{"id":"https://openalex.org/W2533110118","doi":"https://doi.org/10.1109/esscirc.2016.7598252","title":"Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease","display_name":"Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2533110118","doi":"https://doi.org/10.1109/esscirc.2016.7598252","mag":"2533110118"},"language":"en","primary_location":{"id":"doi:10.1109/esscirc.2016.7598252","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esscirc.2016.7598252","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://t2r2.star.titech.ac.jp/rrws/file/CTT100722024/ATD100000413/","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049015548","display_name":"Kazuya Masu","orcid":"https://orcid.org/0000-0002-7121-8440"},"institutions":[{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"education","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Kazuya Masu","raw_affiliation_strings":["FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075309178","display_name":"Daisuke Yamane","orcid":"https://orcid.org/0000-0002-9262-4704"},"institutions":[{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"education","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Daisuke Yamane","raw_affiliation_strings":["FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080095206","display_name":"Katsuyuki Machida","orcid":"https://orcid.org/0000-0002-9706-3475"},"institutions":[{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"education","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Katsuyuki Machida","raw_affiliation_strings":["FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062195183","display_name":"Masato Sone","orcid":"https://orcid.org/0000-0002-7334-1952"},"institutions":[{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"education","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masato Sone","raw_affiliation_strings":["FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"FIRST Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046000557","display_name":"Yoshihiro Miyake","orcid":"https://orcid.org/0000-0001-6158-401X"},"institutions":[{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"education","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshihiro Miyake","raw_affiliation_strings":["Department of Computer Science, Tokyo Institute of Technology, Tokyo, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science, Tokyo Institute of Technology, Tokyo, Japan","institution_ids":["https://openalex.org/I114531698"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5049015548"],"corresponding_institution_ids":["https://openalex.org/I114531698"],"apc_list":null,"apc_paid":null,"fwci":0.1741,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.58370596,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"87","issue":null,"first_page":"99","last_page":"104"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9908000230789185,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.7860530614852905},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.763599157333374},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.6726266145706177},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6400450468063354},{"id":"https://openalex.org/keywords/inertia","display_name":"Inertia","score":0.6361725330352783},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.574475884437561},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5161257982254028},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.484481543302536},{"id":"https://openalex.org/keywords/stage","display_name":"Stage (stratigraphy)","score":0.46801531314849854},{"id":"https://openalex.org/keywords/parkinsons-disease","display_name":"Parkinson's disease","score":0.43164876103401184},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4065980315208435},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3751490116119385},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.34973442554473877},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3031337559223175},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.25987130403518677},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16839158535003662},{"id":"https://openalex.org/keywords/disease","display_name":"Disease","score":0.16573691368103027},{"id":"https://openalex.org/keywords/medicine","display_name":"Medicine","score":0.1366090476512909},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09792900085449219}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7860530614852905},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.763599157333374},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.6726266145706177},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6400450468063354},{"id":"https://openalex.org/C110407247","wikidata":"https://www.wikidata.org/wiki/Q122508","display_name":"Inertia","level":2,"score":0.6361725330352783},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.574475884437561},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5161257982254028},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.484481543302536},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.46801531314849854},{"id":"https://openalex.org/C2779734285","wikidata":"https://www.wikidata.org/wiki/Q11085","display_name":"Parkinson's