{"id":"https://openalex.org/W1492190065","doi":"https://doi.org/10.1109/i2mtc.2015.7151582","title":"On-wafer probe station for microwave metrology at the nanoscale","display_name":"On-wafer probe station for microwave metrology at the nanoscale","publication_year":2015,"publication_date":"2015-05-01","ids":{"openalex":"https://openalex.org/W1492190065","doi":"https://doi.org/10.1109/i2mtc.2015.7151582","mag":"1492190065"},"language":"en","primary_location":{"id":"doi:10.1109/i2mtc.2015.7151582","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2015.7151582","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111424710","display_name":"Abdelhatif El Fellahi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"A. El Fellahi","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050947509","display_name":"Kamel Haddadi","orcid":"https://orcid.org/0000-0002-4857-5220"},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"K. Haddadi","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067174342","display_name":"Jaouad Marzouk","orcid":null},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Marzouk","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017094092","display_name":"S. Arscott","orcid":"https://orcid.org/0000-0001-9938-2683"},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Arscott","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108541857","display_name":"Christophe Boyaval","orcid":null},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Boyaval","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052847527","display_name":"T. Lasri","orcid":null},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. Lasri","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035534379","display_name":"G. Dambrine","orcid":"https://orcid.org/0000-0003-2169-5967"},"institutions":[{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Dambrine","raw_affiliation_strings":["Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France"],"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille, France","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"Institute of Electronics, Microelectronics and Nanotechnology, University Lille 1, Avenue Poincar\u00e9 CS 60069 - 59652 Villeneuve d?Ascq Cedex - France","institution_ids":["https://openalex.org/I4210123471"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5111424710"],"corresponding_institution_ids":["https://openalex.org/I4210123471"],"apc_list":null,"apc_paid":null,"fwci":0.3621,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.61356895,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1960","last_page":"1964"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7561817765235901},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.7001657485961914},{"id":"https://openalex.org/keywords/microwave","display_name":"Microwave","score":0.6380187273025513},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6218221783638},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5585644841194153},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5107388496398926},{"id":"https://openalex.org/keywords/nanoscopic-scale","display_name":"Nanoscopic scale","score":0.4737825393676758},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.45470649003982544},{"id":"https://openalex.org/keywords/instrumentation","display_name":"Instrumentation (computer programming)","score":0.4523353576660156},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.37283095717430115},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30290818214416504},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.26759785413742065},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2068062424659729},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.13417282700538635}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7561817765235901},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.7001657485961914},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.6380187273025513},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6218221783638},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5585644841194153},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5107388496398926},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.4737825393676758},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45470649003982544},{"id":"https://openalex.org/C118530786","wikidata":"https://www.wikidata.org/wiki/Q1134732","display_name":"Instrumentation (computer programming)","level":2,"score":0.4523353576660156},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.37283095717430115},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30290818214416504},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.26759785413742065},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2068062424659729},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.13417282700538635},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/i2mtc.2015.7151582","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2015.7151582","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-02345596v1","is_oa":false,"landing_page_url":"https://hal.science/hal-02345596","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), May 2015, Pisa, Italy. pp.1960-1964, &#x27E8;10.1109/I2MTC.2015.7151582&#x27E9;","raw_type":"Conference papers"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.47999998927116394,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W194608437","https://openalex.org/W1533106475","https://openalex.org/W1581615653","https://openalex.org/W1823336781","https://openalex.org/W1978903191","https://openalex.org/W1992351384","https://openalex.org/W1992772244","https://openalex.org/W2012859874","https://openalex.org/W2018891354","https://openalex.org/W2019310081","https://openalex.org/W2026908759","https://openalex.org/W2042525855","https://openalex.org/W2079124277","https://openalex.org/W2087578960","https://openalex.org/W2089191698","https://openalex.org/W2090428277","https://openalex.org/W2100471503","https://openalex.org/W2101941004","https://openalex.org/W2105398209","https://openalex.org/W2127492122","https://openalex.org/W2128333192","https://openalex.org/W2132739674","https://openalex.org/W2137746547","https://openalex.org/W2141855113","https://openalex.org/W2147715835","https://openalex.org/W2328813264","https://openalex.org/W2546387124","https://openalex.org/W3103621980","https://openalex.org/W3147218365","https://openalex.org/W4206333502","https://openalex.org/W4206892643","https://openalex.org/W4234866582","https://openalex.org/W4245417206","https://openalex.org/W6634765763","https://openalex.org/W6638396970","https://openalex.org/W6673203927","https://openalex.org/W6806864788"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W1998546186","https://openalex.org/W2771786520","https://openalex.org/W2810180604","https://openalex.org/W2944964251","https://openalex.org/W2001476809","https://openalex.org/W2095990703","https://openalex.org/W1921407827","https://openalex.org/W2146341803","https://openalex.org/W2081028368"],"abstract_inverted_index":{"A":[0,50],"new":[1],"generation":[2,52],"of":[3,11,14,53,59],"instrumentation":[4],"is":[5,23],"developed":[6],"to":[7,71],"address":[8],"the":[9,17],"challenge":[10],"on-wafer":[12],"measurement":[13],"nanodevices":[15],"in":[16],"microwave":[18],"regime.":[19],"The":[20],"system":[21],"proposed":[22],"built":[24],"up":[25,70],"with":[26,56],"a":[27,31],"vector":[28],"network":[29],"analyzer,":[30],"scanning":[32],"electron":[33],"microscope":[34],"and":[35,46,68],"home-made":[36],"miniaturized":[37],"ground-signal-ground":[38],"(GSG)":[39],"probes":[40],"fabricated":[41,67],"on":[42,48],"silicon-on-insulator":[43],"(SOI)":[44],"technology":[45],"mounted":[47],"nano-positionners.":[49],"first":[51],"probing":[54],"structures":[55],"contact":[57],"sizes":[58],"1\u00b5m":[60],"<sup":[61],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[62],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[63],"have":[64],"been":[65],"designed,":[66],"characterized":[69],"40":[72],"GHz.":[73]},"counts_by_year":[{"year":2021,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-03-10T16:38:18.471706","created_date":"2016-06-24T00:00:00"}