{"id":"https://openalex.org/W2011760483","doi":"https://doi.org/10.1109/essderc.2012.6343339","title":"Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process","display_name":"Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process","publication_year":2012,"publication_date":"2012-09-01","ids":{"openalex":"https://openalex.org/W2011760483","doi":"https://doi.org/10.1109/essderc.2012.6343339","mag":"2011760483"},"language":"en","primary_location":{"id":"doi:10.1109/essderc.2012.6343339","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2012.6343339","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5039415777","display_name":"Akira Wada","orcid":"https://orcid.org/0000-0003-4037-5766"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Akira Wada","raw_affiliation_strings":["Institute of Fluid Science, Micro System Integration Center, University of Tohoku, Sendai, Miyagi, Japan","Institute of Fluid Science, Tohoku University Micro System Integration Center, Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan"],"affiliations":[{"raw_affiliation_string":"Institute of Fluid Science, Micro System Integration Center, University of Tohoku, Sendai, Miyagi, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"Institute of Fluid Science, Tohoku University Micro System Integration Center, Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084880356","display_name":"Seiji Samukawa","orcid":"https://orcid.org/0000-0003-4971-3290"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Seiji Samukawa","raw_affiliation_strings":["Institute of Fluid Science, Micro System Integration Center, University of Tohoku, Sendai, Miyagi, Japan","Institute of Fluid Science, Tohoku University Micro System Integration Center, Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan"],"affiliations":[{"raw_affiliation_string":"Institute of Fluid Science, Micro System Integration Center, University of Tohoku, Sendai, Miyagi, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"Institute of Fluid Science, Tohoku University Micro System Integration Center, Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100422057","display_name":"Rui Zhang","orcid":"https://orcid.org/0000-0002-5433-7616"},"institutions":[{"id":"https://openalex.org/I153327471","display_name":"Bunkyo University","ror":"https://ror.org/053h75930","country_code":"JP","type":"education","lineage":["https://openalex.org/I153327471"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Rui Zhang","raw_affiliation_strings":["School of Engineering, University of Tokyo, Bunkyo, Tokyo, Japan","School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, JAPAN"],"affiliations":[{"raw_affiliation_string":"School of Engineering, University of Tokyo, Bunkyo, Tokyo, Japan","institution_ids":["https://openalex.org/I153327471","https://openalex.org/I74801974"]},{"raw_affiliation_string":"School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, JAPAN","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5042410367","display_name":"Shinichi Takagi","orcid":"https://orcid.org/0000-0002-5601-2604"},"institutions":[{"id":"https://openalex.org/I153327471","display_name":"Bunkyo University","ror":"https://ror.org/053h75930","country_code":"JP","type":"education","lineage":["https://openalex.org/I153327471"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinichi Takagi","raw_affiliation_strings":["School of Engineering, University of Tokyo, Bunkyo, Tokyo, Japan","School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, JAPAN"],"affiliations":[{"raw_affiliation_string":"School of Engineering, University of Tokyo, Bunkyo, Tokyo, Japan","institution_ids":["https://openalex.org/I153327471","https://openalex.org/I74801974"]},{"raw_affiliation_string":"School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, JAPAN","institution_ids":["https://openalex.org/I74801974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5039415777"],"corresponding_institution_ids":["https://openalex.org/I201537933"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08099201,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"106","issue":null,"first_page":"85","last_page":"88"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/germanium","display_name":"Germanium","score":0.4105144143104553},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.31801608204841614},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.1105966567993164},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1041206419467926}],"concepts":[{"id":"https://openalex.org/C550623735","wikidata":"https://www.wikidata.org/wiki/Q867","display_name":"Germanium","level":3,"score":0.4105144143104553},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.31801608204841614},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.1105966567993164},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1041206419467926}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/essderc.2012.6343339","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc.2012.6343339","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5600000023841858,"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2003435840","https://openalex.org/W2012652160","https://openalex.org/W2016184522","https://openalex.org/W2032634683","https://openalex.org/W2045027252","https://openalex.org/W2069229677","https://openalex.org/W2075050869","https://openalex.org/W2085928520","https://openalex.org/W2093914900"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W2271181815"],"abstract_inverted_index":{"Germanium":[0],"dioxide":[1],"(GeO":[2],"<sub":[3,28,54,72,84],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[4,29,55,73,85,95,99,103],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[5,30,74],")":[6,57,87],"thin":[7],"film":[8,31],"with":[9,32,62,77,112],"a":[10,18,40,113],"high-quality":[11,70],"interface":[12,76,80],"was":[13,105],"directly":[14],"formed":[15,37],"by":[16,107],"using":[17],"damage-free":[19],"and":[20],"low-temperature":[21],"neutral":[22],"beam":[23],"oxidation":[24,58],"(NBO)":[25],"process.":[26],"GeO":[27,71],"little":[33],"suboxide":[34],"could":[35],"be":[36],"even":[38],"at":[39],"low":[41,50,79],"substrate":[42],"temperature":[43],"of":[44,47,66,88],"300\u00b0C":[45],"because":[46],"the":[48,109],"extremely":[49],"activation":[51],"energy":[52],"(E":[53],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">a</sub>":[56],"resulting":[59],"from":[60],"bombardment":[61],"energetic":[63],"oxygen":[64],"neutral-beams":[65],"5":[67],"eV.":[68],"A":[69],"/Ge":[75],"an":[78],"state":[81],"density":[82],"(D":[83],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">it</sub>":[86],"less":[89],"than":[90],"1":[91],"\u00d7":[92],"10":[93],"<sup":[94,98,102],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">11</sup>":[96],"cm":[97],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2</sup>":[100],"eV":[101],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-1</sup>":[104],"created":[106],"combining":[108],"NBO":[110],"process":[111],"hydrogen":[114],"(H)":[115],"radical":[116],"native":[117],"oxide":[118],"removal":[119],"treatment.":[120]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}