{"id":"https://openalex.org/W7125615566","doi":"https://doi.org/10.1109/wsc68292.2025.11338987","title":"Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration","display_name":"Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration","publication_year":2025,"publication_date":"2025-12-07","ids":{"openalex":"https://openalex.org/W7125615566","doi":"https://doi.org/10.1109/wsc68292.2025.11338987"},"language":"en","primary_location":{"id":"doi:10.1109/wsc68292.2025.11338987","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc68292.2025.11338987","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"},"type":"review","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084485824","display_name":"Claude Yugma","orcid":"https://orcid.org/0000-0001-7749-0480"},"institutions":[{"id":"https://openalex.org/I3019848993","display_name":"Mines Saint-\u00c9tienne","ror":"https://ror.org/05a1dws80","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I205703379","https://openalex.org/I3019848993"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Claude Yugma","raw_affiliation_strings":["Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France","institution_ids":["https://openalex.org/I3019848993"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004868302","display_name":"Adrien Wartelle","orcid":"https://orcid.org/0000-0003-1471-0866"},"institutions":[{"id":"https://openalex.org/I3019848993","display_name":"Mines Saint-\u00c9tienne","ror":"https://ror.org/05a1dws80","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I205703379","https://openalex.org/I3019848993"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Adrien Wartelle","raw_affiliation_strings":["Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France","institution_ids":["https://openalex.org/I3019848993"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5123766811","display_name":"St\u00e9phane Dauz\u00e8re-P\u00e9r\u00e8s","orcid":null},"institutions":[{"id":"https://openalex.org/I3019848993","display_name":"Mines Saint-\u00c9tienne","ror":"https://ror.org/05a1dws80","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I205703379","https://openalex.org/I3019848993"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"St\u00e9phane Dauz\u00e8re-P\u00e9r\u00e8s","raw_affiliation_strings":["Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. Clermont Auvergne,Mines Saint-Étienne,Gardanne,France","institution_ids":["https://openalex.org/I3019848993"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5123742185","display_name":"Pascal Robert","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Pascal Robert","raw_affiliation_strings":["STMicroelectronics,Crolles,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Crolles,France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091191136","display_name":"Renaud Roussel","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Renaud Roussel","raw_affiliation_strings":["STMicroelectronics,Crolles,France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Crolles,France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053739955","display_name":"J. J. R. M. van Heugten","orcid":"https://orcid.org/0000-0003-1596-3240"},"institutions":[{"id":"https://openalex.org/I4210150247","display_name":"Santa Cruz County Office of Education","ror":"https://ror.org/05dqak117","country_code":"US","type":"government","lineage":["https://openalex.org/I4210150247"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jasper van Heugten","raw_affiliation_strings":["Minds.ai,Santa Cruz,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Minds.ai,Santa Cruz,CA,USA","institution_ids":["https://openalex.org/I4210150247"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005712831","display_name":"T.-E. Korabi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150247","display_name":"Santa Cruz County Office of Education","ror":"https://ror.org/05dqak117","country_code":"US","type":"government","lineage":["https://openalex.org/I4210150247"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Taki-Eddine Korabi","raw_affiliation_strings":["Minds.ai,Santa Cruz,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Minds.ai,Santa Cruz,CA,USA","institution_ids":["https://openalex.org/I4210150247"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.41099476,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"12"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.5454999804496765,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.5454999804496765,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.05380000174045563,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11512","display_name":"Anomaly Detection Techniques and Applications","score":0.02850000001490116,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/anomaly","display_name":"Anomaly (physics)","score":0.44780001044273376},{"id":"https://openalex.org/keywords/anomaly-detection","display_name":"Anomaly detection","score":0.349700003862381},{"id":"https://openalex.org/keywords/stability","display_name":"Stability (learning theory)","score":0.2540000081062317},{"id":"https://openalex.org/keywords/component","display_name":"Component (thermodynamics)","score":0.24310000240802765},{"id":"https://openalex.org/keywords/mathematical-model","display_name":"Mathematical model","score":0.2425999939441681}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5407999753952026},{"id":"https://openalex.org/C12997251","wikidata":"https://www.wikidata.org/wiki/Q567560","display_name":"Anomaly (physics)","level":2,"score":0.44780001044273376},{"id":"https://openalex.org/C739882","wikidata":"https://www.wikidata.org/wiki/Q3560506","display_name":"Anomaly detection","level":2,"score":0.349700003862381},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.31150001287460327},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.26409998536109924},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2632000148296356},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.2540000081062317},{"id":"https://openalex.org/C168167062","wikidata":"https://www.wikidata.org/wiki/Q1117970","display_name":"Component (thermodynamics)","level":2,"score":0.24310000240802765},{"id":"https://openalex.org/C76969082","wikidata":"https://www.wikidata.org/wiki/Q486902","display_name":"Mathematical model","level":2,"score":0.2425999939441681},{"id":"https://openalex.org/C143724316","wikidata":"https://www.wikidata.org/wiki/Q312468","display_name":"Series (stratigraphy)","level":2,"score":0.23010000586509705}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/wsc68292.2025.11338987","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc68292.2025.11338987","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-05505277v1","is_oa":false,"landing_page_url":"https://hal.science/hal-05505277","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2025 Winter Simulation Conference (WSC), Dec 2025, Seattle, France. pp.1-12, ⟨10.1109/WSC68292.2025.11338987⟩","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1519242541","https://openalex.org/W1972049813","https://openalex.org/W2017128157","https://openalex.org/W2020851875","https://openalex.org/W2052279492","https://openalex.org/W2058135872","https://openalex.org/W2065476942","https://openalex.org/W2101797107","https://openalex.org/W2109341366","https://openalex.org/W2254884657","https://openalex.org/W2781476508","https://openalex.org/W2945357379","https://openalex.org/W2982689699","https://openalex.org/W3015960835","https://openalex.org/W3139550584","https://openalex.org/W3194053260","https://openalex.org/W4307291503","https://openalex.org/W4312112698","https://openalex.org/W4380987854","https://openalex.org/W4389390585"],"related_works":[],"abstract_inverted_index":{"International":[0],"audience":[1]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2026-01-25T00:00:00"}