{"id":"https://openalex.org/W4286571724","doi":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830376","title":"Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS<sub>2</sub> Transistor","display_name":"Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS<sub>2</sub> Transistor","publication_year":2022,"publication_date":"2022-06-12","ids":{"openalex":"https://openalex.org/W4286571724","doi":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830376"},"language":"en","primary_location":{"id":"doi:10.1109/vlsitechnologyandcir46769.2022.9830376","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830376","pdf_url":null,"source":{"id":"https://openalex.org/S4363605407","display_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100443406","display_name":"Ming\u2010Yang Li","orcid":"https://orcid.org/0000-0001-8392-9752"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ming-Yang Li","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102703017","display_name":"Ching-Hao Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ching-Hao Hsu","raw_affiliation_strings":["National Taiwan University,Graduate Institute of Photonics and Optoelectronics,Taipei,Taiwan","Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University,Graduate Institute of Photonics and Optoelectronics,Taipei,Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087720258","display_name":"Shin\u2010Wei Shen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shin-Wei Shen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056112055","display_name":"Ang\u2010Sheng Chou","orcid":"https://orcid.org/0000-0002-2852-1313"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ang-Sheng Chou","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083027719","display_name":"Yuxuan Lin","orcid":"https://orcid.org/0000-0003-0638-2620"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]},{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW","US"],"is_corresponding":false,"raw_author_name":"Yuxuan Cosmi Lin","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","institution_ids":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060837084","display_name":"Chih\u2010Piao Chuu","orcid":"https://orcid.org/0000-0002-0508-1511"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-Piao Chuu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059895037","display_name":"Ning Yang","orcid":"https://orcid.org/0000-0002-0767-6594"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]},{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["TW","US"],"is_corresponding":false,"raw_author_name":"Ning Yang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","institution_ids":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045482708","display_name":"Sui-An Chou","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sui-An Chou","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031575192","display_name":"Lin-Yun Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Lin-Yun Huang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091130424","display_name":"Chao-Ching Cheng","orcid":"https://orcid.org/0000-0001-5893-0129"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chao-Ching Cheng","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047679939","display_name":"Wei-Yen Woon","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Yen Woon","raw_affiliation_strings":["Pathfinding, Taiwan Semiconductor Manufacturing Company,Hsinchu,Taiwan","Pathfinding, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Pathfinding, Taiwan Semiconductor Manufacturing Company,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Pathfinding, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031051805","display_name":"Szuya Sandy Liao","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Szuya Liao","raw_affiliation_strings":["Pathfinding, Taiwan Semiconductor Manufacturing Company,Hsinchu,Taiwan","Pathfinding, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Pathfinding, Taiwan Semiconductor Manufacturing Company,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Pathfinding, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004605327","display_name":"Chih\u2010I Wu","orcid":"https://orcid.org/0000-0003-3613-7511"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-I Wu","raw_affiliation_strings":["National Taiwan University,Graduate Institute of Photonics and Optoelectronics,Taipei,Taiwan","Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Taiwan University,Graduate Institute of Photonics and Optoelectronics,Taipei,Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067948521","display_name":"Lain\u2010Jong Li","orcid":"https://orcid.org/0000-0002-4059-7783"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Lain-Jong Li","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043612766","display_name":"Iuliana Radu","orcid":"https://orcid.org/0000-0002-7230-7218"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Iuliana Radu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059975258","display_name":"H.\u2010S. Philip Wong","orcid":"https://orcid.org/0000-0002-0096-1472"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"H.