{"id":"https://openalex.org/W4401881628","doi":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631463","title":"Backside Power Delivery in High Density and High Performance Context: IR-Drop and Block-Level Power-Performance-Area Benefits","display_name":"Backside Power Delivery in High Density and High Performance Context: IR-Drop and Block-Level Power-Performance-Area Benefits","publication_year":2024,"publication_date":"2024-06-16","ids":{"openalex":"https://openalex.org/W4401881628","doi":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631463"},"language":"en","primary_location":{"id":"doi:10.1109/vlsitechnologyandcir46783.2024.10631463","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631463","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051082932","display_name":"Yun Zhou","orcid":"https://orcid.org/0000-0001-5879-6142"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"Yun Zhou","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010981401","display_name":"S. C. Song","orcid":"https://orcid.org/0000-0002-5484-6058"},"institutions":[{"id":"https://openalex.org/I1291425158","display_name":"Google (United States)","ror":"https://ror.org/00njsd438","country_code":"US","type":"company","lineage":["https://openalex.org/I1291425158","https://openalex.org/I4210128969"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.C. Song","raw_affiliation_strings":["Google LLC,Mountain View,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Google LLC,Mountain View,CA,USA","institution_ids":["https://openalex.org/I1291425158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013749399","display_name":"Halil K\u00fckner","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Halil K\u00fckner","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056877381","display_name":"Giuliano Sisto","orcid":"https://orcid.org/0000-0001-8706-4311"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Giuliano Sisto","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047728710","display_name":"Sheng Yang","orcid":"https://orcid.org/0000-0003-1869-3100"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Sheng Yang","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003344211","display_name":"Anita Farokhnejad","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Anita Farokhnejad","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092266407","display_name":"Mohamed Naeim","orcid":"https://orcid.org/0009-0006-8202-2159"},"institutions":[{"id":"https://openalex.org/I66217453","display_name":"Cadence Design Systems (United States)","ror":"https://ror.org/04w8xa018","country_code":"US","type":"company","lineage":["https://openalex.org/I66217453"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohamed Naeim","raw_affiliation_strings":["Cadence Design Systems,San Jose,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cadence Design Systems,San Jose,CA,USA","institution_ids":["https://openalex.org/I66217453"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089816934","display_name":"Moritz Brunion","orcid":"https://orcid.org/0000-0001-7842-7774"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Moritz Brunion","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079611556","display_name":"Ji-Yung Lin","orcid":"https://orcid.org/0000-0001-9119-6069"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ji-Yung Lin","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013521006","display_name":"Odysseas Zografos","orcid":"https://orcid.org/0000-0002-9998-8009"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Odysseas Zografos","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087726615","display_name":"Pieter Weckx","orcid":"https://orcid.org/0000-0003-4579-0571"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Pieter Weckx","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075251005","display_name":"S. Ekbote","orcid":null},"institutions":[{"id":"https://openalex.org/I1291425158","display_name":"Google (United States)","ror":"https://ror.org/00njsd438","country_code":"US","type":"company","lineage":["https://openalex.org/I1291425158","https://openalex.org/I4210128969"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shashank Ekbote","raw_affiliation_strings":["Google LLC,Mountain View,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Google LLC,Mountain View,CA,USA","institution_ids":["https://openalex.org/I1291425158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092244738","display_name":"Nick Stevens-Yu","orcid":null},"institutions":[{"id":"https://openalex.org/I1291425158","display_name":"Google (United States)","ror":"https://ror.org/00njsd438","country_code":"US","type":"company","lineage":["https://openalex.org/I1291425158","https://openalex.org/I4210128969"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nick Stevens-Yu","raw_affiliation_strings":["Google LLC,Mountain View,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Google LLC,Mountain View,CA,USA","institution_ids":["https://openalex.org/I1291425158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026035071","display_name":"D. Greenlaw","orcid":null},"institutions":[{"id":"https://openalex.org/I1291425158","display_name":"Google (United States)","ror":"https://ror.org/00njsd438","country_code":"US","type":"company","lineage":["https://openalex.org/I1291425158","https://openalex.org/I4210128969"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Greenlaw","raw_affiliation_strings":["Google LLC,Mountain View,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Google LLC,Mountain View,CA,USA","institution_ids":["https://openalex.org/I1291425158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103706295","display_name":"Steve Molloy","orcid":null},"institutions":[{"id":"https://openalex.org/I1291425158","display_name":"Google (United