{"id":"https://openalex.org/W4401071735","doi":"https://doi.org/10.1109/drc61706.2024.10605255","title":"Optimization of Backside of Silicon-Compatible High Voltage Superlattice Capacitor for 12V-to-6V On-Chip Voltage Conversion","display_name":"Optimization of Backside of Silicon-Compatible High Voltage Superlattice Capacitor for 12V-to-6V On-Chip Voltage Conversion","publication_year":2024,"publication_date":"2024-06-24","ids":{"openalex":"https://openalex.org/W4401071735","doi":"https://doi.org/10.1109/drc61706.2024.10605255"},"language":"en","primary_location":{"id":"doi:10.1109/drc61706.2024.10605255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc61706.2024.10605255","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Device Research Conference (DRC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044101951","display_name":"Junmo Lee","orcid":"https://orcid.org/0000-0001-6092-6436"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Junmo Lee","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046983331","display_name":"Sunbin Deng","orcid":"https://orcid.org/0000-0002-3428-3120"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sunbin Deng","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022323303","display_name":"Jungyoun Kwak","orcid":"https://orcid.org/0000-0003-2697-5431"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jungyoun Kwak","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043820820","display_name":"Minji Shon","orcid":"https://orcid.org/0009-0001-5498-037X"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Minji Shon","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036105393","display_name":"Suman Datta","orcid":"https://orcid.org/0000-0001-6044-5173"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Suman Datta","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054894631","display_name":"Shimeng Yu","orcid":"https://orcid.org/0000-0002-0068-3652"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shimeng Yu","raw_affiliation_strings":["Georgia Institute of Technology,School of Electrical and Computer Engineering,USA"],"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology,School of Electrical and Computer Engineering,USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5044101951"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":0.6659,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.68891794,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10228","display_name":"Multilevel Inverters and Converters","score":0.9872999787330627,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9851999878883362,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7244367599487305},{"id":"https://openalex.org/keywords/superlattice","display_name":"Superlattice","score":0.6452375650405884},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.6393152475357056},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6291807293891907},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.6083922982215881},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5776395797729492},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5092991590499878},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.44859233498573303},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.35251450538635254},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3344096541404724},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2064843475818634},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14144831895828247}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7244367599487305},{"id":"https://openalex.org/C105382558","wikidata":"https://www.wikidata.org/wiki/Q332431","display_name":"Superlattice","level":2,"score":0.6452375650405884},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.6393152475357056},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6291807293891907},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6083922982215881},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5776395797729492},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5092991590499878},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.44859233498573303},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35251450538635254},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3344096541404724},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2064843475818634},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14144831895828247},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/drc61706.2024.10605255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/drc61706.2024.10605255","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 Device Research Conference (DRC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8299999833106995,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W4232768675","https://openalex.org/W4244605149","https://openalex.org/W4251980294"],"related_works":["https://openalex.org/W2026628379","https://openalex.org/W1984860738","https://openalex.org/W2405895097","https://openalex.org/W2168586217","https://openalex.org/W2792721407","https://openalex.org/W279396859","https://openalex.org/W2765670836","https://openalex.org/W1965686274","https://openalex.org/W2012557245","https://openalex.org/W2057759197"],"abstract_inverted_index":{"Backside":[0],"power":[1,5,47,64,190,197],"delivery":[2,65,191],"with":[3],"buried":[4],"rail":[6],"(BPR)":[7],"is":[8,68,118,131,144,237],"one":[9,23],"of":[10,35,93,97,109,112,137,154,202,211],"the":[11,33,52,56,63,72,76,83,91,98,107,113,119,185,200,207,228,241,252,257],"enabling":[12],"technologies":[13],"for":[14,134,187,251],"2":[15,181,196,218,220],"nm":[16],"node":[17],"and":[18,85,172,245],"beyond":[19],"[1]":[20],".":[21,60],"Moving":[22],"step":[24],"further,":[25],"we":[26,205],"believe":[27],"that":[28],"integrating":[29],"active":[30],"components":[31],"in":[32,46,116,231],"backside":[34,153,189],"silicon,":[36],"e.g.,":[37],"integrated":[38],"voltage":[39,77,87,136,160],"regulator":[40],"(IVR),":[41],"could":[42],"provide":[43],"further":[44],"improvement":[45],"conversion":[48,89],"efficiency":[49],"by":[50],"minimizing":[51],"IR":[53],"drop":[54],"at":[55,106],"package/interposer":[57],"level":[58],"[2]":[59],"To":[61,199],"minimize":[62],"loss,":[66],"it":[67,143],"advantageous":[69],"to":[70,75,146,183,192,239],"place":[71],"IVR":[73,117],"close":[74],"source":[78],"(e.g.,":[79],"12":[80],"V":[81],"from":[82],"package/interposer)":[84],"perform":[86],"down":[88],"near":[90],"point":[92],"loads.":[94],"However,":[95],"most":[96],"reported":[99],"monolithic":[100],"IVRs":[101],"so":[102],"far":[103],"are":[104,249],"placed":[105],"frontside":[108],"silicon.":[110],"One":[111],"core":[114,242],"elements":[115],"flying":[120,229],"capacitor.":[121],"Unfortunately,":[122],"today\u2019s":[123],"on-chip":[124],"back-end-of-line":[125],"(BEOL)":[126],"compatible":[127],"metal-insulator-metal":[128],"(MIM)":[129],"capacitor":[130,149,225,230],"mostly":[132],"designed":[133],"handling":[135],"<3.3":[138],"V.":[139],"In":[140],"this":[141],"regard,":[142],"timely":[145],"explore":[147],"new":[148],"technology":[150],"featuring":[151],"(1)":[152],"Si":[155],"integration,":[156],"(2)":[157],"high":[158,174],"breakdown":[159],"(>":[161,178],"6":[162],"V)":[163],"(3)":[164],"sufficient":[165],"reliability":[166,247],"(>10":[167],"yrs":[168],"@":[169],"85":[170],"\u00b0C)":[171],"(4)":[173],"2D":[175],"capacitance":[176],"density":[177],"28":[179],"fF/\u03bcm":[180],")":[182],"pave":[184],"pathway":[186],"\u201cactive\u201d":[188],"deliver":[193],">1":[194],"W/mm":[195],"density.":[198],"best":[201],"our":[203],"knowledge,":[204],"report":[206],"first":[208],"experimental":[209],"demonstration":[210],"a":[212,232],"Hf":[213],"0.25":[214],"Zr":[215],"0.75":[216],"O":[217,221],"/Al":[219],"3":[222],"laminate-based":[223],"superlattice":[224],"serving":[226],"as":[227],"12V-to-6V":[233],"IVR.":[234],"The":[235],"stack":[236],"optimized":[238],"achieve":[240],"requirements":[243],"(1)\u2013(3),":[244],"extensive":[246],"characterizations":[248],"performed":[250],"lifetime":[253],"projection":[254],"based":[255],"on":[256],"conduction":[258],"mechanism.":[259]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2025-12-21T01:58:51.020947","created_date":"2025-10-10T00:00:00"}