{"id":"https://openalex.org/W4286571750","doi":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830395","title":"First Fire-free, Low-voltage (~1.2 V), and Low Off-current (~3 nA) SiO<sub>x</sub>Te<sub>y</sub> Selectors","display_name":"First Fire-free, Low-voltage (~1.2 V), and Low Off-current (~3 nA) SiO<sub>x</sub>Te<sub>y</sub> Selectors","publication_year":2022,"publication_date":"2022-06-12","ids":{"openalex":"https://openalex.org/W4286571750","doi":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830395"},"language":"en","primary_location":{"id":"doi:10.1109/vlsitechnologyandcir46769.2022.9830395","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830395","pdf_url":null,"source":{"id":"https://openalex.org/S4363605407","display_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054861068","display_name":"S. Vaziri","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"S. Vaziri","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","institution_ids":["https://openalex.org/I1334877674"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021169602","display_name":"I. Datye","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"I. M. Datye","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","institution_ids":["https://openalex.org/I1334877674"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006552129","display_name":"Elia Ambrosi","orcid":"https://orcid.org/0000-0002-5418-7099"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"E. Ambrosi","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016699271","display_name":"Asir Intisar Khan","orcid":"https://orcid.org/0000-0003-4635-4667"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. I. Khan","raw_affiliation_strings":["Stanford University,Department of Electrical Engineering,Stanford,CA,USA","Department of Electrical Engineering, Stanford University, Stanford, CA, USA"],"affiliations":[{"raw_affiliation_string":"Stanford University,Department of Electrical Engineering,Stanford,CA,USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Department of Electrical Engineering, Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085582223","display_name":"Hyun-Keun Kwon","orcid":"https://orcid.org/0000-0003-2570-287X"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Kwon","raw_affiliation_strings":["Stanford University,Department of Mechanical Engineering,Stanford,CA,USA","Department of Mechanical Engineering, Stanford University, Stanford, CA, USA"],"affiliations":[{"raw_affiliation_string":"Stanford University,Department of Mechanical Engineering,Stanford,CA,USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Department of Mechanical Engineering, Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003447181","display_name":"C. H. Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C. H. Wu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031578743","display_name":"Chia\u2010Wei Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C. F. Hsu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035310395","display_name":"Jeremy Guy","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Guy","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","institution_ids":["https://openalex.org/I1334877674"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114178620","display_name":"T. Y. Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"T. Y. Lee","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059975258","display_name":"H.\u2010S. Philip Wong","orcid":"https://orcid.org/0000-0002-0096-1472"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"H.-S. P. Wong","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007987722","display_name":"X. Y. Bao","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"X. Y. Bao","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company (TSMC),Corporate Research,San Jose,CA,USA","institution_ids":["https://openalex.org/I1334877674"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), San Jose, CA, USA","institution_ids":["https://openalex.org/I1334877674"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5054861068"],"corresponding_institution_ids":["https://openalex.org/I1334877674"],"apc_list":null,"apc_paid":null,"fwci":2.2467,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.88784437,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"324","last_page":"325"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.5336378812789917},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4954766035079956},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.48033371567726135},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3662629723548889},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3520699143409729},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3345886170864105},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3303321599960327},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.2320762276649475},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15310370922088623}],"concepts":[{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.5336378812789917},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4954766035079956},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.48033371567726135},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3662629723548889},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3520699143409729},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3345886170864105},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3303321599960327},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2320762276649475},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15310370922088623},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsitechnologyandcir46769.2022.9830395","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830395","pdf_url":null,"source":{"id":"https://openalex.org/S4363605407","display_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8700000047683716,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2599227856","https://openalex.org/W3034821331"],"related_works":["https://openalex.org/W2081391916","https://openalex.org/W2048338657","https://openalex.org/W2140505219","https://openalex.org/W811420920","https://openalex.org/W2485456032","https://openalex.org/W2810232775","https://openalex.org/W2204577850","https://openalex.org/W4385212108","https://openalex.org/W4385541187","https://openalex.org/W2259647301"],"abstract_inverted_index":{"Operating":[0],"voltage":[1,29,53],"compatibility":[2],"and":[3,54,75,108],"low":[4,62,76],"power":[5],"consumption":[6],"are":[7],"crucial":[8],"for":[9,88],"on-chip":[10],"integration":[11],"of":[12,110],"high-density":[13],"one-selector-one-resistor":[14],"(1S/1R)":[15],"arrays.":[16],"However,":[17],"traditional":[18],"chalcogenide-based":[19],"threshold":[20,33,63],"selectors":[21,60,97],"require":[22],"a":[23,38,44],"one-time":[24],"first":[25,51,56],"fire":[26,52],"operation":[27],"with":[28,49],"higher":[30],"than":[31],"the":[32],"voltage.":[34],"Here,":[35],"we":[36],"introduce":[37],"novel":[39],"SiOTe":[40,96],"selector":[41],"based":[42],"on":[43],"stable":[45],"silicon":[46],"oxide":[47],"matrix,":[48],"tunable":[50],"ultimately":[55],"fire-free":[57],"characteristics.":[58],"These":[59],"achieve":[61],"voltages":[64],"(V":[65],"<inf":[66,79,90],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[67,80,91,113],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">th</inf>":[68,92],"=":[69,93],"1.1":[70],"V":[71,87,89],"\u2013":[72],"1.5":[73],"V)":[74],"off-current":[77],"(I":[78],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">off</inf>":[81],"~":[82],"3":[83],"nA":[84],"at":[85],"0.5":[86],"1.2":[94],"V).":[95],"show":[98],"promising":[99],"thermal":[100],"stability":[101],"(300":[102],"\u00b0C,":[103],"30":[104],"min":[105],"in":[106],"air)":[107],"endurance":[109],">10":[111],"<sup":[112],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">8</sup>":[114],"cycles.":[115]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1}],"updated_date":"2026-03-24T08:02:53.985720","created_date":"2025-10-10T00:00:00"}