{"id":"https://openalex.org/W1487166731","doi":"https://doi.org/10.1109/vts.2015.7116262","title":"3D microelectronic with BEOL compatible devices","display_name":"3D microelectronic with BEOL compatible devices","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W1487166731","doi":"https://doi.org/10.1109/vts.2015.7116262","mag":"1487166731"},"language":"en","primary_location":{"id":"doi:10.1109/vts.2015.7116262","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vts.2015.7116262","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 33rd VLSI Test Symposium (VTS)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5083531118","display_name":"Dominique Drouin","orcid":"https://orcid.org/0000-0003-2156-967X"},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"D Drouin","raw_affiliation_strings":["Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada"],"affiliations":[{"raw_affiliation_string":"Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada","institution_ids":["https://openalex.org/I135117807"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003814728","display_name":"M A-Bounouar","orcid":null},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M A-Bounouar","raw_affiliation_strings":["Universite de Sherbrooke, Sherbrooke, QC, CA","Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke, 3000 Boul. Universite, J1K OA5, Quebec, Canada"],"affiliations":[{"raw_affiliation_string":"Universite de Sherbrooke, Sherbrooke, QC, CA","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke, 3000 Boul. Universite, J1K OA5, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058836524","display_name":"Gabriel Droulers","orcid":"https://orcid.org/0000-0002-8743-5271"},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"G Droulers","raw_affiliation_strings":["Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada"],"affiliations":[{"raw_affiliation_string":"Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada","institution_ids":["https://openalex.org/I135117807"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086176352","display_name":"Marina Labalette","orcid":null},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M Labalette","raw_affiliation_strings":["Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada"],"affiliations":[{"raw_affiliation_string":"Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada","institution_ids":["https://openalex.org/I135117807"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018159807","display_name":"Michel Pioro-Ladri\u00e8re","orcid":"https://orcid.org/0000-0001-9762-5557"},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M Pioro-Ladriere","raw_affiliation_strings":["Universite de Sherbrooke, Sherbrooke, QC, CA","Departement de physique, Universite de Sherbrooke, 2500 Boul. Universite, J1K 2R1, Quebec, Canada"],"affiliations":[{"raw_affiliation_string":"Universite de Sherbrooke, Sherbrooke, QC, CA","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Departement de physique, Universite de Sherbrooke, 2500 Boul. Universite, J1K 2R1, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021444626","display_name":"A. Souifi","orcid":"https://orcid.org/0000-0001-7616-6873"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A Souifi","raw_affiliation_strings":["Institut des Nanotechnologies de Lyon - UMR CNRS 5270","Institut des Nanotechnologies de Lyon - UMR CNRS 5270, 7 av. Jean Capelle, 69621 Villeurbanne cedex, France"],"affiliations":[{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon - UMR CNRS 5270","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon - UMR CNRS 5270, 7 av. Jean Capelle, 69621 Villeurbanne cedex, France","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5017206286","display_name":"Serge Ecoffey","orcid":"https://orcid.org/0000-0002-3002-501X"},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"S Ecoffey","raw_affiliation_strings":["Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada"],"affiliations":[{"raw_affiliation_string":"Institut Interdisciplinaire d'Innovation Technologique (3IT), Universite de Sherbrooke 3000 Boul Universite, Sherbrooke, Quebec, Canada","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies Nanosystemes (LN2) - CNRS UMI-3463, Universite de Sherbrooke, Canada","institution_ids":["https://openalex.org/I135117807"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5083531118"],"corresponding_institution_ids":["https://openalex.org/I135117807"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0162544,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/back-end-of-line","display_name":"Back end of line","score":0.9295110702514648},{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.7999856472015381},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.6351214647293091},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6033837795257568},{"id":"https://openalex.org/keywords/three-dimensional-integrated-circuit","display_name":"Three-dimensional integrated circuit","score":0.44621944427490234},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.43777117133140564},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.43654558062553406},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4050157070159912},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.39645901322364807},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.32661640644073486},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27203214168548584},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.25110119581222534},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.23429492115974426}],"concepts":[{"id":"https://openalex.org/C2776628375","wikidata":"https://www.wikidata.org/wiki/Q4839229","display_name":"Back end of line","level":3,"score":0.9295110702514648},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7999856472015381},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.6351214647293091},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6033837795257568},{"id":"https://openalex.org/C59088047","wikidata":"https://www.wikidata.org/wiki/Q229370","display_name":"Three-dimensional integrated circuit","level":3,"score":0.44621944427490234},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43777117133140564},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.43654558062553406},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4050157070159912},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39645901322364807},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.32661640644073486},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27203214168548584},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.25110119581222534},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.23429492115974426},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vts.2015.7116262","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vts.2015.7116262","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 33rd VLSI Test Symposium (VTS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.6700000166893005,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W1989826997","https://openalex.org/W2099937946"],"related_works":["https://openalex.org/W2016970881","https://openalex.org/W2041294738","https://openalex.org/W2018464517","https://openalex.org/W2333804548","https://openalex.org/W1990828594","https://openalex.org/W294051742","https://openalex.org/W3093450488","https://openalex.org/W2460662058","https://openalex.org/W2027159884","https://openalex.org/W2016589506"],"abstract_inverted_index":{"This":[0],"presentation":[1],"will":[2],"address":[3],"the":[4,13],"potential":[5],"of":[6],"nanoelectronic":[7],"devices":[8],"3D":[9],"monolithic":[10],"integration":[11],"in":[12],"CMOS":[14],"back-end-of-line":[15],"(BEOL)":[16],"to":[17],"add":[18],"functionality":[19],"and":[20],"enhance":[21],"integrated":[22],"circuits":[23],"(ICs)":[24],"performances.":[25]},"counts_by_year":[],"updated_date":"2026-04-02T15:55:50.835912","created_date":"2025-10-10T00:00:00"}