{"id":"https://openalex.org/W2123084514","doi":"https://doi.org/10.1109/bmei.2009.5305157","title":"Mass Sensor Based on Thin Film Bulk Acoustic Resonator","display_name":"Mass Sensor Based on Thin Film Bulk Acoustic Resonator","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W2123084514","doi":"https://doi.org/10.1109/bmei.2009.5305157","mag":"2123084514"},"language":"en","primary_location":{"id":"doi:10.1109/bmei.2009.5305157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/bmei.2009.5305157","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 2nd International Conference on Biomedical Engineering and Informatics","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023071738","display_name":"Wu Bi-yan","orcid":null},"institutions":[{"id":"https://openalex.org/I75059550","display_name":"Zhejiang Gongshang University","ror":"https://ror.org/0569mkk41","country_code":"CN","type":"education","lineage":["https://openalex.org/I75059550"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Biyan Wu","raw_affiliation_strings":["Computer and Information Engineering College, Zhejiang Gongshang University, Hangzhou, China","[Computer and Information Engineering College, Zhejiang Gongshang University, Hangzhou, China]"],"affiliations":[{"raw_affiliation_string":"Computer and Information Engineering College, Zhejiang Gongshang University, Hangzhou, China","institution_ids":["https://openalex.org/I75059550"]},{"raw_affiliation_string":"[Computer and Information Engineering College, Zhejiang Gongshang University, Hangzhou, China]","institution_ids":["https://openalex.org/I75059550"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5023071738"],"corresponding_institution_ids":["https://openalex.org/I75059550"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16779028,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"1","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8919081687927246},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7397472858428955},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6136707067489624},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.5964136123657227},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5619504451751709},{"id":"https://openalex.org/keywords/reproducibility","display_name":"Reproducibility","score":0.5197443962097168},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.4760874807834625},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.47007113695144653},{"id":"https://openalex.org/keywords/acoustic-sensor","display_name":"Acoustic sensor","score":0.422207772731781},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.39006397128105164},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.12075433135032654},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.09255078434944153}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8919081687927246},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7397472858428955},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6136707067489624},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.5964136123657227},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5619504451751709},{"id":"https://openalex.org/C9893847","wikidata":"https://www.wikidata.org/wiki/Q1425625","display_name":"Reproducibility","level":2,"score":0.5197443962097168},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4760874807834625},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.47007113695144653},{"id":"https://openalex.org/C2986501211","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustic sensor","level":2,"score":0.422207772731781},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39006397128105164},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12075433135032654},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09255078434944153},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/bmei.2009.5305157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/bmei.2009.5305157","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 2nd International Conference on Biomedical Engineering and Informatics","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5299999713897705,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2004479291","https://openalex.org/W2015652743","https://openalex.org/W2016917049","https://openalex.org/W2104831863","https://openalex.org/W2135809071","https://openalex.org/W2169039171"],"related_works":["https://openalex.org/W2587892165","https://openalex.org/W2537716684","https://openalex.org/W2152087047","https://openalex.org/W2766999340","https://openalex.org/W2028268967","https://openalex.org/W2054124615","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4245281580"],"abstract_inverted_index":{"A":[0],"mass":[1],"sensor":[2,17,58],"based":[3],"on":[4],"thin":[5],"film":[6],"bulk":[7],"acoustic":[8],"resonator":[9,29],"(FBAR)":[10],"is":[11,18,31,46,52,59],"submitted":[12],"in":[13],"this":[14,42,67],"paper.":[15],"This":[16,56],"fabricated":[19],"by":[20,33],"standard":[21],"MEMS":[22],"process":[23],"as":[24,61],"back-etch":[25],"structure":[26],"and":[27,49],"its":[28],"curve":[30],"measured":[32],"Agilent":[34],"Vector":[35],"network":[36],"analyer.":[37],"The":[38,64],"results":[39],"show":[40],"that":[41],"sensor's":[43],"Q":[44,71],"factor":[45,72],"above":[47],"610":[48],"resonance":[50],"frequency":[51],"about":[53],"1608":[54],"MHz.":[55],"FBAR":[57],"applied":[60],"humidity":[62],"sensor.":[63],"reproducibility":[65],"of":[66],"sensor'":[68],"SI":[69],"land":[70],"are":[73],"evaluated.":[74]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}