjet-printed":[21],"capacitive":[22],"position":[23],"a":[26,33,59,87,162],"resonant":[27],"micromirror":[28,201],"system":[29,165],"as":[30,157],"part":[31],"smart":[34],"packaging":[35],"solution.":[36],"In":[37],"target":[39],"system,":[40],"very":[41],"high":[42,105,131],"required":[43],"resolutions":[44,46],"res":[48],"<sub":[49,65,76],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[50,66,77],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">pos</sub>":[51],"<;":[52],"50":[53,55],"nm":[54,56],"together":[57],"with":[58,142],"wide":[60],"measurement":[61,172],"range":[62],"r":[64],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">m</sub>":[67],"=":[68,79],"1000":[69,80],"pm":[70,81],"at":[71],"offset":[73],"d":[75],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0</sub>":[78],"motivate":[82],"development":[84],"such":[86],"Still,":[89],"it":[90],"fully":[92],"to":[94,109],"other":[95,186],"sensing":[96],"principles":[97],"(e.g.":[98,194],"inductive).":[99],"The":[100,134,151],"suggested":[101],"provides":[103],"sampling":[106],"rates":[107],"(up":[108],"\u2248":[110],"10":[111],"ns)":[112],"enables":[114,146,166],"generation":[115],"trigger":[117],"signals,":[118],"i.e.":[119,185],"mirror":[121],"control":[122],"signal,":[123],"without":[124],"time":[125],"lag":[126],"(as":[127],"could":[128],"result":[129],"from":[130,182],"order":[132],"filters).":[133],"online":[135],"configurable":[136],"FPGA":[137],"block":[138],"structure":[139],"in":[140,180,189,197],"combination":[141],"host":[143],"software":[144],"blocks":[145],"flexible":[147,167],"individual":[149],"design.":[150],"read-out":[153],"circuitry":[154],"designed":[156],"carrier":[158,163],"frequency":[159,164,181,196],"system.":[160],"Such":[161],"choices":[168],"bandwidth":[170],"signal":[173],"frequency.":[174],"It":[175],"thus":[176],"allows":[177],"separation":[179],"coupling":[183],"parasitics,":[184],"frequencies":[187],"device":[191],"under":[192],"test":[193],"actuation":[195],"case":[198],"system).":[202]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