-S. Philip Wong","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100452639","display_name":"Han Wang","orcid":"https://orcid.org/0000-0001-5121-3362"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]},{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW","US"],"is_corresponding":false,"raw_author_name":"Han Wang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company,Corporate Research,San Jose,USA","institution_ids":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]},{"raw_affiliation_string":"Corporate Research, Taiwan Semiconductor Manufacturing Company, San Jose, USA","institution_ids":["https://openalex.org/I1334877674"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":17,"corresponding_author_ids":["https://openalex.org/A5100443406"],"corresponding_institution_ids":["https://openalex.org/I4210120917"],"apc_list":null,"apc_paid":null,"fwci":12.1941,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.99255398,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"290","last_page":"291"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/monolayer","display_name":"Monolayer","score":0.633512556552887},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6190422177314758},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5683807134628296},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.4369467496871948},{"id":"https://openalex.org/keywords/scale","display_name":"Scale (ratio)","score":0.41765648126602173},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.36583980917930603},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3375917971134186},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3254474997520447},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2878211736679077},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.276936411857605},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1308569312095642}],"concepts":[{"id":"https://openalex.org/C7070889","wikidata":"https://www.wikidata.org/wiki/Q902488","display_name":"Monolayer","level":2,"score":0.633512556552887},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6190422177314758},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5683807134628296},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4369467496871948},{"id":"https://openalex.org/C2778755073","wikidata":"https://www.wikidata.org/wiki/Q10858537","display_name":"Scale (ratio)","level":2,"score":0.41765648126602173},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.36583980917930603},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3375917971134186},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3254474997520447},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2878211736679077},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.276936411857605},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1308569312095642},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsitechnologyandcir46769.2022.9830376","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830376","pdf_url":null,"source":{"id":"https://openalex.org/S4363605407","display_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320309618","display_name":"Ministry of Science and Technology","ror":"https://ror.org/02b207r52"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W623846604","https://openalex.org/W1775846836","https://openalex.org/W2256401257","https://openalex.org/W2315572676","https://openalex.org/W2438086435","https://openalex.org/W2804762466","https://openalex.org/W3102004375","https://openalex.org/W3112161163","https://openalex.org/W3124053148","https://openalex.org/W3133792218","https://openalex.org/W3136971093","https://openalex.org/W3140560743","https://openalex.org/W3160045927","https://openalex.org/W3214807145"],"related_works":["https://openalex.org/W4296959784","https://openalex.org/W2506395494","https://openalex.org/W2007651204","https://openalex.org/W2137041396","https://openalex.org/W2902546961","https://openalex.org/W4254185665","https://openalex.org/W2058676402","https://openalex.org/W2399397734","https://openalex.org/W2010486977","https://openalex.org/W2068460603"],"abstract_inverted_index":{"A":[0],"novel":[1],"wafer-scale":[2],"semi-automated":[3],"dry":[4],"transfer":[5,41,52,62,92],"process":[6],"for":[7,43],"monolayer":[8,68],"(1L)":[9],"CVD":[10,69,82],"WS":[11,70,84],"<inf":[12,30,71,85,111],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[13,31,72,86,112],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[14,32,73,87],"was":[15],"developed":[16],"utilizing":[17],"the":[18,51],"weakly":[19],"coupled":[20],"interface":[21],"between":[22],"semimetal":[23,35,94],"(Bi)":[24],"and":[25,66,96,106,117,125],"two-dimensional":[26],"(2D)":[27],"semiconductor":[28],"(WS":[29],").":[33],"Bi":[34],"serves":[36],"as":[37],"a":[38],"gently":[39],"adhesive":[40],"template":[42],"2D":[44,56],"materials,":[45],"introducing":[46],"minimal":[47],"additional":[48],"defects":[49],"during":[50],"process.":[53],"Based":[54],"on":[55],"materials":[57],"processed":[58],"using":[59,90],"this":[60],"new":[61],"method,":[63],"semimetal-contacted":[64],"(Bi":[65,95],"Sb)":[67,97],"nFETs":[74,88],"were":[75],"further":[76],"demonstrated":[77],"at":[78,109],"wafer":[79],"scale.":[80],"Our":[81],"1L":[83],"fabricated":[89],"semimetal-assisted":[91],"with":[93],"contacts":[98],"show":[99],"record":[100,118],"high":[101],"on-current":[102],"of":[103,122],"250":[104],"\u00b5A/\u00b5m":[105,108],"243":[107],"V":[110],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">DS</inf>":[113],"=":[114],"1":[115],"V,":[116],"low":[119],"contact":[120],"resistance":[121],"0.63":[123],"k\u03a9\u2022\u00b5m":[124],"0.73":[126],"k\u03a9\u2022\u00b5m,":[127],"respectively.":[128]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2}],"updated_date":"2026-03-14T08:43:22.919905","created_date":"2025-10-10T00:00:00"}