disease","level":3,"score":0.43164876103401184},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4065980315208435},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3751490116119385},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34973442554473877},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3031337559223175},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.25987130403518677},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16839158535003662},{"id":"https://openalex.org/C2779134260","wikidata":"https://www.wikidata.org/wiki/Q12136","display_name":"Disease","level":2,"score":0.16573691368103027},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.1366090476512909},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09792900085449219},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/esscirc.2016.7598252","is_oa":false,"landing_page_url":"https://doi.org/10.1109/esscirc.2016.7598252","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference","raw_type":"proceedings-article"},{"id":"pmh:oai:t2r2.star.titech.ac.jp:50339880","is_oa":true,"landing_page_url":"http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100722024","pdf_url":"http://t2r2.star.titech.ac.jp/rrws/file/CTT100722024/ATD100000413/","source":{"id":"https://openalex.org/S4377196385","display_name":"Tokyo Tech Research Repository (Tokyo Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I114531698","host_organization_name":"Tokyo Institute of Technology","host_organization_lineage":["https://openalex.org/I114531698"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal Article"}],"best_oa_location":{"id":"pmh:oai:t2r2.star.titech.ac.jp:50339880","is_oa":true,"landing_page_url":"http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100722024","pdf_url":"http://t2r2.star.titech.ac.jp/rrws/file/CTT100722024/ATD100000413/","source":{"id":"https://openalex.org/S4377196385","display_name":"Tokyo Tech Research Repository (Tokyo Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I114531698","host_organization_name":"Tokyo Institute of Technology","host_organization_lineage":["https://openalex.org/I114531698"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal Article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322704","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960"},{"id":"https://openalex.org/F4320322832","display_name":"University of Tokyo","ror":"https://ror.org/057zh3y96"},{"id":"https://openalex.org/F4320338075","display_name":"Core Research for Evolutional Science and Technology","ror":"https://ror.org/00097mb19"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2533110118.pdf","grobid_xml":"https://content.openalex.org/works/W2533110118.grobid-xml"},"referenced_works_count":31,"referenced_works":["https://openalex.org/W887558822","https://openalex.org/W1533567697","https://openalex.org/W1665424883","https://openalex.org/W1972022543","https://openalex.org/W1975680207","https://openalex.org/W1984494454","https://openalex.org/W1993683949","https://openalex.org/W1995523270","https://openalex.org/W2023342020","https://openalex.org/W2051408335","https://openalex.org/W2054384507","https://openalex.org/W2061871989","https://openalex.org/W2078448723","https://openalex.org/W2122134053","https://openalex.org/W2132905138","https://openalex.org/W2137178805","https://openalex.org/W2149128480","https://openalex.org/W2164010209","https://openalex.org/W2290759514","https://openalex.org/W2313576010","https://openalex.org/W2495817740","https://openalex.org/W2563505887","https://openalex.org/W2794245519","https://openalex.org/W3018862335","https://openalex.org/W3031126759","https://openalex.org/W3095999842","https://openalex.org/W4240724475","https://openalex.org/W4285719527","https://openalex.org/W6749475757","https://openalex.org/W6775983402","https://openalex.org/W7005471538"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2978594305","https://openalex.org/W2006014592"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3],"present":[4],"our":[5],"recent":[6],"progress":[7],"of":[8,25,30,37,43,73,91,95,109],"a":[9,74],"high":[10,97],"sensitivity":[11,49,98],"complementary":[12],"metal-oxide":[13],"semiconductor-microelectromechanical":[14],"systems":[15],"(CMOS-MEMS)":[16],"inertia":[17,99],"sensor":[18,33,100],"and":[19,86],"its":[20],"application":[21],"to":[22,47,58,80],"early-stage":[23,107],"diagnosis":[24,108],"Parkinson's":[26,110],"disease.":[27,111],"The":[28],"feature":[29],"the":[31,35,64,84,87,92,96],"CMOS-MEMS":[32,66],"is":[34,55,101],"use":[36],"gold":[38,44],"proof":[39,59],"mass.":[40,60],"High":[41],"density":[42],"enables":[45],"us":[46],"increase":[48],"by":[50,104],"reducing":[51],"thermo-mechanical":[52],"noise":[53],"that":[54],"inversely":[56],"proportional":[57],"We":[61],"then":[62],"show":[63],"developed":[65],"multi-physics":[67],"design":[68],"environment.":[69],"An":[70],"equivalent":[71],"circuit":[72],"MEMS":[75],"accelerometer":[76],"has":[77],"been":[78],"designed":[79],"simultaneously":[81],"understand":[82],"both":[83],"mechanical":[85],"electrical":[88],"behaviors.":[89],"One":[90],"potential":[93],"applications":[94],"also":[102],"discussed":[103],"focusing":[105],"on":[106]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-03-10T16:38:18.471706","created_date":"2025-10-10T00:00:00"}