{"id":"https://openalex.org/W2107655195","doi":"https://doi.org/10.1109/wsc.2003.1261591","title":"Use of discrete event simulation to analyze dispatch policies of an equipment group in semiconductor fab","display_name":"Use of discrete event simulation to analyze dispatch policies of an equipment group in semiconductor fab","publication_year":2004,"publication_date":"2004-08-23","ids":{"openalex":"https://openalex.org/W2107655195","doi":"https://doi.org/10.1109/wsc.2003.1261591","mag":"2107655195"},"language":"en","primary_location":{"id":"doi:10.1109/wsc.2003.1261591","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2003.1261591","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No.03EX693)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063660393","display_name":"Raja Sunkara","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"R. Sunkara","raw_affiliation_strings":["Manufachning Systems Engineering, Corporate Information Services, National Semiconductor Corporation, Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Manufachning Systems Engineering, Corporate Information Services, National Semiconductor Corporation, Santa Clara, CA, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5074697921","display_name":"Ramesh R. Rao","orcid":"https://orcid.org/0000-0002-6523-0208"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ramesh Rao","raw_affiliation_strings":["Manufacturing Decision Tools, Manufacturing Engineering, National Semiconductor Corporation, Arlington, TX, USA"],"affiliations":[{"raw_affiliation_string":"Manufacturing Decision Tools, Manufacturing Engineering, National Semiconductor Corporation, Arlington, TX, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5063660393"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.6782,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.85928226,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"7 0","issue":null,"first_page":"1474","last_page":"1479"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13886","display_name":"Operations Management Techniques","score":0.9904000163078308,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/discrete-event-simulation","display_name":"Discrete event simulation","score":0.7523176670074463},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.7403791546821594},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6850417256355286},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6684348583221436},{"id":"https://openalex.org/keywords/factory","display_name":"Factory (object-oriented programming)","score":0.6280171275138855},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5848191380500793},{"id":"https://openalex.org/keywords/set","display_name":"Set (abstract data type)","score":0.5290939807891846},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.49684765934944153},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.4808026850223541},{"id":"https://openalex.org/keywords/event","display_name":"Event (particle physics)","score":0.46835532784461975},{"id":"https://openalex.org/keywords/modeling-and-simulation","display_name":"Modeling and simulation","score":0.457030713558197},{"id":"https://openalex.org/keywords/simulation-software","display_name":"Simulation software","score":0.455111563205719},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.4303137958049774},{"id":"https://openalex.org/keywords/duration","display_name":"Duration (music)","score":0.4153482913970947},{"id":"https://openalex.org/keywords/process-management","display_name":"Process management","score":0.3902457058429718},{"id":"https://openalex.org/keywords/software-engineering","display_name":"Software engineering","score":0.3404580056667328},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3356687128543854},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22883421182632446},{"id":"https://openalex.org/keywords/computer-security","display_name":"Computer security","score":0.12378516793251038}],"concepts":[{"id":"https://openalex.org/C147203929","wikidata":"https://www.wikidata.org/wiki/Q574814","display_name":"Discrete event simulation","level":2,"score":0.7523176670074463},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.7403791546821594},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6850417256355286},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6684348583221436},{"id":"https://openalex.org/C40149104","wikidata":"https://www.wikidata.org/wiki/Q5620977","display_name":"Factory (object-oriented programming)","level":2,"score":0.6280171275138855},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5848191380500793},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.5290939807891846},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.49684765934944153},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.4808026850223541},{"id":"https://openalex.org/C2779662365","wikidata":"https://www.wikidata.org/wiki/Q5416694","display_name":"Event (particle physics)","level":2,"score":0.46835532784461975},{"id":"https://openalex.org/C167343916","wikidata":"https://www.wikidata.org/wiki/Q6888384","display_name":"Modeling and simulation","level":2,"score":0.457030713558197},{"id":"https://openalex.org/C91757755","wikidata":"https://www.wikidata.org/wiki/Q11121294","display_name":"Simulation software","level":3,"score":0.455111563205719},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.4303137958049774},{"id":"https://openalex.org/C112758219","wikidata":"https://www.wikidata.org/wiki/Q16038819","display_name":"Duration (music)","level":2,"score":0.4153482913970947},{"id":"https://openalex.org/C195094911","wikidata":"https://www.wikidata.org/wiki/Q14167904","display_name":"Process management","level":1,"score":0.3902457058429718},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.3404580056667328},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3356687128543854},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22883421182632446},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.12378516793251038},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C124952713","wikidata":"https://www.wikidata.org/wiki/Q8242","display_name":"Literature","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/wsc.2003.1261591","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2003.1261591","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No.03EX693)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1846746796","https://openalex.org/W1996460115","https://openalex.org/W2029176045","https://openalex.org/W2037533467","https://openalex.org/W2096662627","https://openalex.org/W2157745125","https://openalex.org/W2165375541","https://openalex.org/W4240283284","https://openalex.org/W4252984677","https://openalex.org/W4253520419"],"related_works":["https://openalex.org/W1849611347","https://openalex.org/W3214930246","https://openalex.org/W3129999610","https://openalex.org/W4320737835","https://openalex.org/W3133881118","https://openalex.org/W2129803428","https://openalex.org/W4229634845","https://openalex.org/W2021004781","https://openalex.org/W2170887603","https://openalex.org/W2081452224"],"abstract_inverted_index":{"We":[0],"describe":[1],"a":[2,13,40,51,88,97],"methodology":[3,68],"to":[4,81,110,118],"model":[5,23],"complex":[6,32,107],"operation":[7,33],"and":[8,29,34,59],"process":[9,35,119],"driven":[10,36],"practices":[11,47,109],"using":[12],"discrete":[14],"event":[15],"simulator.":[16],"This":[17],"level":[18],"of":[19,31,45,53,57,76,94,106,114],"detail":[20],"in":[21,39,91],"the":[22,27,54,74,92,104,112],"is":[24,48],"critical":[25],"for":[26],"analyses":[28],"design":[30],"dispatch":[37,78],"policies":[38,79],"semiconductor":[41],"fab.":[42],"The":[43,67,84],"modeling":[44,85,105],"these":[46],"typically":[49],"not":[50],"part":[52],"general":[55],"set":[56],"rules":[58],"methods":[60],"provided":[61],"by":[62],"commercially":[63],"available":[64],"simulation":[65,95],"software.":[66],"provides":[69],"key":[70,89],"information":[71],"that":[72],"simplifies":[73],"development":[75],"suitable":[77],"subject":[80,117],"factory":[82],"dynamics.":[83],"philosophy":[86],"plays":[87],"role":[90],"success":[93],"as":[96],"culture.":[98],"As":[99],"an":[100],"example,":[101],"we":[102],"present":[103],"floor":[108],"analyze":[111],"impact":[113],"setup":[115],"changes":[116],"restrictions.":[120]},"counts_by_year":[{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}