{"id":"https://openalex.org/W4417131265","doi":"https://doi.org/10.1109/wf-iot64238.2025.11270477","title":"Chip-Level Optomechanical Torque Sensor with High Sensitivity","display_name":"Chip-Level Optomechanical Torque Sensor with High Sensitivity","publication_year":2025,"publication_date":"2025-10-27","ids":{"openalex":"https://openalex.org/W4417131265","doi":"https://doi.org/10.1109/wf-iot64238.2025.11270477"},"language":null,"primary_location":{"id":"doi:10.1109/wf-iot64238.2025.11270477","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wf-iot64238.2025.11270477","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 11th World Forum on Internet of Things (WF-IoT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013366809","display_name":"Zhe Li","orcid":"https://orcid.org/0000-0001-7897-2617"},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zhe Li","raw_affiliation_strings":["Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015779447","display_name":"Yiyun Peng","orcid":"https://orcid.org/0009-0001-7411-7266"},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Youxing Peng","raw_affiliation_strings":["Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026300083","display_name":"Pengju Kuang","orcid":null},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pengju Kuang","raw_affiliation_strings":["Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100398531","display_name":"Yifan Wang","orcid":"https://orcid.org/0000-0001-6927-3638"},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yifan Wang","raw_affiliation_strings":["Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107828897","display_name":"Kai Chen","orcid":"https://orcid.org/0000-0002-7733-1866"},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Chen","raw_affiliation_strings":["University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101823017","display_name":"Yongjun Huang","orcid":"https://orcid.org/0000-0002-5069-6451"},"institutions":[{"id":"https://openalex.org/I150229711","display_name":"University of Electronic Science and Technology of China","ror":"https://ror.org/04qr3zq92","country_code":"CN","type":"education","lineage":["https://openalex.org/I150229711"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yongjun Huang","raw_affiliation_strings":["Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China"],"affiliations":[{"raw_affiliation_string":"Electronic Test Technology and Instrument Institute University of Electronic Science and Technology of China,School of Automation Engineering,Chengdu,China","institution_ids":["https://openalex.org/I150229711"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5013366809"],"corresponding_institution_ids":["https://openalex.org/I150229711"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.32886355,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9570000171661377,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9570000171661377,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.00839999970048666,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.003700000001117587,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.642300009727478},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6360999941825867},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6219000220298767},{"id":"https://openalex.org/keywords/torque","display_name":"Torque","score":0.5935999751091003},{"id":"https://openalex.org/keywords/miniaturization","display_name":"Miniaturization","score":0.5756999850273132},{"id":"https://openalex.org/keywords/photonic-crystal","display_name":"Photonic crystal","score":0.5094000101089478},{"id":"https://openalex.org/keywords/optomechanics","display_name":"Optomechanics","score":0.4487999975681305},{"id":"https://openalex.org/keywords/modulation","display_name":"Modulation (music)","score":0.42669999599456787},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.41769999265670776}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.642300009727478},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6360999941825867},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6219000220298767},{"id":"https://openalex.org/C144171764","wikidata":"https://www.wikidata.org/wiki/Q48103","display_name":"Torque","level":2,"score":0.5935999751091003},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.5756999850273132},{"id":"https://openalex.org/C75302062","wikidata":"https://www.wikidata.org/wiki/Q900150","display_name":"Photonic crystal","level":2,"score":0.5094000101089478},{"id":"https://openalex.org/C2778965693","wikidata":"https://www.wikidata.org/wiki/Q2027500","display_name":"Optomechanics","level":3,"score":0.4487999975681305},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4431000053882599},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.42890000343322754},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.42669999599456787},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.41769999265670776},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.40700000524520874},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.39730000495910645},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3968999981880188},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.39500001072883606},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.382999986410141},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.3434000015258789},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.32010000944137573},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.3151000142097473},{"id":"https://openalex.org/C196348190","wikidata":"https://www.wikidata.org/wiki/Q3744733","display_name":"Mechanical