{"id":"https://openalex.org/W4244742231","doi":"https://doi.org/10.1109/wsc.2009.5429266","title":"Evaluation of modeling, simulation and optimization approaches for work flow management in semiconductor manufacturing","display_name":"Evaluation of modeling, simulation and optimization approaches for work flow management in semiconductor manufacturing","publication_year":2009,"publication_date":"2009-12-01","ids":{"openalex":"https://openalex.org/W4244742231","doi":"https://doi.org/10.1109/wsc.2009.5429266"},"language":"en","primary_location":{"id":"doi:10.1109/wsc.2009.5429266","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2009.5429266","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2009 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051693933","display_name":"Robert Kohn","orcid":"https://orcid.org/0000-0002-3733-1474"},"institutions":[{"id":"https://openalex.org/I4210165059","display_name":"Hochschule f\u00fcr Technik und Wirtschaft Dresden \u2013 University of Applied Sciences","ror":"https://ror.org/05q5pk319","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210165059"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Robert Kohn","raw_affiliation_strings":["Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany","institution_ids":["https://openalex.org/I4210165059","https://openalex.org/I78650965"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080430996","display_name":"Daniel Noack","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165059","display_name":"Hochschule f\u00fcr Technik und Wirtschaft Dresden \u2013 University of Applied Sciences","ror":"https://ror.org/05q5pk319","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210165059"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Daniel Noack","raw_affiliation_strings":["Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany","institution_ids":["https://openalex.org/I4210165059","https://openalex.org/I78650965"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011888111","display_name":"Marcin Mosinski","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165059","display_name":"Hochschule f\u00fcr Technik und Wirtschaft Dresden \u2013 University of Applied Sciences","ror":"https://ror.org/05q5pk319","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210165059"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcin Mosinski","raw_affiliation_strings":["Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany","institution_ids":["https://openalex.org/I4210165059","https://openalex.org/I78650965"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005082141","display_name":"Zhugen Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165059","display_name":"Hochschule f\u00fcr Technik und Wirtschaft Dresden \u2013 University of Applied Sciences","ror":"https://ror.org/05q5pk319","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210165059"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Zhugen Zhou","raw_affiliation_strings":["Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany","institution_ids":["https://openalex.org/I4210165059","https://openalex.org/I78650965"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110728745","display_name":"Oliver Rose","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165059","display_name":"Hochschule f\u00fcr Technik und Wirtschaft Dresden \u2013 University of Applied Sciences","ror":"https://ror.org/05q5pk319","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210165059"]},{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Oliver Rose","raw_affiliation_strings":["Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Applied Computer Science, Dresden University of Technology, Dresden, Germany","institution_ids":["https://openalex.org/I4210165059","https://openalex.org/I78650965"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.7817,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.93521237,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"40","issue":null,"first_page":"1592","last_page":"1600"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11195","display_name":"Simulation Techniques and Applications","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9908000230789185,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6201544404029846},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.5921355485916138},{"id":"https://openalex.org/keywords/work-flow","display_name":"Work flow","score":0.5768862962722778},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.5592620372772217},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.532968282699585},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.4867989718914032},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4678904116153717},{"id":"https://openalex.org/keywords/position-paper","display_name":"Position paper","score":0.4637473225593567},{"id":"https://openalex.org/keywords/semiconductor-industry","display_name":"Semiconductor industry","score":0.4539766311645508},{"id":"https://openalex.org/keywords/simulation-modeling","display_name":"Simulation modeling","score":0.4251728057861328},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.4144285023212433},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.413700133562088},{"id":"https://openalex.org/keywords/engineering-management","display_name":"Engineering management","score":0.3365544080734253},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23720458149909973},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1365240514278412},{"id":"https://openalex.org/keywords/business","display_name":"Business","score":0.07921108603477478}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6201544404029846},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.5921355485916138},{"id":"https://openalex.org/C2985179714","wikidata":"https://www.wikidata.org/wiki/Q627335","display_name":"Work flow","level":2,"score":0.5768862962722778},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.5592620372772217},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.532968282699585},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.4867989718914032},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4678904116153717},{"id":"https://openalex.org/C78780964","wikidata":"https://www.wikidata.org/wiki/Q7233193","display_name":"Position paper","level":2,"score":0.4637473225593567},{"id":"https://openalex.org/C2987888538","wikidata":"https://www.wikidata.org/wiki/Q2986369","display_name":"Semiconductor industry","level":2,"score":0.4539766311645508},{"id":"https://openalex.org/C108215451","wikidata":"https://www.wikidata.org/wiki/Q7263963","display_name":"Simulation modeling","level":2,"score":0.4251728057861328},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.4144285023212433},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.413700133562088},{"id":"https://openalex.org/C110354214","wikidata":"https://www.wikidata.org/wiki/Q6314146","display_name":"Engineering management","level":1,"score":0.3365544080734253},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23720458149909973},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1365240514278412},{"id":"https://openalex.org/C144133560","wikidata":"https://www.wikidata.org/wiki/Q4830453","display_name":"Business","level":0,"score":0.07921108603477478},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C136764020","wikidata":"https://www.wikidata.org/wiki/Q466","display_name":"World Wide Web","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C175444787","wikidata":"https://www.wikidata.org/wiki/Q39072","display_name":"Microeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/wsc.2009.5429266","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2009.5429266","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2009 Winter Simulation Conference (WSC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4699999988079071,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W143046730","https://openalex.org/W2005864863","https://openalex.org/W2131617151","https://openalex.org/W2489782956","https://openalex.org/W3141262036","https://openalex.org/W3142494592","https://openalex.org/W3142546209","https://openalex.org/W4230715394","https://openalex.org/W4236614712","https://openalex.org/W6605904684","https://openalex.org/W6677096361","https://openalex.org/W6679712532"],"related_works":["https://openalex.org/W1979703647","https://openalex.org/W2796831252","https://openalex.org/W2917828100","https://openalex.org/W2146075642","https://openalex.org/W2361830001","https://openalex.org/W1529487987","https://openalex.org/W1483525138","https://openalex.org/W2093118422","https://openalex.org/W2359225346","https://openalex.org/W1641453707"],"abstract_inverted_index":{"Work":[0],"flow":[1,56],"management":[2],"is":[3,60],"one":[4],"of":[5,15,31,48,68],"the":[6,11,26,46,66],"key":[7],"elements":[8],"that":[9],"bias":[10],"economic":[12],"competitive":[13],"position":[14],"a":[16],"fabrication":[17],"facility,":[18],"especially":[19],"in":[20,37,45,65,73,97],"semiconductor":[21,38],"manufacturing.":[22],"This":[23,79],"paper":[24],"presents":[25],"goals,":[27],"methods":[28,64],"and":[29,51,71],"challenges":[30],"our":[32],"collaborative":[33],"project":[34,41,80],"with":[35],"partners":[36],"industry.":[39],"The":[40],"activities":[42],"concern":[43],"topics":[44],"disciplines":[47],"modeling,":[49,69],"simulation":[50,70,87],"optimization":[52,72,92],"classed":[53],"among":[54],"work":[55],"management.":[57],"Our":[58],"goal":[59],"to":[61],"evaluate":[62],"suitable":[63],"area":[67],"use":[74],"cases":[75],"given":[76],"by":[77],"reality.":[78],"considers":[81],"future":[82],"performance":[83],"prediction":[84],"using":[85],"different":[86],"techniques.":[88],"In":[89],"addition":[90],"several":[91],"approaches":[93],"will":[94],"be":[95],"evaluated":[96],"this":[98],"project.":[99]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-08-01T09:00:35.917206","created_date":"2025-10-10T00:00:00"}