{"id":"https://openalex.org/W4251619750","doi":"https://doi.org/10.1109/wsc.2016.7822308","title":"Optimizing capacity assignment of multiple identical metrology tools","display_name":"Optimizing capacity assignment of multiple identical metrology tools","publication_year":2016,"publication_date":"2016-12-01","ids":{"openalex":"https://openalex.org/W4251619750","doi":"https://doi.org/10.1109/wsc.2016.7822308"},"language":"en","primary_location":{"id":"doi:10.1109/wsc.2016.7822308","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2016.7822308","pdf_url":null,"source":{"id":"https://openalex.org/S4363607936","display_name":"2016 Winter Simulation Conference (WSC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028102263","display_name":"St\u00e9phane Dauz\u00e8re\u2010P\u00e9r\u00e8s","orcid":"https://orcid.org/0000-0002-3566-3248"},"institutions":[{"id":"https://openalex.org/I4210099416","display_name":"Laboratoire d'Informatique, de Mod\u00e9lisation et d'Optimisation des Syst\u00e8mes","ror":"https://ror.org/00t3fpp34","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I198244214","https://openalex.org/I198244214","https://openalex.org/I203339264","https://openalex.org/I205703379","https://openalex.org/I3019848993","https://openalex.org/I4210099416","https://openalex.org/I4210123221","https://openalex.org/I4210159245","https://openalex.org/I4387154249"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Stephane Dauzere-Peres","raw_affiliation_strings":["Department of Manufacturing Sciences and Logistics, LIMOS, Gardanne, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Manufacturing Sciences and Logistics, LIMOS, Gardanne, FRANCE","institution_ids":["https://openalex.org/I4210099416"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010563443","display_name":"Michael Hassoun","orcid":"https://orcid.org/0000-0002-3926-261X"},"institutions":[{"id":"https://openalex.org/I52170813","display_name":"Ariel University","ror":"https://ror.org/03nz8qe97","country_code":"IL","type":"education","lineage":["https://openalex.org/I52170813"]}],"countries":["IL"],"is_corresponding":false,"raw_author_name":"Michael Hassoun","raw_affiliation_strings":["Department of Industrial Engineering and Management, Ariel University, Ariel, ISRAEL"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, Ariel University, Ariel, ISRAEL","institution_ids":["https://openalex.org/I52170813"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014015576","display_name":"Alejandro Sendon","orcid":null},"institutions":[{"id":"https://openalex.org/I4210099416","display_name":"Laboratoire d'Informatique, de Mod\u00e9lisation et d'Optimisation des Syst\u00e8mes","ror":"https://ror.org/00t3fpp34","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I198244214","https://openalex.org/I198244214","https://openalex.org/I203339264","https://openalex.org/I205703379","https://openalex.org/I3019848993","https://openalex.org/I4210099416","https://openalex.org/I4210123221","https://openalex.org/I4210159245","https://openalex.org/I4387154249"]},{"id":"https://openalex.org/I4210106035","display_name":"STMicroelectronics (United States)","ror":"https://ror.org/01f8c3y78","country_code":"US","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210106035"]}],"countries":["FR","US"],"is_corresponding":false,"raw_author_name":"Alejandro Sendon","raw_affiliation_strings":["Department of Manufacturing Sciences and Logistics, LIMOS, Gardanne, FRANCE","STMicroelectronics, Rousset, FRANCE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Manufacturing Sciences and Logistics, LIMOS, Gardanne, FRANCE","institution_ids":["https://openalex.org/I4210099416"]},{"raw_affiliation_string":"STMicroelectronics, Rousset, FRANCE","institution_ids":["https://openalex.org/I4210106035"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6415,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.73239437,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"2709","last_page":"2718"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.982200026512146,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9150000214576721,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/knapsack-problem","display_name":"Knapsack problem","score":0.9127415418624878},{"id":"https://openalex.org/keywords/heuristics","display_name":"Heuristics","score":0.8121999502182007},{"id":"https://openalex.org/keywords/continuous-knapsack-problem","display_name":"Continuous knapsack problem","score":0.7388448715209961},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.6756381988525391},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.6717782616615295},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.6558429002761841},{"id":"https://openalex.org/keywords/solver","display_name":"Solver","score":0.5844340324401855},{"id":"https://openalex.org/keywords/greedy-algorithm","display_name":"Greedy