{"id":"https://openalex.org/W2097235232","doi":"https://doi.org/10.1109/3dic.2015.7334620","title":"Processing active devices on Si interposer and impact on cost","display_name":"Processing active devices on Si interposer and impact on cost","publication_year":2015,"publication_date":"2015-08-01","ids":{"openalex":"https://openalex.org/W2097235232","doi":"https://doi.org/10.1109/3dic.2015.7334620","mag":"2097235232"},"language":"en","primary_location":{"id":"doi:10.1109/3dic.2015.7334620","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2015.7334620","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050757937","display_name":"Dimitrios Velenis","orcid":"https://orcid.org/0000-0001-7947-8098"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"D. Velenis","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004278657","display_name":"Mikael Detalle","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Detalle","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064166800","display_name":"Geert Hellings","orcid":"https://orcid.org/0000-0002-5376-2119"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Hellings","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111667011","display_name":"Mirko Scholz","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Scholz","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044629739","display_name":"Erik Jan Marinissen","orcid":"https://orcid.org/0000-0002-5058-8303"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E.J. Marinissen","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073931298","display_name":"Geert Van der Plas","orcid":"https://orcid.org/0000-0002-4975-6672"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Van der Plas","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071223809","display_name":"Antonio Manna","orcid":"https://orcid.org/0000-0001-9776-3300"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. La Manna","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087597143","display_name":"Andy Miller","orcid":"https://orcid.org/0000-0001-6103-1685"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Miller","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108124737","display_name":"D. Linten","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Linten","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051712390","display_name":"Eric Beyne","orcid":"https://orcid.org/0000-0002-3096-050X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E. Beyne","raw_affiliation_strings":["imec, Leuven, Belgium","IMEC, Kapeldreef 75, Leuven B 3001, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, Leuven B 3001, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5050757937"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.1973,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.58409153,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"TS11.2.1","last_page":"TS11.2.4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interposer","display_name":"Interposer","score":0.9851047992706299},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.425919771194458},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4173043966293335},{"id":"https://openalex.org/keywords/diode","display_name":"Diode","score":0.41339853405952454},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4051533639431},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.37204521894454956},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.32823583483695984},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.22282099723815918},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19767913222312927},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.12136763334274292}],"concepts":[{"id":"https://openalex.org/C158802814","wikidata":"https://www.wikidata.org/wiki/Q6056418","display_name":"Interposer","level":4,"score":0.9851047992706299},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.425919771194458},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4173043966293335},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.41339853405952454},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4051533639431},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37204521894454956},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.32823583483695984},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.22282099723815918},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19767913222312927},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12136763334274292},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic.2015.7334620","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2015.7334620","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1495055615","https://openalex.org/W1967647568","https://openalex.org/W2071897885","https://openalex.org/W2073725000","https://openalex.org/W2095838281","https://openalex.org/W2132155220","https://openalex.org/W2468016230","https://openalex.org/W6720045026"],"related_works":["https://openalex.org/W2037416628","https://openalex.org/W2073725000","https://openalex.org/W2789752821","https://openalex.org/W2205502757","https://openalex.org/W2235483886","https://openalex.org/W1480508001","https://openalex.org/W2097812662","https://openalex.org/W2887648165","https://openalex.org/W1586372630","https://openalex.org/W2410100461"],"abstract_inverted_index":{"Enhancing":[0],"the":[1,20,34,40,49,53,61,70,75,79,88],"functionality":[2,43],"of":[3,60,84,91],"interposer":[4,54,62,80],"substrates":[5],"by":[6],"incorporating":[7],"low-cost":[8],"active":[9,21,50,76],"devices":[10,22,51],"is":[11,31,44,96],"investigated":[12],"in":[13],"this":[14],"paper.":[15],"Different":[16],"processing":[17,29,37],"options":[18],"for":[19,48],"are":[23,55],"considered":[24],"and":[25,39,67],"their":[26],"impact":[27,83],"on":[28,52,87],"cost":[30,90],"evaluated.":[32],"Furthermore,":[33],"trade-off":[35],"between":[36],"complexity":[38],"enabled":[41],"device":[42],"investigated.":[45,97],"Two":[46],"applications":[47,86],"considered:":[56],"(i)":[57],"pre-bond":[58],"testing":[59],"dies":[63,77],"(including":[64],"TSV":[65],"interconnects),":[66],"(ii)":[68],"migrate":[69],"ESD":[71],"protection":[72],"diodes":[73],"from":[74],"to":[78],"substrate.":[81],"The":[82],"those":[85],"system":[89],"three":[92],"different":[93],"interposer-based":[94],"systems":[95]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}