States)","ror":"https://ror.org/00njsd438","country_code":"US","type":"company","lineage":["https://openalex.org/I1291425158","https://openalex.org/I4210128969"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Steve Molloy","raw_affiliation_strings":["Google LLC,Mountain View,CA,USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Google LLC,Mountain View,CA,USA","institution_ids":["https://openalex.org/I1291425158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064166800","display_name":"Geert Hellings","orcid":"https://orcid.org/0000-0002-5376-2119"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Geert Hellings","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103112055","display_name":"Julien Ryckaert","orcid":"https://orcid.org/0009-0001-0140-3042"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Julien Ryckaert","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":17,"corresponding_author_ids":["https://openalex.org/A5051082932"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":2.7415,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.90814948,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9695000052452087,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9695000052452087,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.9671000242233276,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11444","display_name":"Electromagnetic Compatibility and Noise Suppression","score":0.9671000242233276,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.5788536667823792},{"id":"https://openalex.org/keywords/drop","display_name":"Drop (telecommunication)","score":0.5717883110046387},{"id":"https://openalex.org/keywords/context","display_name":"Context (archaeology)","score":0.5493749976158142},{"id":"https://openalex.org/keywords/power-network-design","display_name":"Power network design","score":0.4703638255596161},{"id":"https://openalex.org/keywords/block","display_name":"Block (permutation group theory)","score":0.4534570574760437},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.40762007236480713},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.16739019751548767},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08746388554573059},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.07205137610435486},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.05824664235115051}],"concepts":[{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.5788536667823792},{"id":"https://openalex.org/C2781345722","wikidata":"https://www.wikidata.org/wiki/Q5308388","display_name":"Drop (telecommunication)","level":2,"score":0.5717883110046387},{"id":"https://openalex.org/C2779343474","wikidata":"https://www.wikidata.org/wiki/Q3109175","display_name":"Context (archaeology)","level":2,"score":0.5493749976158142},{"id":"https://openalex.org/C164565468","wikidata":"https://www.wikidata.org/wiki/Q7236535","display_name":"Power network design","level":3,"score":0.4703638255596161},{"id":"https://openalex.org/C2777210771","wikidata":"https://www.wikidata.org/wiki/Q4927124","display_name":"Block (permutation group theory)","level":2,"score":0.4534570574760437},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.40762007236480713},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.16739019751548767},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08746388554573059},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.07205137610435486},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.05824664235115051},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsitechnologyandcir46783.2024.10631463","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631463","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.5699999928474426}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W4230760062","https://openalex.org/W4385152140"],"related_works":["https://openalex.org/W2493360346","https://openalex.org/W2109799272","https://openalex.org/W4233629644","https://openalex.org/W4255681223","https://openalex.org/W4283721994","https://openalex.org/W2319035808","https://openalex.org/W184298953","https://openalex.org/W3014070231","https://openalex.org/W2541000087","https://openalex.org/W2113278517"],"abstract_inverted_index":{"We":[0],"evaluate":[1],"block-level":[2],"power-performance-area":[3],"(PPA)":[4],"tradeoffs":[5],"of":[6,18,67,104,122],"two":[7],"backside":[8],"power":[9,50],"(BSPDN)":[10],"options:":[11],"Through":[12],"Silicon":[13],"Via":[14],"in":[15,25,39,91],"the":[16,47,53,72,115],"Middle":[17],"Line":[19],"(TSVM)":[20],"and":[21,42],"Backside":[22],"Contact":[23],"(BSC)":[24],"an":[26,76],"A10":[27],"(10A)":[28],"nanosheet":[29],"technology":[30,44,56],"node.":[31],"The":[32],"benchmarking":[33],"was":[34],"conducted":[35],"for":[36,85,96],"high-performance":[37,41],"designs":[38],"both":[40],"high-density":[43],"scenarios":[45],"taking":[46],"traditional":[48],"frontside":[49,73],"option":[51],"as":[52],"baseline.":[54],"HP":[55],"clearly":[57],"benefits":[58],"most":[59],"since":[60],"its":[61],"dense":[62],"PDN":[63],"consumes":[64],"a":[65,108],"lot":[66],"metal":[68],"routing":[69],"resources":[70],"on":[71],"to":[74],"keep":[75],"acceptable":[77],"IR-drop.":[78],"Introducing":[79],"BSPDN":[80],"frees":[81],"up":[82],"those":[83],"metals":[84],"more":[86],"efficient":[87],"signal":[88],"routing,":[89],"resulting":[90],"19%":[92],"smaller":[93],"area":[94],"(8%":[95],"HD).":[97],"Continued":[98],"standard":[99],"cell":[100],"scaling":[101],"by":[102],"means":[103],"BSC":[105],"translates":[106],"into":[107],"further":[109],"-25%":[110],"core":[111],"area,":[112],"with":[113],"only":[114],"densest":[116],"4.5T":[117],"HD":[118],"results":[119],"showing":[120],"signs":[121],"congestion":[123],"at":[124],"high":[125],"frequencies.":[126]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":11},{"year":2024,"cited_by_count":1}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2025-10-10T00:00:00"}