algorithm","score":0.5755602717399597},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.550180196762085},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.4135955572128296},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.27191805839538574},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.255856990814209},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18801453709602356}],"concepts":[{"id":"https://openalex.org/C113138325","wikidata":"https://www.wikidata.org/wiki/Q864457","display_name":"Knapsack problem","level":2,"score":0.9127415418624878},{"id":"https://openalex.org/C127705205","wikidata":"https://www.wikidata.org/wiki/Q5748245","display_name":"Heuristics","level":2,"score":0.8121999502182007},{"id":"https://openalex.org/C94569963","wikidata":"https://www.wikidata.org/wiki/Q5165487","display_name":"Continuous knapsack problem","level":3,"score":0.7388448715209961},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.6756381988525391},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.6717782616615295},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.6558429002761841},{"id":"https://openalex.org/C2778770139","wikidata":"https://www.wikidata.org/wiki/Q1966904","display_name":"Solver","level":2,"score":0.5844340324401855},{"id":"https://openalex.org/C51823790","wikidata":"https://www.wikidata.org/wiki/Q504353","display_name":"Greedy algorithm","level":2,"score":0.5755602717399597},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.550180196762085},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.4135955572128296},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.27191805839538574},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.255856990814209},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18801453709602356},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/wsc.2016.7822308","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2016.7822308","pdf_url":null,"source":{"id":"https://openalex.org/S4363607936","display_name":"2016 Winter Simulation Conference (WSC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:emse-01792257v1","is_oa":false,"landing_page_url":"https://hal-emse.ccsd.cnrs.fr/emse-01792257","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2016 Winter Simulation Conference (WSC), Dec 2016, Washington, United States. ⟨10.1109/WSC.2016.7822308⟩","raw_type":"Conference papers"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W19040241","https://openalex.org/W2004996987","https://openalex.org/W2020460778","https://openalex.org/W2049368522","https://openalex.org/W2086168649","https://openalex.org/W2118028526","https://openalex.org/W2135814502","https://openalex.org/W2141524474","https://openalex.org/W2150452512","https://openalex.org/W2151186428","https://openalex.org/W2407510775","https://openalex.org/W4230846784","https://openalex.org/W4256331110","https://openalex.org/W6600790145"],"related_works":["https://openalex.org/W246960280","https://openalex.org/W2393014972","https://openalex.org/W2357796514","https://openalex.org/W2357595179","https://openalex.org/W2169800510","https://openalex.org/W2351136238","https://openalex.org/W3171554204","https://openalex.org/W3199776955","https://openalex.org/W3112089036","https://openalex.org/W2167807475"],"abstract_inverted_index":{"In":[0],"modern":[1],"semiconductor":[2],"manufacturing":[3],"facilities,":[4],"metrology":[5,29,58],"capacity":[6,25],"is":[7,53,63],"becoming":[8],"limited":[9],"because":[10],"of":[11,21,26,37,49,120],"the":[12,19,24,35,47,75,81,94,118,121],"high":[13],"equipment":[14],"cost.":[15],"This":[16],"paper":[17],"studies":[18],"problem":[20,62],"optimally":[22],"assigning":[23],"multiple":[27],"identical":[28],"tools":[30],"in":[31,93],"order":[32],"to":[33,55,89,114],"minimize":[34],"risk":[36],"defective":[38],"wafers":[39],"on":[40,110],"heterogeneous":[41],"production":[42,51],"machines.":[43],"We":[44],"assume":[45],"that":[46],"output":[48],"each":[50],"machine":[52],"assigned":[54],"only":[56],"one":[57],"tool.":[59],"The":[60],"resulting":[61],"formulated":[64],"as":[65],"a":[66,127],"Multiple":[67,69,76,82],"Choice":[68,77],"Knapsack":[70,78,83],"Problem":[71,79,84],"(MCMKP),":[72],"which":[73],"combines":[74],"and":[80,85,99,116],"does":[86],"not":[87],"appear":[88],"have":[90],"been":[91],"studied":[92],"literature.":[95],"A":[96],"greedy":[97],"heuristic":[98,102],"an":[100],"improving":[101],"are":[103,108],"also":[104],"proposed.":[105],"Numerical":[106],"experiments":[107],"performed":[109],"randomly":[111],"generated":[112],"instances":[113],"analyze":[115],"compare":[117],"solutions":[119,124],"heuristics":[122],"with":[123,126],"obtained":[125],"standard":[128],"solver.":[129]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}