{"id":"https://openalex.org/W2139098598","doi":"https://doi.org/10.1109/wsc.2003.1261573","title":"A simulation-based design framework for automated material handling systems in 300 mm fabrication facilities","display_name":"A simulation-based design framework for automated material handling systems in 300 mm fabrication facilities","publication_year":2004,"publication_date":"2004-08-23","ids":{"openalex":"https://openalex.org/W2139098598","doi":"https://doi.org/10.1109/wsc.2003.1261573","mag":"2139098598"},"language":"en","primary_location":{"id":"doi:10.1109/wsc.2003.1261573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2003.1261573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No.03EX693)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5035383111","display_name":"Dima Nazzal","orcid":"https://orcid.org/0000-0003-1137-2603"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"D. Nazzal","raw_affiliation_strings":["Keck Virtual Factory Laboratory, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Ind. & Syst. Eng., Georgia Inst. of Technol., Atlanta, GA, USA"],"affiliations":[{"raw_affiliation_string":"Keck Virtual Factory Laboratory, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Ind. & Syst. Eng., Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5059478089","display_name":"Douglas A. Bodner","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.A. Bodner","raw_affiliation_strings":["Keck Virtual Factory Laboratory, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Ind. & Syst. Eng., Georgia Inst. of Technol., Atlanta, GA, USA"],"affiliations":[{"raw_affiliation_string":"Keck Virtual Factory Laboratory, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Ind. & Syst. Eng., Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5035383111"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":5.0354,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.94610448,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1351","last_page":"1359"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12782","display_name":"Assembly Line Balancing Optimization","score":0.9891999959945679,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11006","display_name":"BIM and Construction Integration","score":0.9817000031471252,"subfield":{"id":"https://openalex.org/subfields/2215","display_name":"Building and Construction"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.7038280367851257},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6144818663597107},{"id":"https://openalex.org/keywords/systems-engineering","display_name":"Systems engineering","score":0.5730520486831665},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.567510187625885},{"id":"https://openalex.org/keywords/material-handling","display_name":"Material handling","score":0.544017493724823},{"id":"https://openalex.org/keywords/data-modeling","display_name":"Data modeling","score":0.48594439029693604},{"id":"https://openalex.org/keywords/process-design","display_name":"Process design","score":0.44727545976638794},{"id":"https://openalex.org/keywords/design-process","display_name":"Design process","score":0.44403427839279175},{"id":"https://openalex.org/keywords/architectural-design","display_name":"Architectural design","score":0.4348088502883911},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.3711279630661011},{"id":"https://openalex.org/keywords/software-engineering","display_name":"Software engineering","score":0.350780725479126},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.33496731519699097},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.30959582328796387},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.25171777606010437},{"id":"https://openalex.org/keywords/work-in-process","display_name":"Work in process","score":0.23598885536193848},{"id":"https://openalex.org/keywords/architecture","display_name":"Architecture","score":0.1286015510559082}],"concepts":[{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.7038280367851257},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6144818663597107},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.5730520486831665},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.567510187625885},{"id":"https://openalex.org/C2983137510","wikidata":"https://www.wikidata.org/wiki/Q1413942","display_name":"Material handling","level":2,"score":0.544017493724823},{"id":"https://openalex.org/C67186912","wikidata":"https://www.wikidata.org/wiki/Q367664","display_name":"Data modeling","level":2,"score":0.48594439029693604},{"id":"https://openalex.org/C55396564","wikidata":"https://www.wikidata.org/wiki/Q3084971","display_name":"Process design","level":3,"score":0.44727545976638794},{"id":"https://openalex.org/C48262172","wikidata":"https://www.wikidata.org/wiki/Q16908765","display_name":"Design process","level":3,"score":0.44403427839279175},{"id":"https://openalex.org/C2984241579","wikidata":"https://www.wikidata.org/wiki/Q323611","display_name":"Architectural design","level":3,"score":0.4348088502883911},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.3711279630661011},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.350780725479126},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.33496731519699097},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.30959582328796387},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.25171777606010437},{"id":"https://openalex.org/C174998907","wikidata":"https://www.wikidata.org/wiki/Q357662","display_name":"Work in process","level":2,"score":0.23598885536193848},{"id":"https://openalex.org/C123657996","wikidata":"https://www.wikidata.org/wiki/Q12271","display_name":"Architecture","level":2,"score":0.1286015510559082},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0},{"id":"https://openalex.org/C153349607","wikidata":"https://www.wikidata.org/wiki/Q36649","display_name":"Visual arts","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/wsc.2003.1261573","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wsc.2003.1261573","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2003 International Conference on Machine Learning and Cybernetics (IEEE Cat. No.03EX693)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1522304902","https://openalex.org/W1530454369","https://openalex.org/W1799192719","https://openalex.org/W1963335881","https://openalex.org/W2016357056","https://openalex.org/W2074987698","https://openalex.org/W2096009907","https://openalex.org/W2117941900","https://openalex.org/W2120934944","https://openalex.org/W2135214386","https://openalex.org/W2139217450","https://openalex.org/W2141394065","https://openalex.org/W2166427694","https://openalex.org/W2473060476","https://openalex.org/W4245861165","https://openalex.org/W4252391269","https://openalex.org/W4285719527","https://openalex.org/W6677528631","https://openalex.org/W6720707531"],"related_works":["https://openalex.org/W2016357056","https://openalex.org/W2539174448","https://openalex.org/W4240972148","https://openalex.org/W2056574774","https://openalex.org/W2111778165","https://openalex.org/W2102015451","https://openalex.org/W2783741649","https://openalex.org/W2123302716","https://openalex.org/W2171856390","https://openalex.org/W3154519833"],"abstract_inverted_index":{"We":[0,109],"describe":[1,110],"a":[2,81],"methodology":[3],"to":[4,35,57,89,113],"tackle":[5],"the":[6,25,36,64,86,90,99],"problem":[7],"of":[8,44,93],"designing":[9],"automated":[10],"material":[11],"handling":[12],"systems":[13],"(AMHS)":[14],"for":[15],"300":[16],"mm":[17],"wafer":[18],"fabrication":[19],"facilities.":[20],"The":[21,47],"proposed":[22],"framework":[23],"divides":[24],"design":[26,60,69,74,100],"process":[27],"into":[28],"two":[29],"levels:":[30],"architectural":[31,65,68],"and":[32,50,78,95],"elaborative.":[33],"Prior":[34],"design,":[37],"fab":[38,51],"data":[39,49,53],"are":[40,54,71,76,103],"preprocessed":[41],"using":[42,80],"simulation":[43,82],"manufacturing":[45],"operations.":[46],"output":[48],"requirements":[52],"then":[55],"profiled":[56],"aid":[58],"in":[59,115],"decision":[61],"making":[62],"at":[63],"level.":[66],"Once":[67],"decisions":[70,75],"made,":[72],"lower-level":[73],"made":[77],"analyzed":[79],"model":[83,106],"that":[84],"incorporates":[85],"AMHS.":[87],"Due":[88],"potential":[91],"number":[92],"alternatives":[94],"time":[96],"constraints":[97],"on":[98],"process,":[101],"we":[102],"exploring":[104],"rapid":[105],"generation":[107],"methods.":[108],"our":[111],"progress":[112],"date":[114],"creating":[116],"this":[117],"methodology.":[118]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-02-25T21:11:00.739837","created_date":"2025-10-10T00:00:00"}