resonance","level":3,"score":0.31150001287460327},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.305400013923645},{"id":"https://openalex.org/C104286136","wikidata":"https://www.wikidata.org/wiki/Q1416137","display_name":"Modal analysis","level":3,"score":0.2969000041484833},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.2939000129699707},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.2937999963760376},{"id":"https://openalex.org/C96834759","wikidata":"https://www.wikidata.org/wiki/Q750463","display_name":"Phase modulation","level":3,"score":0.2694000005722046},{"id":"https://openalex.org/C187612029","wikidata":"https://www.wikidata.org/wiki/Q17083130","display_name":"Noise floor","level":4,"score":0.2639999985694885},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.25360000133514404},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.2524999976158142},{"id":"https://openalex.org/C22799297","wikidata":"https://www.wikidata.org/wiki/Q523846","display_name":"Photonic integrated circuit","level":3,"score":0.25}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/wf-iot64238.2025.11270477","is_oa":false,"landing_page_url":"https://doi.org/10.1109/wf-iot64238.2025.11270477","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 11th World Forum on Internet of Things (WF-IoT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1983329723","https://openalex.org/W1995127718","https://openalex.org/W2045676338","https://openalex.org/W2109426336","https://openalex.org/W2122330294","https://openalex.org/W2326441762","https://openalex.org/W2963938179","https://openalex.org/W3020201810","https://openalex.org/W3037306418","https://openalex.org/W3132654072","https://openalex.org/W3192106249","https://openalex.org/W4211100070","https://openalex.org/W4248066356","https://openalex.org/W4408316380","https://openalex.org/W4408742193"],"related_works":[],"abstract_inverted_index":{"This":[0,151],"paper":[1],"presents":[2],"a":[3,10,39,55,79,86,159],"chip-level":[4],"optomechanical":[5,26,60],"torque":[6,33,87,144,194],"sensor":[7],"based":[8],"on":[9],"slot-type":[11],"photonic":[12,41,51,125],"crystal":[13,42,52,126],"cavity,":[14],"achieving":[15],"significant":[16],"miniaturization":[17],"and":[18,54,70,129,167,175,190],"improved":[19],"detection":[20,153],"sensitivity.":[21],"The":[22,44,100],"nanofabricated":[23],"device":[24],"integrates":[25],"principles":[27],"with":[28,138],"the":[29,74,105,135],"SOI":[30],"platform,":[31],"enabling":[32],"measurement":[34,157],"through":[35,121],"wavelength":[36],"modulation":[37,128],"of":[38,82,89,104,124],"high-Q":[40],"microcavity.":[43],"innovative":[45],"design":[46],"features":[47],"an":[48],"optimized":[49,109],"air-gap":[50,130],"configuration":[53],"suspended":[56],"mass-cantilever":[57],"system,":[58],"enhancing":[59],"coupling":[61],"while":[62],"maintaining":[63],"mechanical":[64,106],"stability.":[65],"Systematic":[66],"COMSOL":[67],"multiphysics":[68],"simulations":[69],"theoretical":[71],"modeling":[72],"establish":[73],"sensor\u2019s":[75],"operating":[76],"parameters":[77],"at":[78,147],"characteristic":[80],"frequency":[81],"1.13":[83],"MHz,":[84],"yielding":[85],"sensitivity":[88],"6.9":[90],"\u00d7":[91,112],"10<sup":[92,113],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[93,98,114,119],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">\u221220</sup>":[94,115],"N":[95],"\u2022":[96,117],"m/Hz<sup":[97],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">1/2</sup>.":[99],"effective":[101],"modal":[102],"mass":[103],"resonator":[107],"is":[108,196],"to":[110,143],"2.57":[111],"kg":[116],"m<sup":[118],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[120],"parameter":[122],"analysis":[123],"displacement":[127],"dimensions.":[131],"Experimental":[132],"tests":[133],"validate":[134],"simulation":[136],"results,":[137],"optical":[139,163],"resonance":[140,165],"shifts":[141,166],"corresponding":[142],"changes":[145],"observed":[146],"1511.6":[148],"nm":[149],"wavelength.":[150],"wavelength-modulation-based":[152],"mechanism":[154],"achieves":[155],"high-precision":[156],"via":[158],"linear":[160],"mapping":[161],"between":[162],"cavity":[164],"external":[168],"torque.":[169],"It":[170],"eliminates":[171],"electrical":[172],"noise":[173],"interference":[174],"attains":[176],"thermodynamic-limit":[177],"performance,":[178],"showing":[179],"great":[180],"application":[181],"potential":[182],"in":[183],"IoT":[184],"scenarios":[185],"like":[186],"industrial":[187],"automation":[188],"equipment":[189],"MEMS,":[191],"where":[192],"precise":[193],"monitoring":[195],"crucial.":[197]},"counts_by_year":[],"updated_date":"2026-03-07T16:01:11.037858","created_date":"2025-12-08T00:00:00"}