{"id":"https://openalex.org/W2054801689","doi":"https://doi.org/10.1109/vlsisoc.2011.6081646","title":"Towards future VLSI interconnects using aligned carbon nanotubes","display_name":"Towards future VLSI interconnects using aligned carbon nanotubes","publication_year":2011,"publication_date":"2011-10-01","ids":{"openalex":"https://openalex.org/W2054801689","doi":"https://doi.org/10.1109/vlsisoc.2011.6081646","mag":"2054801689"},"language":"en","primary_location":{"id":"doi:10.1109/vlsisoc.2011.6081646","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsisoc.2011.6081646","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011166102","display_name":"Yang Chai","orcid":"https://orcid.org/0000-0002-8943-0861"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yang Chai","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103166553","display_name":"Minghui Sun","orcid":"https://orcid.org/0009-0004-8391-2319"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Minghui Sun","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077305843","display_name":"Zhiyong Xiao","orcid":"https://orcid.org/0000-0003-2461-2338"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Zhiyong Xiao","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100697825","display_name":"Yuan Li","orcid":"https://orcid.org/0000-0002-2891-8919"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yuan Li","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100402892","display_name":"Min Zhang","orcid":"https://orcid.org/0000-0002-2225-8024"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Min Zhang","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103556635","display_name":"P.C.H. Chan","orcid":null},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]},{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Philip C. H. Chan","raw_affiliation_strings":["Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","Department of Electronic and Information Engineering, Hong Kong Polytechnic University, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, China","institution_ids":["https://openalex.org/I200769079"]},{"raw_affiliation_string":"Department of Electronic and Information Engineering, Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"248","last_page":"253"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.874566912651062},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.7607216238975525},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.6866854429244995},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6429880857467651},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.5873015522956848},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.517969012260437},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.46473005414009094},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.415316104888916},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36251795291900635},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2028655707836151},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.08681786060333252},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07616439461708069}],"concepts":[{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.874566912651062},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.7607216238975525},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.6866854429244995},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6429880857467651},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5873015522956848},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.517969012260437},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.46473005414009094},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.415316104888916},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36251795291900635},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2028655707836151},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.08681786060333252},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07616439461708069},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/vlsisoc.2011.6081646","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsisoc.2011.6081646","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip","raw_type":"proceedings-article"},{"id":"pmh:oai:ira.lib.polyu.edu.hk:10397/9408","is_oa":false,"landing_page_url":"http://hdl.handle.net/10397/9408","pdf_url":null,"source":{"id":"https://openalex.org/S4306400205","display_name":"PolyU Institutional Research Archive (Hong Kong Polytechnic University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I14243506","host_organization_name":"Hong Kong Polytechnic University","host_organization_lineage":["https://openalex.org/I14243506"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-44077","is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-44077","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320323537","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":49,"referenced_works":["https://openalex.org/W1963925291","https://openalex.org/W1966735001","https://openalex.org/W1978553430","https://openalex.org/W1990357063","https://openalex.org/W1993932994","https://openalex.org/W2007737299","https://openalex.org/W2009238866","https://openalex.org/W2016926573","https://openalex.org/W2022736973","https://openalex.org/W2026933274","https://openalex.org/W2028845369","https://openalex.org/W2029892823","https://openalex.org/W2033261945","https://openalex.org/W2039815587","https://openalex.org/W2043503946","https://openalex.org/W2047050452","https://openalex.org/W2051139296","https://openalex.org/W2061466429","https://openalex.org/W2062849082","https://openalex.org/W2064884120","https://openalex.org/W2068103996","https://openalex.org/W2085816037","https://openalex.org/W2086461475","https://openalex.org/W2090905182","https://openalex.org/W2091357407","https://openalex.org/W2094778736","https://openalex.org/W2099129928","https://openalex.org/W2104948161","https://openalex.org/W2110016840","https://openalex.org/W2120551433","https://openalex.org/W2135440083","https://openalex.org/W2136737260","https://openalex.org/W2139676734","https://openalex.org/W2145236323","https://openalex.org/W2146597111","https://openalex.org/W2148566649","https://openalex.org/W2151972530","https://openalex.org/W2153319955","https://openalex.org/W2153812188","https://openalex.org/W2155827574","https://openalex.org/W2166378623","https://openalex.org/W2171014708","https://openalex.org/W2171760213","https://openalex.org/W2482627442","https://openalex.org/W2546297513","https://openalex.org/W3148426054","https://openalex.org/W6667490789","https://openalex.org/W6672121336","https://openalex.org/W6683024423"],"related_works":["https://openalex.org/W3107994849","https://openalex.org/W4247143848","https://openalex.org/W1576739978","https://openalex.org/W2985840163","https://openalex.org/W2009883749","https://openalex.org/W2735573198","https://openalex.org/W2155019192","https://openalex.org/W2081032080","https://openalex.org/W2134733504","https://openalex.org/W2144460576"],"abstract_inverted_index":{"The":[0],"copper":[1,32],"interconnects":[2,36,86,107],"cannot":[3],"keep":[4],"pace":[5],"with":[6,62,87],"the":[7,12,52,55,76,82,91,95,101,110,126],"IC":[8,88],"interconnect":[9,132],"requirements":[10],"as":[11,114],"feature":[13],"size":[14],"continues":[15],"to":[16,19,50,108],"scale":[17],"down":[18],"nanoscale.":[20],"Theoretical":[21],"works":[22,121],"predicted":[23],"that":[24],"carbon":[25],"nanotube":[26],"(CNT)":[27],"is":[28,60],"more":[29],"superior":[30],"than":[31],"for":[33,130],"future":[34],"VLSI":[35,116,131],"in":[37],"terms":[38],"of":[39,79,84,94,105,112,128],"electrical":[40,92],"conductivity,":[41],"thermal":[42],"management":[43],"and":[44,58,90],"reliability.":[45],"Technology":[46],"breakthroughs":[47],"are":[48],"required":[49],"bridge":[51],"gaps":[53],"between":[54],"theoretical":[56],"predictions":[57],"what":[59],"achievable":[61],"current":[63],"CNT":[64,85,96,113,129],"technology.":[65],"In":[66],"this":[67],"paper,":[68],"we":[69],"shall":[70],"describe":[71],"our":[72,120],"experimental":[73],"efforts":[74],"on":[75,125],"controlled":[77],"growth":[78],"aligned":[80],"CNTs;":[81],"integrations":[83],"technology;":[89],"characterization":[93],"interconnect.":[97],"We":[98,118],"also":[99],"present":[100],"electro-migration":[102],"test":[103],"result":[104],"CNT-based":[106],"demonstrate":[109],"potential":[111,127],"robust":[115],"interconnects.":[117],"hope":[119],"provide":[122],"useful":[123],"data":[124],"applications.":[133]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}
